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    • 2. 发明授权
    • Electrostatic chuck with reduced arcing
    • 静电卡盘减少电弧
    • US08270141B2
    • 2012-09-18
    • US12884967
    • 2010-09-17
    • Michael D. WillwerthDavid PalagashviliDouglas A. Buchberger, Jr.Michael G. Chafin
    • Michael D. WillwerthDavid PalagashviliDouglas A. Buchberger, Jr.Michael G. Chafin
    • H02T23/00
    • H01L21/6833Y10T279/23
    • Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck may include a body having a notched upper peripheral edge, defined by a first surface perpendicular to a body sidewall and a stepped second surface disposed between the first surface and a body upper surface, and a plurality of holes disposed through the body along the first surface; a plurality of fasteners disposed through the plurality of holes to couple the body to a base disposed beneath the body; a dielectric member disposed above the body upper surface to electrostatically retain a substrate; an insulator ring disposed about the body within the notched upper peripheral edge and having a stepped inner sidewall that mates with the stepped second surface to define a non-linear interface therebetween; and an edge ring disposed over the insulator ring, the non-linear interface limiting arcing between the edge ring and the fastener.
    • 本文提供了静电卡盘的实施例。 在一些实施例中,静电吸盘可以包括具有切口的上周边边缘的主体,该顶部边缘由垂直于主体侧壁的第一表面和设置在第一表面和主体上表面之间的阶梯状第二表面限定, 沿着第一面穿过身体; 多个紧固件,其布置成穿过所述多个孔,以将所述主体连接到设置在所述主体下方的底座; 设置在所述主体上表面上方的电介质部件,以静电保持基板; 绝缘体环,其围绕所述主体设置在所述凹口的上周边边缘内并且具有与所述阶梯状的第二表面配合的阶梯状的内侧壁,以在其间界定非线性界面; 以及设置在所述绝缘体环上的边缘环,所述非线性界面限制所述边缘环和所述紧固件之间的电弧。
    • 10. 发明授权
    • High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck
    • 高AC电流高RF功率AC-RF去耦滤波器用于等离子体反应器加热静电卡盘
    • US07777152B2
    • 2010-08-17
    • US11671927
    • 2007-02-06
    • Valentin N. TodorovMichael D. WillwerthAlexander PatersonBrian K. HatcherJames E. Sammons, IIIJohn P. Holland
    • Valentin N. TodorovMichael D. WillwerthAlexander PatersonBrian K. HatcherJames E. Sammons, IIIJohn P. Holland
    • B23K9/02H01P5/08C23C16/00
    • H05H1/46H01J37/32706H03H1/0007
    • An RF blocking filter isolates a two-phase AC power supply from at least 2 kV p-p of power of an HF frequency that is reactively coupled to a resistive heating element, while conducting several kW of 60 Hz AC power from the two-phase AC power supply to the resistive heating element without overheating, the two-phase AC power supply having a pair of terminals and the resistive heating element having a pair of terminals. The filter includes a pair of cylindrical non-conductive envelopes each having an interior diameter between about one and two inches and respective pluralities of fused iron powder toroids of magnetic permeability on the order of about 10 stacked coaxially within respective ones of the pair of cylindrical envelopes, the exterior diameter of the toroids being about the same as the interior diameter of each of the envelopes. A pair of wire conductors of diameter between 3 mm and 3.5 mm are helically wound around corresponding ones of the pair of envelopes to form respective inductor windings in the range of about 16 to 24 turns for each the envelope, each of the conductors having an input end and an output end. The input end of each one of the conductors is coupled to a corresponding one of the pair of terminals of the two-phase AC power supply, and the output end of each one of the conductors is coupled to a corresponding one of the pair of terminals of the resistive heating element.
    • RF阻断滤波器将两相交流电源从反应耦合到电阻加热元件的HF频率的至少2kV pp的功率隔离,同时从两相交流电源进行几kW的60Hz AC电力 供给电阻加热元件而不会过热,两相交流电源具有一对端子和电阻加热元件具有一对端子。 该过滤器包括一对圆柱形非导电封套,每一个内径均在约一英寸至两英寸之间,并且相应的多个约10层的磁导率的熔融铁粉末环形环共轴同心地位于一对圆柱形封套中 环形线圈的外径与每个信封的内径大致相同。 直径在3毫米与3.5毫米之间的一对电线导体螺旋缠绕在一对信封的相应的一对信封上,以形成每个封套约16至24匝范围的相应的电感绕组,每个导体具有一个输入 结束和输出结束。 每个导体的输入端耦合到两相交流电源的一对端子中的对应的一个,并且每一个导体的输出端耦合到该对端子中相应的一个端子 的电阻加热元件。