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    • 3. 发明授权
    • Silicon micromachined CO.sub.2 cleaning nozzle and method
    • 硅微加工二氧化碳清洗喷嘴及方法
    • US5545073A
    • 1996-08-13
    • US43943
    • 1993-04-05
    • Lawrence L. KneiselJay D. BakerLakhi N. Goenka
    • Lawrence L. KneiselJay D. BakerLakhi N. Goenka
    • B08B7/02B05B1/00B05B7/14B24C1/00B24C5/04B24C11/00
    • B05B1/005B24C1/003B24C5/04B05B7/14
    • An apparatus and method for cleaning a workpiece with abrasive CO.sub.2 snow operates with a nozzle for creating and expelling the snow. The nozzle includes an upstream section for receiving CO.sub.2 in a gaseous form, and having a first contour shaped for subsonic flow of the CO.sub.2. The nozzle also includes a downstream section for directing the flow of the CO.sub.2 and the snow toward the workpiece, with the downstream section having a second contour shaped for supersonic flow of the CO.sub.2. The nozzle includes a throat section, interposed between the upstream and downstream sections, for changing the CO.sub.2 from the gaseous phase along a constant entropy line to a gas and snow mixture within the downstream section at a speed of at least Mach 1.0. In this manner, additional kinetic energy is imparted to the snow by delaying the conversion into the solid phase until the gaseous CO.sub.2 reaches supersonic speeds.
    • 用研磨二氧化碳雪清洁工件的设备和方法与用于产生和排出雪的喷嘴一起工作。 喷嘴包括用于接收气体形式的CO 2的上游部分,并且具有成形为CO 2的亚音速流的第一轮廓。 喷嘴还包括用于将CO 2和雪的流动引向工件的下游部分,其中下游部分具有成形为用于CO 2的超音速流动的第二轮廓。 喷嘴包括插入在上游部分和下游部分之间的喉部,用于将CO 2从气相沿着恒定的熵线以至少马赫数为1.0的速度在下游部分内改变为气体和混合物。 以这种方式,通过延迟转化为固相直到气态CO 2达到超音速速度,赋予雪额外的动能。