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    • 1. 发明授权
    • Method for real-time monitoring thickness chance of coating film
    • 实时监测涂膜厚度变化的方法
    • US08377503B2
    • 2013-02-19
    • US12662546
    • 2010-04-22
    • Yu-Chia TsaoChung-Pei LeeKo-Shao ChenJia-Huey TsaoChun-Chih LinRen-Kun Liang
    • Yu-Chia TsaoChung-Pei LeeKo-Shao ChenJia-Huey TsaoChun-Chih LinRen-Kun Liang
    • C23C14/54
    • C23C16/44G01N21/553
    • A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.
    • 公开了一种用于实时监测涂膜厚度变化的方法。 在该方法中,首先提供具有室的涂布模块和包含SPR光纤传感器,光源,光接收检测器和光纤的膜厚监测模块。 光纤用于将SPR光纤传感器与光源和光接收检测器连接。 SPR光纤传感器具有感测区域,并且布置在腔室中。 光源为SPR光纤传感器提供光源。 然后,将基板放入室中。 虽然在基板上进行涂布处理,但是也在SPR光纤传感器的感测区域上形成膜。 光接收检测器接收从SPR光纤传感器的感测区域输出的信号,然后输出光强变化的信号。
    • 3. 发明申请
    • Method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same
    • 制造一氧化碳检测器的方法和使用该方法制造的一氧化碳检测器
    • US20080307856A1
    • 2008-12-18
    • US12153301
    • 2008-05-16
    • Ko-Shao ChenShu-Juan LiaoYun-Huang ChenJung-Chien Chang
    • Ko-Shao ChenShu-Juan LiaoYun-Huang ChenJung-Chien Chang
    • G01N27/04C23C4/10
    • G01N27/125
    • Disclosed is a method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same. Particularly disclosed is a method of fabricating a carbon monoxide detector, which can operate at room temperature and process high detecting selection, and the detector fabricated using the same. The method comprises: providing a substrate having an upper surface; forming two electrode sets on the upper surface of the substrate, and the two electrode sets combined to provide an interdigitated array electrode; forming a tin dioxide layer, which covers the portion of the two electrode sets and the portion of the upper surface; and forming an organic polymer layer on the surface of the tin dioxide layer. The carbon monoxide detector comprises: a substrate having an upper surface; two electrode sets, which are located on the upper surface of the substrate; a tin dioxide layer, which covers the portion of the two electrode sets and the portion of the upper surface; and an organic polymer layer, which is located on the surface of the tin dioxide layer.
    • 公开了一种制造一氧化碳检测器和使用其制造的一氧化碳检测器的方法。 特别公开了一种制造一氧化碳检测器的方法,其可在室温下操作并处理高检测选择,以及使用其制造的检测器。 该方法包括:提供具有上表面的基底; 在所述基板的上表面上形成两个电极组,并且所述两个电极组组合以提供交叉指示的阵列电极; 形成二氧化锡层,其覆盖两个电极组的一部分和上表面的一部分; 并在二氧化锡层的表面上形成有机聚合物层。 一氧化碳检测器包括:具有上表面的基板; 两个电极组,位于基板的上表面上; 二氧化锡层,其覆盖两个电极组的一部分和上表面的一部分; 以及位于二氧化锡层的表面上的有机聚合物层。
    • 7. 发明授权
    • Method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same
    • 制造一氧化碳检测器的方法和使用该方法制造的一氧化碳检测器
    • US07866202B2
    • 2011-01-11
    • US12153301
    • 2008-05-16
    • Ko-Shao ChenShu-Juan LiaoYun-Huang ChenJung-Chien Chang
    • Ko-Shao ChenShu-Juan LiaoYun-Huang ChenJung-Chien Chang
    • G01N27/12H01L21/02
    • G01N27/125
    • Disclosed is a method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same. Particularly disclosed is a method of fabricating a carbon monoxide detector, which can operate at room temperature and process high detecting selection, and the detector fabricated using the same. The method comprises: providing a substrate having an upper surface; forming two electrode sets on the upper surface of the substrate, and the two electrode sets combined to provide an interdigitated array electrode; forming a tin dioxide layer, which covers the portion of the two electrode sets and the portion of the upper surface; and forming an organic polymer layer on the surface of the tin dioxide layer. The carbon monoxide detector comprises: a substrate having an upper surface; two electrode sets, which are located on the upper surface of the substrate; a tin dioxide layer, which covers the portion of the two electrode sets and the portion of the upper surface; and an organic polymer layer, which is located on the surface of the tin dioxide layer.
    • 公开了一种制造一氧化碳检测器和使用其制造的一氧化碳检测器的方法。 特别公开了一种制造一氧化碳检测器的方法,其可在室温下操作并处理高检测选择,以及使用其制造的检测器。 该方法包括:提供具有上表面的基底; 在所述基板的上表面上形成两个电极组,并且所述两个电极组组合以提供交叉指示的阵列电极; 形成二氧化锡层,其覆盖两个电极组的一部分和上表面的一部分; 并在二氧化锡层的表面上形成有机聚合物层。 一氧化碳检测器包括:具有上表面的基板; 两个电极组,位于基板的上表面上; 二氧化锡层,其覆盖两个电极组的一部分和上表面的一部分; 以及位于二氧化锡层的表面上的有机聚合物层。