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1. 发明授权

US07919814B2 Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode 有权
标题翻译：具有集成电路的半导体器件通过通孔与MEMS传感器电连接
公开(公告)号：US07919814B2
公开(公告)日：2011-04-05
申请号：US12270463
申请日：2008-11-13
申请人： Yasushi Goto , Tsukasa Fujimori , Heewon Jeong , Kiyoko Yamanaka
发明人： Yasushi Goto , Tsukasa Fujimori , Heewon Jeong , Kiyoko Yamanaka
IPC分类号： H01L27/12
CPC分类号： B81C1/00246 , B81B2201/0235 , B81C2203/0728 , B81C2203/0735 , B81C2203/0778 , H01L21/76898 , H01L23/481 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： As well as achieving both downsizing and thickness reduction and sensitivity improvement of a semiconductor device that has: a MEMS sensor formed by bulk micromachining technique such as an acceleration sensor and an angular rate sensor; and an LSI circuit, a packaging structure of the semiconductor device having the MEMS sensor and the LSI circuit can be simplified. An integrated circuit having MISFETs and wirings is formed on a silicon layer of an SOI substrate, and the MEMS sensor containing a structure inside is formed by processing a substrate layer of the SOI substrate. In other words, by using both surfaces of the SOI substrate, the integrated circuit and the MEMS sensor are mounted on one SOI substrate. The integrated circuit and the MEMS sensor are electrically connected to each other by a through-electrode provided in the SOI substrate.
摘要翻译：以及实现半导体器件的小型化和厚度降低以及灵敏度提高，其具有：通过体积微加工技术（例如加速度传感器和角速度传感器）形成的MEMS传感器; 和LSI电路，可以简化具有MEMS传感器和LSI电路的半导体器件的封装结构。在SOI衬底的硅层上形成具有MISFET和布线的集成电路，并且通过处理SOI衬底的衬底层来形成包含内部结构的MEMS传感器。换句话说，通过使用SOI衬底的两个表面，集成电路和MEMS传感器安装在一个SOI衬底上。集成电路和MEMS传感器通过设置在SOI衬底中的通孔电连接。

2. 发明申请

US20110048129A1 Inertial Sensor and Method of Manufacturing the Same 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20110048129A1
公开(公告)日：2011-03-03
申请号：US12867472
申请日：2009-04-17
申请人： Kiyoko Yamanaka , Heewon Jeong , Takashi Hattori , Yasushi Goto
发明人： Kiyoko Yamanaka , Heewon Jeong , Takashi Hattori , Yasushi Goto
IPC分类号： G01C19/56 , B32B37/02
CPC分类号： G01P15/0802 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , G01C19/5733 , G01C19/5769 , G01P15/125 , G01P2015/0814 , Y10T156/10
摘要： An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means of making an inertial sensor including a substrate, a movable portion on the substrate, a cap member which seals the movable portion so as to cover the movable portion, wherein a gas-generating material is applied to the movable portion side of the cap.
摘要翻译：提供一种惯性传感器，其能够使诸如加速度传感器的惯性传感器的空间的压力高于密封步骤期间的空间，并提高可靠性。惯性传感器可以通过制造包括基板的惯性传感器，基板上的可移动部分，密封可动部分以覆盖可动部分的盖构件来实现，其中气体发生材料被施加到帽的可动部分侧。

3. 发明授权

US07567019B2 Actuator system 失效
标题翻译：执行器系统
公开(公告)号：US07567019B2
公开(公告)日：2009-07-28
申请号：US11907057
申请日：2007-10-09
申请人： Kiyoko Yamanaka , Yasushi Goto , Takehiko Hasebe
发明人： Kiyoko Yamanaka , Yasushi Goto , Takehiko Hasebe
IPC分类号： H01L41/08
CPC分类号： H02N2/028 , B82Y10/00 , G11B9/1436 , H02N2/021
摘要： An actuator using a piezoelectric element is stably operated at high speed. The actuator includes driving units provided to face a carrier stage and moving the carrier stage in an X-axis direction, piezoelectric elements provided to the driving units respectively and expanding and contracting in the X-axis direction, a carrier electrode provided on a surface of the carrier stage on a driving-unit side, and driving electrodes provided on surfaces of the driving units on a carrier stage side and electrostatically adsorbing the carrier electrode. Signals not synchronized with each other are applied to the piezoelectric elements.
摘要翻译：使用压电元件的致动器稳定地高速运转。致动器包括驱动单元，其被设置为面向载物台并沿着X轴方向移动载物台，分别设置在驱动单元上并沿X轴方向扩张和收缩的压电元件，设置在载体台的表面上的载体电极驱动单元侧的载体台和设置在载体台一侧的驱动单元的表面上的驱动电极，并静电吸附载体电极。不同步的信号被施加到压电元件。

4. 发明授权

US09229025B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US09229025B2
公开(公告)日：2016-01-05
申请号：US13811950
申请日：2011-08-08
申请人： Kiyoko Yamanaka , Heewon Jeong , Toshiaki Nakamura , Masahide Hayashi
发明人： Kiyoko Yamanaka , Heewon Jeong , Toshiaki Nakamura , Masahide Hayashi
IPC分类号： G01P5/08 , G01P3/44 , G01P15/125 , G01C19/5747 , G01P21/00 , G01P15/08
CPC分类号： G01P15/125 , G01C19/5747 , G01P15/0802 , G01P21/00 , G01P2015/0814
摘要： In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).
摘要翻译：为了提供一种惯性传感器，即使在出现突发噪声的不利环境下也能够抑制错误的诊断，惯性传感器设置有可动部（105），第一检测单元（C1，C2）通过施加诊断信号对可动部（105）进行强制振动的强制振动装置（503，C3，C4）;物理量计算部（502），用于计算物理量来自第一检测单元（C1，C2）的检测信号和用于通过经由第一检测单元（C1，C2）获得的诊断信号来确定物理量的异常的存在或不存在的异常确定单元（504），并且在车辆内使用，惯性传感器还包括安装在同一车辆中并连接到异常判定单元（504）的第二传感器（510）。

5. 发明授权

US08427177B2 Capacitance sensor 有权
标题翻译：电容传感器
公开(公告)号：US08427177B2
公开(公告)日：2013-04-23
申请号：US12912580
申请日：2010-10-26
申请人： Heewon Jeong , Kiyoko Yamanaka , Yasushi Goto , Toshiaki Nakamura , Masahide Hayashi
发明人： Heewon Jeong , Kiyoko Yamanaka , Yasushi Goto , Toshiaki Nakamura , Masahide Hayashi
IPC分类号： G01R27/26 , G01R27/08
CPC分类号： G01P21/00 , G01C19/5719 , G01P15/125 , G01P2015/0814
摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.
摘要翻译：提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。

6. 发明授权

US08096180B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US08096180B2
公开(公告)日：2012-01-17
申请号：US12273068
申请日：2008-11-18
申请人： Kiyoko Yamanaka , Heewon Jeong
发明人： Kiyoko Yamanaka , Heewon Jeong
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： G01C19/5726 , G01C19/5755 , G01P15/125 , G01P2015/0814
摘要： Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.
摘要翻译：提供了能够抑制惯性传感器中的可动电极和固定电极之间的固定并防止惯性传感器发生故障的技术。可动电极，设置成面对可动电极的固定电极，面向可动电极和固定电极的周边导体，以及调整电路和调整电路的电压调节电路，外围导体的电位变得与设置可动电极的电位相同，并且检测到可动电极与固定电极之间的电容变化。

7. 发明申请

US20110100126A1 Capacitance Sensor 有权
标题翻译：电容传感器
公开(公告)号：US20110100126A1
公开(公告)日：2011-05-05
申请号：US12912580
申请日：2010-10-26
申请人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
发明人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
IPC分类号： G01P15/125
CPC分类号： G01P21/00 , G01C19/5719 , G01P15/125 , G01P2015/0814
摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.
摘要翻译：提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。

8. 发明申请

US20090126491A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20090126491A1
公开(公告)日：2009-05-21
申请号：US12273068
申请日：2008-11-18
申请人： Kiyoko YAMANAKA , Heewon Jeong
发明人： Kiyoko YAMANAKA , Heewon Jeong
IPC分类号： G01P15/125
CPC分类号： G01C19/5726 , G01C19/5755 , G01P15/125 , G01P2015/0814
摘要： Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.
摘要翻译：提供了能够抑制惯性传感器中的可动电极和固定电极之间的固定并防止惯性传感器发生故障的技术。可动电极，设置成面对可动电极的固定电极，面向可动电极和固定电极的周边导体，以及调整电路和调整电路的电压调节电路，外围导体的电位变得与设置可动电极的电位相同，并且检测到可动电极与固定电极之间的电容变化。

9. 发明申请

US20070018761A1 Switch, semiconductor device, and manufacturing method thereof 失效
标题翻译：开关，半导体器件及其制造方法
公开(公告)号：US20070018761A1
公开(公告)日：2007-01-25
申请号：US11472355
申请日：2006-06-22
申请人： Kiyoko Yamanaka , Yasushi Goto
发明人： Kiyoko Yamanaka , Yasushi Goto
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , B81B2207/07 , B81C1/00246 , B81C2203/0136 , B81C2203/0735 , H01H59/0009
摘要： It is an objective to achieve a MEMS switch which can be mounted with a CMOS circuit and has a contact point with high reliability, both mechanically and electrically. An insulator having a compatibility with a CMOS process is formed at the contact surface of a cantilever beam constituting a MEMS switch and a fixed contact 2 opposite thereto. When the switch is used the cantilever beam is moved by applying a voltage to the pull-in electrode and the cantilever beam. After the cantilever beam makes contact with the fixed contact, a voltage exceeding the breakdown field strength of the insulator is applied to the insulator, resulting in dielectric breakdown occurring. By modifying the insulator once, the mechanical fatigue concentration point of the switch contact point is protected, and a contact point is achieved as well in which electrical signals are transmitted through the current path formed by the dielectric breakdown.
摘要翻译：实现可以安装有CMOS电路并具有机械和电气的高可靠性的接触点的MEMS开关的目的。在构成MEMS开关的悬臂梁和与其相对的固定触头2的接触表面处形成具有与CMOS工艺兼容的绝缘体。当使用开关时，通过向拉入电极和悬臂梁施加电压来移动悬臂梁。在悬臂梁与固定触点接触之后，超过绝缘体击穿场强的电压被施加到绝缘体上，导致电介质击穿。通过改变绝缘体一次，保护开关接触点的机械疲劳浓度点，并且实现接触点，其中电信号通过由电介质击穿形成的电流路径传输。

10. 发明申请

US20110132089A1 Inertial Sensor 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20110132089A1
公开(公告)日：2011-06-09
申请号：US13058571
申请日：2009-07-28
申请人： Heewon Jeong , Kiyoko Yamanaka
发明人： Heewon Jeong , Kiyoko Yamanaka
IPC分类号： G01P15/125 , G01P15/00
CPC分类号： G01P15/125 , G01P1/023 , G01P2015/0814
摘要： In order to provide an inertial sensor such as an acceleration sensor which can be downsized and in which a high SNR can be obtained as having a plurality of measurement ranges, an inertial sensor for detecting an inertial force of acceleration based on an electrostatic capacitance change of a detecting unit includes a plurality of detecting units D1 to D4 each having a different sensitivity defined by a ratio between an applied inertial force and physical quantity generated from each of the detecting units to provide the plurality of measurement ranges. Alternatively, when the inertial sensor includes N (a natural number of 2 or larger) pieces of movable units 6a to 6c, (N+1) or more types of measurement ranges are provided.
摘要翻译：为了提供惯性传感器，例如加速度传感器，其可以被小型化并且可以获得具有多个测量范围的高SNR，用于基于静电电容变化来检测加速度惯性力的惯性传感器检测单元包括多个检测单元D1至D4，每个检测单元具有由施加的惯性力与从每个检测单元产生的物理量之间的比率定义的不同灵敏度，以提供多个测量范围。或者，当惯性传感器包括N（自然数2以上）的可动单元6a〜6c，（N + 1）以上的测量范围。

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