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1. 发明申请

US20110100126A1 Capacitance Sensor 有权
标题翻译：电容传感器
公开(公告)号：US20110100126A1
公开(公告)日：2011-05-05
申请号：US12912580
申请日：2010-10-26
申请人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
发明人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
IPC分类号： G01P15/125
CPC分类号： G01P21/00 , G01C19/5719 , G01P15/125 , G01P2015/0814
摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.
摘要翻译：提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。

2. 发明申请

US20100127715A1 SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME 审中-公开
标题翻译：半导体物理量传感器及其控制装置
公开(公告)号：US20100127715A1
公开(公告)日：2010-05-27
申请号：US12622549
申请日：2009-11-20
申请人： Heewon JEONG , Kiyoko YAMANAKA
发明人： Heewon JEONG , Kiyoko YAMANAKA
IPC分类号： G01R27/26 , H01G5/00
CPC分类号： G01P15/0802 , G01C19/5719 , G01C19/574 , G01P1/023 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A highly reliable semiconductor physical quantity sensor whose performance does not change much over time is provided. In the semiconductor physical quantity sensor, movable electrodes which can be displaced by applying a physical quantity are initially displaced using an electrostatic force, and the movable electrodes are used to detect the direction and magnitude of a physical quantity applied to the semiconductor physical quantity sensor. The semiconductor physical quantity sensor is highly reliable and its performance does not change much over time compared with semiconductor physical quantity sensors using a known method in which movable electrodes are initially displaced using a compressive stress film.
摘要翻译：提供了一种高可靠性的半导体物理量传感器，其性能随时间变化不大。在半导体物理量传感器中，通过施加物理量可移位的可动电极首先利用静电力移动，并且可移动电极用于检测施加到半导体物理量传感器的物理量的方向和幅度。半导体物理量传感器是高度可靠的，并且与使用已知方法的半导体物理量传感器相比，其性能不会随时间变化很大，其中可移动电极使用压缩应力膜最初位移。

3. 发明申请

US20090056444A1 ANGULAR VELOCITY DETECTING DEVICE 有权
标题翻译：角速度检测装置
公开(公告)号：US20090056444A1
公开(公告)日：2009-03-05
申请号：US12136759
申请日：2008-06-10
申请人： Heewon JEONG , Yasushi GOTO
发明人： Heewon JEONG , Yasushi GOTO
IPC分类号： G01C19/56
CPC分类号： G01P3/22 , G01C19/5747 , G01C19/5762
摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
摘要翻译：提供了一种高性能角速率检测装置。包括驱动框架和科里奥利框架的驱动部分通过共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁悬浮，从而使驱动部分振动。即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

4. 发明申请

US20090017579A1 METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEMS DEVICE 有权
标题翻译：微电子机械系统设备的制造方法
公开(公告)号：US20090017579A1
公开(公告)日：2009-01-15
申请号：US12143372
申请日：2008-06-20
申请人： Heewon JEONG , Yasushi Goto , Yuko Hanaoka , Tsukasa Fujimori
发明人： Heewon JEONG , Yasushi Goto , Yuko Hanaoka , Tsukasa Fujimori
IPC分类号： H01L21/50
CPC分类号： B81C1/00952 , B81B2201/0235 , B81B2203/0307 , B81C1/00039 , B81C2201/019 , B81C2203/058 , G01C19/5733 , G01C19/5755 , G01P15/0802 , G01P15/125
摘要： Provided is a MEMS device which is robust to the misalignment and does not require the double-side wafer processing in the manufacture of a MEMS device such as an angular velocity sensor, an acceleration sensor, a combined sensor or a micromirror. After preparing a substrate having a space therein, holes are formed in a device layer at positions where fixed components such as a fixing portion, a terminal portion and a base that are fixed to a supporting substrate are to be formed, and the holes are filled with a fixing material so that the fixing material reaches the supporting substrate, thereby fixing the device layer around the holes to the supporting substrate.
摘要翻译：提供了一种MEMS装置，其对于未对准是坚固的，并且不需要在诸如角速度传感器，加速度传感器，组合传感器或微镜的MEMS装置的制造中的双面晶片处理。在制备其中具有空间的基板之后，在要形成固定到支撑基板上的诸如固定部分，端子部分和基座等固定部件的位置的器件层中形成孔，并且填充孔固定材料使得固定材料到达支撑基板，从而将装置层围绕孔固定到支撑基板。

5. 发明申请

US20120291546A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20120291546A1
公开(公告)日：2012-11-22
申请号：US13563557
申请日：2012-07-31
申请人： Heewon JEONG , Hiroshi Fukuda
发明人： Heewon JEONG , Hiroshi Fukuda
IPC分类号： G01P15/097
CPC分类号： G01P15/097 , G01C19/5719 , G01P15/125
摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
摘要翻译：一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测位移量与电容变化相同，从而检测驱动方向上的加速度。

6. 发明申请

US20080042260A1 MICRO-ELECTROMECHANICAL SYSTEMS DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：微电子系统设备及其制造方法
公开(公告)号：US20080042260A1
公开(公告)日：2008-02-21
申请号：US11774526
申请日：2007-07-06
申请人： Heewon JEONG , Hiroshi Fukuda
发明人： Heewon JEONG , Hiroshi Fukuda
IPC分类号： H01L23/12 , H01L21/00
CPC分类号： B81B7/007 , H01L2224/48091 , H01L2924/16235 , H01L2924/181 , H01L2924/00012 , H01L2924/00014
摘要： A method of sealing and leading out an electrode for an MEMS device such as an angular velocity sensor, an acceleration sensor, or a combined sensor is provided. A fixed portion is formed within a device forming region surrounded with a base support, a beam is connected to the fixed portion, and a movable portion is connected to the beam. Further, a detection portion for detecting the displacement of the movable portion is disposed within the device forming region. An interconnection is connected to the movable portion and the detection portion, and the interconnection extends from the hermetically sealed device forming region to the external region at the outside. The interconnection penetrates the base support and is connected with the terminal. A hole is formed between the interconnection and the base support, and an insulating film is formed in the hole. The interconnection and the base support are insulated by an insulating film buried in the hole.
摘要翻译：提供了一种密封和引出诸如角速度传感器，加速度传感器或组合传感器之类的MEMS装置的电极的方法。固定部分形成在由基座支撑件包围的器件形成区域内，梁连接到固定部分，并且可动部分连接到梁上。此外，用于检测可动部分的位移的检测部分设置在装置形成区域内。互连连接到可移动部分和检测部分，并且互连从密封装置形成区域延伸到外部的外部区域。互连穿透基座，并与端子连接。在互连和基座之间形成孔，在孔内形成绝缘膜。互连和基座支架由埋在孔中的绝缘膜绝缘。

7. 发明申请

US20070131030A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20070131030A1
公开(公告)日：2007-06-14
申请号：US11566399
申请日：2006-12-04
申请人： Heewon JEONG , Hiroshi FUKUDA
发明人： Heewon JEONG , Hiroshi FUKUDA
IPC分类号： G01P9/04 , G01P1/04
CPC分类号： G01C19/5747
摘要： Four sensor units (SUA1 to SUA4) are disposed symmetrically about a point, on both top and bottom and left and right centering around one point of a support (15e). Furthermore, four sensor units (SUA1 to SUA4) are designed so that all the components are fully in tuning-fork structure. Drive frames (5, 5) of the sensor units (SUA1, SUA2) disposed adjacent to each other in a first direction (Y) are vibrated in mutually inverted phases, and drive frames of the other sensor units (SUA3, SUA4) disposed adjacent to each other in a second direction (X) are vibrated in mutually inverted phases as well. Moreover, the drive frames of the sensor units (SUA1, SUA2) and the drive frames of the other sensor units (SUA3, SUA4) are operated in synchronization in the state in which phases are shifted by 90 degrees. Whereby, it is possible to reduce or prevent vibration coupling in the driving direction and in the detection direction, and the leakage (loss) of excitation energy and Coriolis force. Thereby, performance of an inertial sensor is improved.
摘要翻译：四个传感器单元（SUA 1至SUA 4）围绕位于顶部和底部以及围绕支撑件（15e）的一个点的中心的左右对称地布置。此外，四个传感器单元（SUA 1至SUA 4）被设计成使得所有部件完全处于音叉结构中。在第一方向（Y）上彼此相邻布置的传感器单元（SUA 1，SUA 2）的驱动框架（5,5）以相反的相位振动，并且其它传感器单元（SUA 3，SUA 4）在第二方向（X）上彼此相邻地设置在相互倒置的相位上振动。此外，传感器单元（SUA 1，SUA 2）的驱动框架和其他传感器单元（SUA 3，SUA 4）的驱动框架在相位偏移90度的状态下同步地操作。由此，可以减少或防止在驱动方向和检测方向上的振动耦合，以及激发能和科里奥利力的泄漏（损失）。由此，提高了惯性传感器的性能。

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