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1. 发明申请

US20120270351A1 LOW TEMPERATURE BI-CMOS COMPATIBLE PROCESS FOR MEMS RF RESONATORS AND FILTERS 审中-公开
标题翻译：用于MEMS RF谐振器和滤波器的低温BI-CMOS兼容工艺
公开(公告)号：US20120270351A1
公开(公告)日：2012-10-25
申请号：US13540101
申请日：2012-07-02
申请人： Leena Paivikki BUCHWALTER , Kevin Kok CHAN , Timothy Joseph DALTON , Christopher Vincent JAHNES , Jennifer Louise LUND , Kevin Shawn PETRARCA , James Louis SPEIDELL , James Francis ZIEGLER
发明人： Leena Paivikki BUCHWALTER , Kevin Kok CHAN , Timothy Joseph DALTON , Christopher Vincent JAHNES , Jennifer Louise LUND , Kevin Shawn PETRARCA , James Louis SPEIDELL , James Francis ZIEGLER
IPC分类号： H01L21/02
CPC分类号： B81C1/00246 , B81B2201/0271 , B81C1/0023 , B81C2203/0735 , H03H3/0072 , H03H9/2405
摘要： A method of removal of a first and second sacrificial layer wherein an O2 plasma or an O2-containing environment is introduced to a cavity and a gap region through a plurality of via holes in a cavity capping material.
摘要翻译：一种去除第一和第二牺牲层的方法，其中将O 2等离子体或含O 2的环境通过空腔封盖材料中的多个通孔引入空腔和间隙区域。

2. 发明授权

US07273804B2 Internally reinforced bond pads 失效
标题翻译：内部加固焊接垫
公开(公告)号：US07273804B2
公开(公告)日：2007-09-25
申请号：US11030496
申请日：2005-01-06
申请人： David Angell , Frederic Beaulieu , Takashi Hisada , Adreanne Kelly , Samuel Roy McKnight , Hiromitsu Miyai , Kevin Shawn Petrarca , Wolfgang Sauter , Richard Paul Volant , Caitlin W. Weinstein
发明人： David Angell , Frederic Beaulieu , Takashi Hisada , Adreanne Kelly , Samuel Roy McKnight , Hiromitsu Miyai , Kevin Shawn Petrarca , Wolfgang Sauter , Richard Paul Volant , Caitlin W. Weinstein
IPC分类号： H01L21/44 , H01L21/4763 , H01L31/00 , H01L23/48
CPC分类号： H01L24/05 , H01L24/03 , H01L2224/05073 , H01L2224/05181 , H01L2224/05184 , H01L2224/05187 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/45144 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01082 , H01L2924/04953 , H01L2924/05042 , H01L2924/14 , H01L2924/3025 , H01L2924/04941 , H01L2924/00014 , H01L2924/00
摘要： Disclosed is a reinforced bond pad structure having nonplanar dielectric structures and a metallic bond layer conformally formed over the nonplanar dielectric structures. The nonplanar dielectric structures are substantially reproduced in the metallic bond layer so as to form nonplanar metallic structures. Surrounding each of the nonplanar metallic structures is a ring of dielectric material which provides a hard stop during probing of the bond pad so as to limit the amount of bond pad that can be removed during probing.
摘要翻译：公开了一种具有非平面电介质结构和在非平面电介质结构上共形形成的金属接合层的增强接合焊盘结构。非平面电介质结构基本上在金属接合层中再现，从而形成非平面金属结构。围绕非平面金属结构的每一个是介电材料环，其在接合焊盘探测期间提供硬停止，以限制在探测期间可以去除的接合焊盘的量。

3. 发明授权

US07115997B2 Seedless wirebond pad plating 失效
公开(公告)号：US07115997B2
公开(公告)日：2006-10-03
申请号：US10707075
申请日：2003-11-19
申请人： Chandrasekhar Narayan , Kevin Shawn Petrarca
发明人： Chandrasekhar Narayan , Kevin Shawn Petrarca
IPC分类号： H01L23/48
CPC分类号： H01L24/10 , H01L24/05 , H01L24/13 , H01L2224/0401 , H01L2224/04042 , H01L2224/05647 , H01L2224/05655 , H01L2224/13 , H01L2224/13099 , H01L2224/45124 , H01L2224/48747 , H01L2224/48755 , H01L2224/48847 , H01L2224/48855 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01049 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/14 , H01L2924/19042 , H01L2924/00014 , H01L2924/00
摘要： An integrated circuit (IC) chip, semiconductor wafer with IC chips in a number of die locations and a method of making the IC chips on the wafer. The IC chips have plated chip interconnect pads. Each plated pad includes a noble metal plated layer electroplated to a platable metal layer. The platable metal layer may be copper and the noble metal plated layer may be of gold, platinum, palladium, rhodium, ruthenium, osmium, iridium or indium.

4. 发明申请

US20100038777A1 METHOD OF MAKING A SIDEWALL-PROTECTED METALLIC PILLAR ON A SEMICONDUCTOR SUBSTRATE 有权
标题翻译：在半导体衬底上制造防风保护金属支柱的方法
公开(公告)号：US20100038777A1
公开(公告)日：2010-02-18
申请号：US12190173
申请日：2008-08-12
申请人： Mukta G. Farooq , Waldemar Walter Kocon , Kevin Shawn Petrarca , Richard Paul Volant
发明人： Mukta G. Farooq , Waldemar Walter Kocon , Kevin Shawn Petrarca , Richard Paul Volant
IPC分类号： H01L21/768 , H01L23/498
CPC分类号： H01L24/11 , H01L21/76852 , H01L21/76885 , H01L24/13 , H01L2224/05001 , H01L2224/05023 , H01L2224/05573 , H01L2224/05647 , H01L2224/11002 , H01L2224/11462 , H01L2224/1147 , H01L2224/1184 , H01L2224/13083 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13565 , H01L2224/1357 , H01L2224/13655 , H01L2224/13657 , H01L2224/13671 , H01L2224/13673 , H01L2924/00013 , H01L2924/00014 , H01L2924/01005 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01327 , H01L2924/014 , H01L2924/10253 , H01L2924/14 , H01L2924/01015 , H01L2224/13099 , H01L2924/00 , H01L2224/05099
摘要： A method of forming conductive pillars on a semiconductor wafer in which the conductive pillars are plated with a protecting coating of Ni, Co, Cr, Rh, NiP, NiB , CoWP, or CoP. Only the side of the conductive pillars are plated. The ends of the conductive pillars are free of the protective plating so that the conductive pillars can be readily joined to the pads of a packaging substrate. Also disclosed is a sidewall-protected conductive pillar having a protective coating of Ni, Co, Cr, Rh, NiP, NiB , CoWP, or CoP thereon.
摘要翻译：在半导体晶片上形成导电柱的方法，其中导电柱镀有Ni，Co，Cr，Rh，NiP，NiB，CoWP或CoP的保护涂层。只有导电柱的一面被电镀。导电柱的端部没有保护电镀，使得导电柱可以容易地接合到封装基板的焊盘。还公开了一种侧壁保护的导电柱，其上具有Ni，Co，Cr，Rh，NiP，NiB，CoWP或CoP的保护涂层。

5. 发明申请

US20090108381A1 Low temperature bi-CMOS compatible process for MEMS RF resonators and filters 失效
标题翻译：用于MEMS RF谐振器和滤波器的低温双CMOS兼容工艺
公开(公告)号：US20090108381A1
公开(公告)日：2009-04-30
申请号：US10316254
申请日：2002-12-10
申请人： Leena Paivikki Buchwalter , Kevin Kok Chan , Timothy Joseph Dalton , Christopher Vincent Jahnes , Jennifer Louise Lund , Kevin Shawn Petrarca , James Louis Speidell , James Francis Ziegler
发明人： Leena Paivikki Buchwalter , Kevin Kok Chan , Timothy Joseph Dalton , Christopher Vincent Jahnes , Jennifer Louise Lund , Kevin Shawn Petrarca , James Louis Speidell , James Francis Ziegler
IPC分类号： H03H9/24 , H01L23/28 , H01L21/56
CPC分类号： B81C1/00246 , B81B2201/0271 , B81C1/0023 , B81C2203/0735 , H03H3/0072 , H03H9/2405
摘要： A method of formation of a microelectromechanical system (MEMS) resonator or filter which is compatible with integration with any analog, digital, or mixed-signal integrated circuit (IC) process, after or concurrently with the formation of the metal interconnect layers in those processes, by virtue of its materials of composition, processing steps, and temperature of fabrication is presented. The MEMS resonator or filter incorporates a lower metal level, which forms the electrodes of the MEMS resonator or filter, that may be shared with any or none of the existing metal interconnect levels on the IC. It further incorporates a resonating member that is comprised of at least one metal layer for electrical connection and electrostatic actuation, and at least one dielectric layer for structural purposes. The gap between the electrodes and the resonating member is created by the deposition and subsequent removal of a sacrificial layer comprised of a carbon-based material. The method of removal of the sacrificial material is by an oxygen plasma or an anneal in an oxygen containing ambient. A method of vacuum encapsulation of the MEMS resonator or filter is provided through means of a cavity containing the MEMS device, filled with additional sacrificial material, and sealed. Access vias are created through the membrane sealing the cavity; the sacrificial material is removed as stated previously, and the vias are re-sealed in a vacuum coating process.
摘要翻译：一种形成微机电系统（MEMS）谐振器或滤波器的方法，其与在任何模拟，数字或混合信号集成电路（IC）工艺中的集成兼容，或者与这些工艺中的金属互连层的形成同时，由于其组成材料，加工步骤和制造温度。 MEMS谐振器或滤波器包含形成MEMS谐振器或滤波器的电极的较低金属电平，其可与IC上的现有金属互连电平中的任何一个或任何一个共享。它还包括谐振元件，该谐振元件由用于电连接和静电驱动的至少一个金属层和至少一个用于结构目的的电介质层组成。通过沉积并随后去除由碳基材料构成的牺牲层来产生电极和谐振构件之间的间隙。去除牺牲材料的方法是通过氧等离子体或在含氧环境中的退火。 MEMS谐振器或滤波器的真空封装方法是通过一个包含MEMS器件的空腔的装置提供的，其中填充有额外的牺牲材料并被密封。通过隔膜密封腔形成通孔; 如先前所述去除牺牲材料，并且在真空涂覆工艺中重新密封通孔。

6. 发明授权

US06982493B2 Wedgebond pads having a nonplanar surface structure 失效
标题翻译：楔形垫具有非平面表面结构
公开(公告)号：US06982493B2
公开(公告)日：2006-01-03
申请号：US10249382
申请日：2003-04-03
申请人： Kevin Shawn Petrarca , Richard Paul Volant
发明人： Kevin Shawn Petrarca , Richard Paul Volant
IPC分类号： H01L23/48 , H01L23/52
CPC分类号： H01L24/05 , H01L24/03 , H01L2224/02166 , H01L2224/04042 , H01L2224/05552 , H01L2224/05554 , H01L2224/05556 , H01L2224/05557 , H01L2224/05558 , H01L2224/05567 , H01L2224/05624 , H01L2224/4847 , H01L2224/48993 , H01L2924/01005 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/04953 , H01L2924/14 , H01L2924/3025 , H01L2924/00014 , H01L2924/00012 , H01L2924/00
摘要： Disclosed is a wedgebond pad structure which includes a semiconductor substrate and a wedgebond pad. The wedgebond pad has a surface which includes a curved or v-shaped feature for receiving a wedge bond. The curved or v-shaped feature may be raised or recessed with respect to the wedgebond pad surface.
摘要翻译：公开了一种楔形焊盘结构，其包括半导体衬底和楔形焊盘。楔形垫具有包括用于接收楔形键的弯曲或V形特征的表面。弯曲或V形特征可以相对于楔形焊盘表面升高或凹进。

7. 发明授权

US06732908B2 High density raised stud microjoining system and methods of fabricating the same 有权
标题翻译：高密度凸起螺柱微接合系统及其制造方法
公开(公告)号：US06732908B2
公开(公告)日：2004-05-11
申请号：US10052591
申请日：2002-01-18
申请人： Bruce Kenneth Furman , Maheswaran Surendra , Sherif A. Goma , Simon M. Karecki , John Harold Magerlein , Kevin Shawn Petrarca , Sampath Purushothaman , Carlos Juan Sambucetti , Richard Paul Volant , George Frederick Walker
发明人： Bruce Kenneth Furman , Maheswaran Surendra , Sherif A. Goma , Simon M. Karecki , John Harold Magerlein , Kevin Shawn Petrarca , Sampath Purushothaman , Carlos Juan Sambucetti , Richard Paul Volant , George Frederick Walker
IPC分类号： B23K3102
CPC分类号： H01L24/12 , H01L21/288 , H01L21/2885 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/16 , H01L2224/0401 , H01L2224/05571 , H01L2224/05599 , H01L2224/1146 , H01L2224/1147 , H01L2224/11849 , H01L2224/13022 , H01L2224/1308 , H01L2224/13083 , H01L2224/13116 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13157 , H01L2224/13164 , H01L2224/13169 , H01L2224/13582 , H01L2224/13616 , H01L2224/13644 , H01L2224/13655 , H01L2924/00013 , H01L2924/00014 , H01L2924/0002 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01076 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/10253 , H01L2924/14 , H01L2924/15787 , H01L2924/30105 , H05K1/0306 , H05K1/112 , H05K3/388 , H05K2201/0317 , H05K2201/09472 , H05K2201/09509 , H05K2201/10674 , H01L2224/45111 , H01L2224/13099 , H01L2924/00 , H01L2224/05552
摘要： A microjoint interconnect structure comprising a dense array of metallic studs of precisely controllable height tipped with a joining metallurgy. The array is produced on a device chip that is to be attached to a carrier, or to a carrier along with other devices, some of which may be selected to have similar interconnect structures so as to form all together an assembled carrier that functions as a complete computing, communications or networking system.
摘要翻译：一个微型接头互连结构，包括具有精确可控高度的密集阵列的金属螺柱，并具有接合冶金。该阵列在要连接到载体的装置芯片上或与其他装置一起在载体上产生，其中一些装置芯片可被选择为具有相似的互连结构，以便将组装的载体形成为一体，完整的计算，通信或网络系统。

8. 发明授权

US07943412B2 Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters 失效
标题翻译：用于MEMS RF谐振器和滤波器的低温Bi-CMOS兼容工艺
公开(公告)号：US07943412B2
公开(公告)日：2011-05-17
申请号：US10316254
申请日：2002-12-10
申请人： Leena Paivikki Buchwalter , Kevin Kok Chan , Timothy Joseph Dalton , Christopher Vincent Jahnes , Jennifer Louise Lund , Kevin Shawn Petrarca , James Louis Speidell , James Francis Ziegler
发明人： Leena Paivikki Buchwalter , Kevin Kok Chan , Timothy Joseph Dalton , Christopher Vincent Jahnes , Jennifer Louise Lund , Kevin Shawn Petrarca , James Louis Speidell , James Francis Ziegler
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81B2201/0271 , B81C1/0023 , B81C2203/0735 , H03H3/0072 , H03H9/2405
摘要： A method of formation of a microelectromechanical system (MEMS) resonator or filter which is compatible with integration with any analog, digital, or mixed-signal integrated circuit (IC) process, after or concurrently with the formation of the metal interconnect layers in those processes, by virtue of its materials of composition, processing steps, and temperature of fabrication is presented. The MEMS resonator or filter incorporates a lower metal level, which forms the electrodes of the MEMS resonator or filter, that may be shared with any or none of the existing metal interconnect levels on the IC. It further incorporates a resonating member that is comprised of at least one metal layer for electrical connection and electrostatic actuation, and at least one dielectric layer for structural purposes. The gap between the electrodes and the resonating member is created by the deposition and subsequent removal of a sacrificial layer comprised of a carbon-based material. The method of removal of the sacrificial material is by an oxygen plasma or an anneal in an oxygen containing ambient. A method of vacuum encapsulation of the MEMS resonator or filter is provided through means of a cavity containing the MEMS device, filled with additional sacrificial material, and sealed. Access vias are created through the membrane sealing the cavity; the sacrificial material is removed as stated previously, and the vias are re-sealed in a vacuum coating process.
摘要翻译：一种形成微机电系统（MEMS）谐振器或滤波器的方法，其与在任何模拟，数字或混合信号集成电路（IC）工艺中的集成兼容，或者与这些工艺中的金属互连层的形成同时，由于其组成材料，加工步骤和制造温度。 MEMS谐振器或滤波器包含形成MEMS谐振器或滤波器的电极的较低金属电平，其可与IC上的现有金属互连电平中的任何一个或任何一个共享。它还包括谐振元件，该谐振元件由用于电连接和静电驱动的至少一个金属层和至少一个用于结构目的的电介质层组成。通过沉积并随后去除由碳基材料构成的牺牲层来产生电极和谐振构件之间的间隙。去除牺牲材料的方法是通过氧等离子体或在含氧环境中的退火。 MEMS谐振器或滤波器的真空封装方法是通过一个包含MEMS器件的空腔的装置提供的，其中填充有额外的牺牲材料并被密封。通过隔膜密封腔形成通孔; 如先前所述去除牺牲材料，并且在真空涂覆工艺中重新密封通孔。

9. 发明授权

US07541277B1 Stress relaxation, selective nitride phase removal 失效
标题翻译：应力松弛，选择性氮化物相去除
公开(公告)号：US07541277B1
公开(公告)日：2009-06-02
申请号：US12112457
申请日：2008-04-30
申请人： Kevin Shawn Petrarca , John Charles Petrus , Karl W. Barth , Kaushik A. Kumar
发明人： Kevin Shawn Petrarca , John Charles Petrus , Karl W. Barth , Kaushik A. Kumar
IPC分类号： H01L21/4763
CPC分类号： H01L21/76834 , H01L21/7682 , H01L23/5329 , H01L2924/0002 , H01L2924/00
摘要： A method for forming a dielectric cap layer over an interconnect layer formed by a back-end-of-the-line (BEOL) interconnect process, the interconnect process including: lithography, reactive ion etching (RIE), metal filling of BEOL conductors, and chemical-mechanical polishing (CMP), wherein a sacrificial material resides between conductors of the interconnect layer, and wherein the dielectric cap layer is made porous through an oxidation process.
摘要翻译：一种用于在由后端（BEOL）互连工艺形成的互连层上形成电介质盖层的方法，所述互连工艺包括光刻，反应离子蚀刻（RIE），BEOL导体的金属填充，和化学机械抛光（CMP），其中牺牲材料位于互连层的导体之间，并且其中电介质盖层通过氧化工艺制成多孔的。

10. 发明授权

US07534651B2 Seedless wirebond pad plating 失效
标题翻译：无籽焊垫电镀
公开(公告)号：US07534651B2
公开(公告)日：2009-05-19
申请号：US11478201
申请日：2006-06-29
申请人： Chandrasekhar Narayan , Kevin Shawn Petrarca
发明人： Chandrasekhar Narayan , Kevin Shawn Petrarca
IPC分类号： H01L21/00
CPC分类号： H01L24/10 , H01L24/05 , H01L24/13 , H01L2224/0401 , H01L2224/04042 , H01L2224/05647 , H01L2224/05655 , H01L2224/13 , H01L2224/13099 , H01L2224/45124 , H01L2224/48747 , H01L2224/48755 , H01L2224/48847 , H01L2224/48855 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01044 , H01L2924/01045 , H01L2924/01046 , H01L2924/01049 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01076 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/04941 , H01L2924/04953 , H01L2924/14 , H01L2924/19042 , H01L2924/00014 , H01L2924/00
摘要： An integrated circuit (IC) chip, semiconductor wafer with IC chips in a number of die locations and a method of making the IC chips on the wafer. The IC chips have plated chip interconnect pads. Each plated pad includes a noble metal plated layer electroplated to a platable metal layer. The platable metal layer may be copper and the noble metal plated layer may be of gold, platinum, palladium, rhodium, ruthenium, osmium, iridium or indium.
摘要翻译：集成电路（IC）芯片，具有多个芯片位置的IC芯片的半导体晶片以及在晶片上制造IC芯片的方法。 IC芯片具有电镀芯片互连焊盘。每个电镀垫包括电镀到可镀金属层的贵金属镀层。可镀金属层可以是铜，贵金属镀层可以是金，铂，钯，铑，钌，锇，铱或铟。

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