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    • 1. 发明申请
    • MICROMACHINED ACCELEROMETER WITH MONOLITHIC ELECTRODES AND METHOD OF MAKING THE SAME
    • 具有单片电极的微机加速度计及其制造方法
    • US20110067495A1
    • 2011-03-24
    • US12564180
    • 2009-09-22
    • Duli YuFangfang FengKedu Han
    • Duli YuFangfang FengKedu Han
    • G01P15/13G01P15/125H01L21/30G01C19/56
    • G01P15/125G01P15/0888G01P15/131G01P15/18
    • A capacitive accelerometer having one or more micromachined acceleration sensor assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support structure, a top cap and a bottom cap. The proof mass plate of the spring-mass-support structure has cutout spaces and is supported by a pair of branched torsional beams which are substantially located in the cutout spaces. The torsional axis of the proof mass plate is offset from the mass center in direction perpendicular to the proof mass plate. The acceleration sensor assembly further comprises multiple coplanar electrodes for differential capacitive sensing and electrostatic forcing. The capacitive accelerometer according to the present invention may comprise one, two or six micromachined acceleration sensor assemblies with electronic signal detection, conditioning and control circuits in different configurations and applications to detect and measure linear and angular accelerations. Methods to fabricate the micromachined acceleration sensor assembly are disclosed.
    • 公开了一种具有一个或多个微机加速度传感器组件的电容式加速度计。 加速度传感器组件包括弹簧质量支撑结构,顶盖和底盖。 弹簧质量支撑结构的检验质量板具有切口空间,并且由基本上位于切口空间中的一对分支扭转梁支撑。 检验质量板的扭转轴与质量中心的垂直于检验质量板的方向偏移。 加速度传感器组件还包括用于差分电容感测和静电强制的多个共面电极。 根据本发明的电容式加速度计可以包括具有电子信号检测,不同配置和应用中的电子信号检测,调节和控制电路的一个,两个或六个微加速度加速度传感器组件,以检测和测量线性和角加速度。 公开了制造微机加速度传感器组件的方法。
    • 5. 发明授权
    • Drawing compass
    • 绘图罗盘
    • US06907669B1
    • 2005-06-21
    • US10707951
    • 2004-01-28
    • Kedu HanKehan Han
    • Kedu HanKehan Han
    • B43K29/00B43L9/02B43L9/04B43L9/24
    • B43L9/04B43K29/001B43L9/24
    • A drawing compass with a structure of L shape and a method of using the same provide improved single-hand manipulation and handling of drawing an arc or circle. The drawing compass comprises a handle rotatably mounted on one end of an arm and a pivot pin holder slidably mounted along the arm. One can make an arc or circle by simply holding the handle perpendicular to a drawing surface, placing the pivot pin at the center and making a circular motion guided by the arm of the compass. In the drawing process, the pressure applied on the marking point is directly controlled by hand. The compass is easy to use, inexpensive, and simple to manufacture.
    • 具有L形结构的绘图罗盘及其使用方法提供改进的单手操作和绘制弧或圆的处理。 绘图罗盘包括可旋转地安装在臂的一端的手柄和可沿着臂可滑动地安装的枢轴销保持器。 可以通过简单地将手柄垂直于拉伸表面,将枢轴销放置在中心并由罗盘的手臂引导的圆周运动来形成圆弧或圆弧。 在绘图过程中,施加在标记点上的压力由手直接控制。 指南针易于使用,价格便宜,制造简单。
    • 9. 发明授权
    • Micromachined accelerometer with monolithic electrodes and method of making the same
    • 具有单片电极的微机械加速度计及其制造方法
    • US08322216B2
    • 2012-12-04
    • US12564180
    • 2009-09-22
    • Duli YuFangfang FengKedu Han
    • Duli YuFangfang FengKedu Han
    • G01P15/125
    • G01P15/125G01P15/0888G01P15/131G01P15/18
    • A capacitive accelerometer having one or more micromachined acceleration sensor assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support structure, a top cap and a bottom cap. The proof mass plate of the spring-mass-support structure has cutout spaces and is supported by a pair of branched torsional beams which are substantially located in the cutout spaces. The torsional axis of the proof mass plate is offset from the mass center in direction perpendicular to the proof mass plate. The acceleration sensor assembly further comprises multiple coplanar electrodes for differential capacitive sensing and electrostatic forcing. The capacitive accelerometer according to the present invention may comprise one, two or six micromachined acceleration sensor assemblies with electronic signal detection, conditioning and control circuits in different configurations and applications to detect and measure linear and angular accelerations. Methods to fabricate the micromachined acceleration sensor assembly are disclosed.
    • 公开了一种具有一个或多个微机加速度传感器组件的电容式加速度计。 加速度传感器组件包括弹簧质量支撑结构,顶盖和底盖。 弹簧质量支撑结构的检验质量板具有切口空间,并且由基本上位于切口空间中的一对分支扭转梁支撑。 检验质量板的扭转轴与质量中心的垂直于检验质量板的方向偏移。 加速度传感器组件还包括用于差分电容感测和静电强制的多个共面电极。 根据本发明的电容加速度计可以包括具有电子信号检测,不同配置和应用中的电子信号检测,调节和控制电路的一个,两个或六个微加速度加速度传感器组件,以检测和测量线性和角加速度。 公开了制造微机加速度传感器组件的方法。