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    • 2. 发明授权
    • Substrate coating equipment
    • 基材涂布设备
    • US4889069A
    • 1989-12-26
    • US274882
    • 1988-11-22
    • Kazushi Kawakami
    • Kazushi Kawakami
    • B05C11/08B05C11/10G03F7/16H01L21/027
    • B05C11/1039B05C11/08G03F7/162
    • This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display. It features that said coating equipment comprises of a substrate table (spin head) having vacuum suction holes to set and fix said substrates being formed on the upper part of the spindle, a vessel for wrapping said spin head consisting of a vessel body having a peripheral side wall of a certain fixed height and its coverlid means, and both said vessel body and coverlid being able to be separated, a plurality of small holes and tubes being provided at the lower part of said peripheral side wall with a prompt interval, a doughnut-like cup being arranged and placed so that said doughnut-like cut can wrap said vessel of the above structure inside the center portion of said cup, an air suction hole whose height is a little larger than the outer diameter of said small holes or tubes being drilled and provided on the internal periphery of said cup, and the bottom portion of said cup being interconnected to a pipe furnished with an exhaust fan.
    • 本发明涉及一种涂覆设备,用于在形成用于生产的光掩模基板(以下简称为“基板”)的图案的膜上涂覆涂布溶液(涂层扩散剂,光致抗蚀剂等) 掩模版和光掩模或用于液晶显示的玻璃基板。 其特征在于,所述涂覆设备包括具有真空抽吸孔的衬底台(旋转头),以设置和固定形成在心轴的上部的所述衬底,用于包裹所述旋转头的容器,所述容器主体包括具有周边 具有一定固定高度的侧壁和其盖板装置,并且所述容器主体和盖板都能够分离,多个小孔和管被提供在所述周边侧壁的下部,具有提示间隔,环形圈 配置和放置,使得所述环状切口可以将上述结构的容器包裹在所述杯的中心部分内,空气吸入孔的高度比所述小孔或管的外径稍大 被钻孔并设置在所述杯的内周上,并且所述杯的底部与配备有排风扇的管道互连。
    • 4. 发明授权
    • Substrate coating equipment
    • 基材涂布设备
    • US4899685A
    • 1990-02-13
    • US274883
    • 1988-11-22
    • Kazushi Kawakami
    • Kazushi Kawakami
    • B05C11/06B05C11/08G03F7/16H01L21/027
    • G03F7/162B05C11/06B05C11/08
    • This invention relates to a coating equipment to be used for coating a coating solution (coating diffusion agent, photo-resist agent, etc.) on a film which forms patterns of photo mask substrates (hereinafter merely called "substrates") used for production of reticle and photo masks or of glass substrates used for liquid crystal display. It features that said coating equipment comprises of a substrate table (spin head) being formed on the upper part of the spindle, a through hole whose dimension is a little larger than said substrate and whose section is of a reversed-U shape to said spin head being prepared at the central part of the upper part thereof, an aerial stream control frame body having a peripheral wall of a specified height and being provided with an air exhaust hole on said peripheral wall side, both said through hole and said aerial stream control frame body being able to rotate altogether, a doughnut-like cup being provided and arranged so that said aerial stream control frame body can be wrapped at the inside center thereof, an air suction hole of a little higher dimension than the height of the peripheral wall side of said aerial stream control frame body being drilled at the internal face thereof, and the bottom of said cup is interconnected to a pipe equipped with an exhaust fan.
    • 本发明涉及一种涂覆设备,用于在形成用于生产的光掩模基板(以下简称为“基板”)的图案的膜上涂覆涂布溶液(涂层扩散剂,光致抗蚀剂等) 掩模版和光掩模或用于液晶显示的玻璃基板。 其特征在于,所述涂覆设备包括形成在心轴的上部的基底台(旋转头),尺寸比所述基底稍大的截面,并且截面为所述旋转的U形 头部在其上部的中央部分准备,具有指定高度的周壁的空气流控制框架体,并且在所述周壁侧设置有排气孔,所述通孔和所述空气流控制 框架体能够完全旋转,提供并布置环形杯,使得所述空中流量控制框架体可以在其内部中心被包裹,具有比周壁高度稍高的空气吸入孔 所述空气流控制框体的一侧在其内表面被钻孔,并且所述杯的底部与配备有排风扇的管道互连。