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1. 发明申请

US20080117440A1 POSITION-MEASURING DEVICE 有权
标题翻译：位置测量装置
公开(公告)号：US20080117440A1
公开(公告)日：2008-05-22
申请号：US11942435
申请日：2007-11-19
申请人： Karsten SAENDIG
发明人： Karsten SAENDIG
IPC分类号： G01B11/14
CPC分类号： G01D5/38 , G01D5/24438 , G01D5/2457 , G01D5/366
摘要： A position-measuring device for generating a reference-pulse signal at at least one reference position includes a scanning unit and also a reflection-measuring graduation displaceable relative thereto in at least one measuring direction. The scanning unit for generating the reference-pulse signal includes a plurality of optical elements, including at least one imaging optics as well as at least two diaphragm structures, which are disposed in a diaphragm plane and have a plurality of diaphragm openings in each case. Furthermore, a light source as well as at least two detector elements are assigned to the scanning unit. The reflection-measuring graduation has a reference marking at the at least one reference position. It includes at least one set of first structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a first transversal periodicity. Furthermore, the reference marking has at least one set of second structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a second, different transversal periodicity. The structure elements are arranged as diffractive structure elements, which, in the measuring direction, optically act like a cylinder lens having a specific focal length and, perpendicular to the measuring direction, act like a deflecting grating having the graduation period.
摘要翻译：用于在至少一个基准位置产生参考脉冲信号的位置测量装置包括扫描单元以及在至少一个测量方向上可相对于其移位的反射测量刻度。用于产生参考脉冲信号的扫描单元包括多个光学元件，包括至少一个成像光学元件以及至少两个光阑结构，它们设置在光阑平面中并且在每种情况下都具有多个光阑开口。此外，将光源以及至少两个检测器元件分配给扫描单元。反射测量刻度在至少一个参考位置具有参考标记。它包括至少一组第一结构元件，其以与第一横向周期性周期性地垂直于测量方向布置在反射测量刻度的平面中。此外，参考标记具有至少一组第二结构元件，其被布置在垂直于测量方向的反射测量刻度的平面中，周期性地以不同的横向周期性周期性地布置。结构元件被布置为衍射结构元件，其在测量方向上具有类似于具有特定焦距并且垂直于测量方向的柱面透镜的光学作用，像具有刻度周期的偏转光栅。

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