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    • 4. 发明授权
    • Vertical gate-depleted single electron transistor
    • 垂直栅极耗尽的单电子晶体管
    • US07547932B2
    • 2009-06-16
    • US10302635
    • 2002-11-22
    • Yaohui ZhangFilipp A. BaronKang L. Wang
    • Yaohui ZhangFilipp A. BaronKang L. Wang
    • H01L27/108
    • B82Y10/00H01L29/7613H01L29/812
    • A vertical gate-depleted single electron transistor (SET) is fabricated on a conducting or insulating substrate. A plurality of lightly doped basic materials and tunneling barriers are fabricated on top of a substrate, wherein at least two of the layers of basic materials sandwich the layers of tunneling barriers and at least two of the layers of tunneling barriers sandwich at least one of the layers of basic materials. A mesa is fabricated on top of the layers of basic materials and tunneling barriers, and has an undercut shape. An ohmic contact is fabricated on top of the mesa, and one or more gate Schottky contacts are fabricated on top of the layers of lightly doped basic materials and tunneling barriers. A quantum dot is induced by gate depletion, when a source voltage is set as zero, a drain voltage is set to be less than 0.1, and a gate voltage is set to be negative. The depletion region expands toward the center of the device and forms a lateral confinement to the quantum well, wherein a quantum dot is obtained. Because the size of the quantum dot is so small, the Coulomb charging energy achieved is large enough to let the device operate at room temperature.
    • 在导电或绝缘基板上制造垂直栅极耗尽的单电子晶体管(SET)。 在衬底的顶部上制造多个轻掺杂的基本材料和隧道势垒,其中至少两层基本材料层夹着隧道势垒的层,并且至少两层隧穿势垒夹着至少一层 层的基本材料。 在基础材料和隧道屏障层之上制造台面,并具有底切形状。 在台面的顶部制造欧姆接触,并且在轻掺杂的基础材料和隧道势垒的层之上制造一个或多个栅极肖特基接触。 当栅极耗尽时,源极电压被设置为零,漏极电压被设定为小于0.1,栅极电压被设定为负值,就会产生量子点。 耗尽区朝向器件的中心扩展,并形成量子阱的侧向约束,其中获得量子点。 因为量子点的尺寸如此之小,所以实现的库仑充电能够足够大以使器件在室温下工作。
    • 8. 发明申请
    • VERTICAL GATE-DEPLETED SINGLE ELECTRON TRANSISTOR
    • 垂直门式单电子晶体管
    • US20090127543A1
    • 2009-05-21
    • US10302635
    • 2002-11-22
    • Yaohui ZhangFilipp A. BaronKang L. Wang
    • Yaohui ZhangFilipp A. BaronKang L. Wang
    • H01L29/66H01L21/20
    • B82Y10/00H01L29/7613H01L29/812
    • A vertical gate-depleted single electron transistor (SET) is fabricated on a conducting or insulating substrate. A plurality of lightly doped basic materials and tunneling barriers are fabricated on top of a substrate, wherein at least two of the layers of basic materials sandwich the layers of tunneling barriers and at least two of the layers of tunneling barriers sandwich at least one of the layers of basic materials. A mesa is fabricated on top of the layers of basic materials and tunneling barriers, and has an undercut shape. An ohmic contact is fabricated on top of the mesa, and one or more gate Schottky contacts are fabricated on top of the layers of lightly doped basic materials and tunneling barriers. A quantum dot is induced by gate depletion, when a source voltage is set as zero, a drain voltage is set to be less than 0.1, and a gate voltage is set to be negative. The depletion region expands toward the center of the device and forms a lateral confinement to the quantum well, wherein a quantum dot is obtained. Because the size of the quantum dot is so small, the Coulomb charging energy achieved is large enough to let the device operate at room temperature.
    • 在导电或绝缘基板上制造垂直栅极耗尽的单电子晶体管(SET)。 在衬底的顶部上制造多个轻掺杂的基本材料和隧道势垒,其中至少两层基本材料层夹着隧道势垒的层,并且至少两层隧穿势垒夹着至少一层 层的基本材料。 在基础材料和隧道屏障层之上制造台面,并具有底切形状。 在台面的顶部制造欧姆接触,并且在轻掺杂的基础材料和隧道势垒的层之上制造一个或多个栅极肖特基接触。 当栅极耗尽时,源极电压被设置为零,漏极电压被设定为小于0.1,栅极电压被设定为负值,就会产生量子点。 耗尽区朝向器件的中心扩展,并形成量子阱的侧向约束,其中获得量子点。 因为量子点的尺寸如此之小,所以实现的库仑充电能够足够大以使器件在室温下工作。
    • 10. 发明授权
    • Telegraph signal microscopy device and method
    • 电报信号显微镜装置及方法
    • US07427754B2
    • 2008-09-23
    • US11279540
    • 2006-04-12
    • Kang L. WangFei Liu
    • Kang L. WangFei Liu
    • G01N23/00
    • G01Q60/48G01Q70/12Y10S977/84Y10S977/849Y10S977/86Y10S977/875Y10S977/876
    • A microscope device includes a probe having a dielectric material with a first side and a second side. First and second electrodes are disposed on the first side of the dielectric material. A nanotube connects the first and second electrodes. A gate electrode is disposed on the second side (e.g., backside) of the dielectric material. The device includes a stage adapted for holding a sample. The stage and probe are moveable with respect to one another such that the sample can be brought in close proximity to the nanotube. The device further includes current measurement circuitry for measuring current (e.g., Random Telegraph Signals) passing through the nanotube. The microscope device is able to identify and characterize single defects on the molecular or atomic scale. The probe device may be combined with spin resonance and/or optical systems such that the detection/mapping/manipulate of single spin and single photon could be achieved.
    • 显微镜装置包括具有第一侧和第二侧的电介质材料的探针。 第一和第二电极设置在电介质材料的第一侧上。 纳米管连接第一和第二电极。 栅电极设置在电介质材料的第二侧(例如背面)上。 该装置包括适于容纳样品的台。 阶段和探针可以相对于彼此移动,使得样品可以靠近纳米管。 该装置还包括用于测量通过纳米管的电流(例如,随机电报信号)的电流测量电路。 显微镜装置能够识别和表征分子或原子尺度上的单个缺陷。 探针装置可以与自旋共振和/或光学系统组合,使得可以实现单个旋转和单个光子的检测/映射/操纵。