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1. 发明申请

US20180370263A1 Low-Particle Gas Enclosure Systems and Methods 审中-公开
公开(公告)号：US20180370263A1
公开(公告)日：2018-12-27
申请号：US16102392
申请日：2018-08-13
申请人： Justin Mauck , Alexander Sou-Kang Ko , Eliyahu Vronsky , Shandon Alderson , Alexey Stepanov
发明人： Justin Mauck , Alexander Sou-Kang Ko , Eliyahu Vronsky , Shandon Alderson , Alexey Stepanov
IPC分类号： B41J29/02 , H01L51/56 , B41J29/13 , B05C15/00
摘要： The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that can provide a low-particle zone proximal to a substrate. Various components of a particle control system can include a gas circulation and filtration system, a low-particle-generating motion system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. In addition to maintaining substantially low levels for each species of various reactive species, including various reactive atmospheric gases, such as water vapor and oxygen, for various embodiments of a gas enclosure system that have a particle control system, an on-substrate particle specification can be readily met. Accordingly, processing of various substrates in an inert, low-particle gas environment according to systems and methods of the present teachings can have substantially lower manufacturing defects.

2. 发明授权

US09034428B2 Face-down printing apparatus and method 有权
公开(公告)号：US09034428B2
公开(公告)日：2015-05-19
申请号：US13571166
申请日：2012-08-09
申请人： Robert Lowrance , Eliyahu Vronsky , Conor Madigan , Alexander Sou-Kang Ko
发明人： Robert Lowrance , Eliyahu Vronsky , Conor Madigan , Alexander Sou-Kang Ko
IPC分类号： B41J2/155 , B41J3/407 , B41J13/16 , H01L51/56
CPC分类号： B41J2/145 , B41J2/01 , B41J2/155 , B41J3/407 , B41J13/0009 , B41J13/16 , B41J2202/20 , H01L51/56
摘要： Film-forming apparatuses, systems, and methods are provided. The apparatus can include a substrate positioning system and a printing array that includes an inkjet printing array and/or a thermal printing array. The positioning system can be a gas-bearing plate system. The positioning system can be configured to move a substrate between a first position, away from the printing array, and a second position, above the printing array. The apparatuses, systems, and methods can be used to manufacture organic light emitting devices (OLEDs), for example, flat panel displays.

3. 发明授权

US08808799B2 Method and apparatus for organic vapor printing 有权
标题翻译：有机蒸气印刷的方法和装置
公开(公告)号：US08808799B2
公开(公告)日：2014-08-19
申请号：US12772184
申请日：2010-05-01
申请人： Conor F. Madigan , Alexander Sou-Kang Ko , Jianglong Chen
发明人： Conor F. Madigan , Alexander Sou-Kang Ko , Jianglong Chen
IPC分类号： C23C16/00 , B05D5/06 , C23C14/24 , C23C14/22 , C23C14/04 , C23C14/12 , H01L51/00 , H01L51/56
CPC分类号： C23C16/042 , C23C14/04 , C23C14/12 , C23C14/228 , C23C14/24 , H01L51/0008 , H01L51/0011 , H01L51/0013 , H01L51/56
摘要： In one embodiment, the disclosure relates to providing a first gas stream carrying vaporized material and depositing the vaporized material onto a substrate by directing a plurality of gas streams containing the vaporized material to a substrate, forming an gas curtain around the streams to prevent its dissemination beyond a target print area, and allowing the vaporized material to condense on the target print area. In another embodiment, heat is used to regulate the flow of the material and the thickness of the deposited layer.
摘要翻译：在一个实施方案中，本公开涉及提供携带蒸发的材料的第一气流并通过将包含蒸发的材料的多个气流引导到基底上将气化的材料沉积到基底上，在流周围形成气幕以防止其散布超出目标打印区域，并允许蒸发的材料在目标打印区域上冷凝。在另一个实施例中，使用热来调节材料的流动和沉积层的厚度。

4. 发明申请

US20130004656A1 APPARATUS AND METHOD TO SEPARATE CARRIER LIQUID VAPOR FROM INK 审中-公开
标题翻译：从墨水中分离载体液体蒸气的装置和方法
公开(公告)号：US20130004656A1
公开(公告)日：2013-01-03
申请号：US13539492
申请日：2012-07-01
申请人： Jianglong CHEN , Elias MARTINEZ , Alexander Sou-Kang KO , Ian MILLARD , Eliyahu VRONSKY , Conor F. MADIGAN
发明人： Jianglong CHEN , Elias MARTINEZ , Alexander Sou-Kang KO , Ian MILLARD , Eliyahu VRONSKY , Conor F. MADIGAN
IPC分类号： H05B33/10 , B05C5/02
摘要： Systems, apparatuses, and methods are provided that include or use a chuck, an inkjet printhead, and a gas knife to form film layers on a substrate, which have uniform feature dimensions and which avoid pile-up of inkjet ink. In some systems, a gas movement device is used instead of a gas knife. The systems, apparatus, and methods can be used to print layers on a substrate, which are used in an organic light-emitting device.
摘要翻译：提供了包括或使用卡盘，喷墨打印头和气刀的系统，装置和方法，以在基板上形成膜层，其具有均匀的特征尺寸并且避免了喷墨油墨的堆积。在一些系统中，使用气体移动装置代替气刀。系统，装置和方法可以用于在有机发光装置中使用的衬底上印刷层。

5. 发明申请

US20110293818A1 Method and Apparatus for Depositing A Film Using A Rotating Source 审中-公开
标题翻译：使用旋转源沉积薄膜的方法和装置
公开(公告)号：US20110293818A1
公开(公告)日：2011-12-01
申请号：US12954910
申请日：2010-11-29
申请人： Conor F. Madigan , Hyeun-Su Kim , Dariusz Golda , Valerie Gassend , Manush Birang , Alexander Sou-Kang Ko , Eliyahu Vronsky
发明人： Conor F. Madigan , Hyeun-Su Kim , Dariusz Golda , Valerie Gassend , Manush Birang , Alexander Sou-Kang Ko , Eliyahu Vronsky
IPC分类号： B05D5/06 , B05B5/025 , B05C1/00 , B05C11/00 , B05C5/00 , B05C5/04
CPC分类号： B41F16/00 , B41M3/003 , H01L51/001
摘要： The disclosure generally relates to a method and apparatus for depositing a substantially solid film onto a substrate. The solid film can be an Organic Light-Emitting Diode (“OLED”). In one embodiment, the disclosure relates to using a material supply, a rotating or moving mechanism having at least one transfer surface which is supplied with film material in one orientation and delivers film material to the substrate at a second orientation such that film material delivered to the substrate deposits in substantially solid form. The delivery to the substrate can be performed without the transfer surface materially contacting the substrate. The film material can be deposited on the transfer surface in either solid form or in liquid form (e.g., as a mixture of carrier liquid and dissolved or suspended film material).
摘要翻译：本发明一般涉及用于将基本上固体的膜沉积到基底上的方法和装置。固体膜可以是有机发光二极管（“OLED”）。在一个实施方案中，本公开涉及使用材料供应源，旋转或移动机构，其具有至少一个转移表面，该转移表面以一个取向供应薄膜材料，并以第二取向将薄膜材料输送到基底，使得薄膜材料输送到基材以基本上固体形式沉积。可以在没有转印表面与基底材料接触的情况下进行到基底的输送。膜材料可以以固体形式或液体形式（例如作为载体液体和溶解或悬浮膜材料的混合物）沉积在转印表面上。

6. 发明申请

US20080268651A1 Catch-cup to diverter alignment leveling jig 审中-公开
标题翻译：抓杯到分流器对准调平夹具
公开(公告)号：US20080268651A1
公开(公告)日：2008-10-30
申请号：US11893183
申请日：2007-08-14
申请人： Kent Riley Child , Glen Egami , Alexander Sou-Kang Ko
发明人： Kent Riley Child , Glen Egami , Alexander Sou-Kang Ko
IPC分类号： H01L21/306 , B08B3/00
CPC分类号： H01L21/67023
摘要： An apparatus for leveling and centering a catch-cup chamber to a diverter chamber of a semiconductor processing chamber is described. In one embodiment, the apparatus has a frame with branches. A coupler is mounted to the end of each branch. A measuring device is mounted to each branch. The apparatus is placed in the diverter. The measuring device measures a distance from a branch to a top surface of the catch-cup chamber.
摘要翻译：描述了一种用于将捕捉杯室调平和定心到半导体处理室的转向室的装置。在一个实施例中，该装置具有带分支的框架。耦合器安装到每个分支的末端。测量装置安装到每个分支。该设备放置在分流器中。测量装置测量从分支到捕捉杯室的顶表面的距离。

7. 发明申请

US20080230092A1 METHOD AND APPARATUS FOR SINGLE-SUBSTRATE CLEANING 审中-公开
标题翻译：单基板清洗方法及装置
公开(公告)号：US20080230092A1
公开(公告)日：2008-09-25
申请号：US11690405
申请日：2007-03-23
申请人： Alexander Sou-Kang Ko , Jianshe Tang , Brian J. Brown , Richard R. Endo , Steven Verhaverbeke , Cole Franklin , Dennis J. Yost , Runzi Chang
发明人： Alexander Sou-Kang Ko , Jianshe Tang , Brian J. Brown , Richard R. Endo , Steven Verhaverbeke , Cole Franklin , Dennis J. Yost , Runzi Chang
IPC分类号： B08B3/00
CPC分类号： B08B7/00 , B08B3/024 , B08B3/08 , H01L21/67051
摘要： A single-substrate cleaning apparatus and method of use are described. In an embodiment of the present invention, a liquid cleaning solution is dispensed in small volumes to form a substantially uniform static liquid layer over a substrate surface by atomizing the viscous liquid with an inert gas in a two-phase nozzle. In another embodiment of the present invention, after a layer of the cleaning solution is formed over the substrate to be cleaned, acoustic energy is applied to the substrate to improve the cleaning efficiency. In a further embodiment, cleaning solution precipitates are avoided by dispensing de-ionized water with a spray nozzle to gradually dilute the cleaning solution prior to dispensing de-ionized water with a stream nozzle.
摘要翻译：对单基板清洗装置及其使用方法进行说明。在本发明的一个实施例中，通过在两相喷嘴中用惰性气体雾化粘性液体，以小体积分配液体清洗溶液以在基板表面上形成基本均匀的静态液体层。在本发明的另一个实施方案中，在将清洁溶液层形成在要清洁的基底上之后，将声能施加到基底以提高清洁效率。在另一个实施方案中，通过用喷嘴分配去离子水以在用流喷嘴分配去离子水之前逐渐稀释清洁溶液来避免清洁溶液沉淀物。

8. 发明授权

US06612014B1 Dual post centrifugal wafer clip for spin rinse dry unit 失效
标题翻译：双柱离心晶片夹，用于旋转冲洗干燥单元
公开(公告)号：US06612014B1
公开(公告)日：2003-09-02
申请号：US09616308
申请日：2000-07-12
申请人： Bernardo Donoso , Joseph J. Stevens , Donald J. Olgado , Alexander Sou-Kang Ko
发明人： Bernardo Donoso , Joseph J. Stevens , Donald J. Olgado , Alexander Sou-Kang Ko
IPC分类号： B23Q700
CPC分类号： H01L21/68728 , H01L21/67034 , Y10T29/49998
摘要： An apparatus and associated method for securing a wafer to a SRD spider, the SRD spider has a plurality of spider arms. The apparatus includes a plurality of spaced surfaces disposed on a distal end of one of the spider arms, each of the surfaces being spaced perpendicularly from the longitudinal axis of the spider arm. In one aspect, the two surfaces are positioned to limit production of a wedging force between that spaced surface and the wafer. In one embodiment, a post at least partially defines each one of the plurality of spaced surfaces.
摘要翻译：一种用于将晶片固定到SRD蜘蛛的装置和相关方法，SRD蜘蛛具有多个蜘蛛臂。该装置包括设置在一个蜘蛛臂的远端上的多个间隔表面，每个表面与该蜘蛛臂的纵向轴线垂直地间隔开。在一个方面，两个表面被定位成限制在该间隔表面和晶片之间的楔入力的产生。在一个实施例中，柱至少部分地限定多个间隔开的表面中的每一个。

9. 发明授权

US06499333B1 Calibration element for adjustment nozzle 失效
标题翻译：用于调节喷嘴的校准元件
公开(公告)号：US06499333B1
公开(公告)日：2002-12-31
申请号：US09517360
申请日：2000-03-02
申请人： Alexander Sou-Kang Ko , Duane DeMore
发明人： Alexander Sou-Kang Ko , Duane DeMore
IPC分类号： B65G6500
CPC分类号： H01L21/67259 , B08B3/02 , H01L21/67051 , H01L21/67253
摘要： In one aspect, a spin-rinse-dry chamber comprises an adjustable nozzle. A calibration element may be positioned in the spin-rinse-dry chamber at which the adjustable nozzle may be directed. Targets (for example cross-hairs in one embodiment) may be located on the calibration element at a position corresponding to where it is desired to direct a fluid flow from the adjustable nozzle. Another aspect provides a method of calibrating a spin-rinse-dry chamber having an adjustable nozzle comprising inserting a calibration element having a similar contour as a substrate into the spin-rinse-dry chamber. Fluid is then directed through the adjustable nozzle at a selected target position located on the surface of the calibration element.
摘要翻译：一方面，旋转漂洗干燥室包括可调喷嘴。校准元件可以定位在可旋转冲洗干燥室中，可调节喷嘴可以在该冲洗干燥室中被引导。目标（例如一个实施例中的交叉毛发）可以位于对应于期望从可调节喷嘴引导流体流的地方的校准元件上。另一方面提供了一种校准具有可调节喷嘴的旋转冲洗干燥室的方法，包括将具有与基底相似的轮廓的校准元件插入旋转漂洗干燥室中。然后将流体引导到位于校准元件表面上的选定目标位置处的可调节喷嘴。

10. 发明申请

US20130252533A1 Gas Enclosure Assembly and System 有权
公开(公告)号：US20130252533A1
公开(公告)日：2013-09-26
申请号：US13720830
申请日：2012-12-19
申请人： JUSTIN MAUCK , ALEXANDER SOU-KANG KO , ELIYAHU VRONSKY , SHANDON ALDERSON
发明人： JUSTIN MAUCK , ALEXANDER SOU-KANG KO , ELIYAHU VRONSKY , SHANDON ALDERSON
IPC分类号： F24F3/16
CPC分类号： F24F3/161 , B05B17/0638 , B41J29/393 , F24F3/14 , H01L51/0005 , H01L51/56 , H05B33/02 , H05B33/10
摘要： The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.

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