专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20070202615A1 Method of measuring critical dimension 审中-公开
标题翻译：测量临界尺寸的方法
公开(公告)号：US20070202615A1
公开(公告)日：2007-08-30
申请号：US11702599
申请日：2007-02-06
申请人： Byung-Sug Lee , Mi-Sung Lee , Yu-Sin Yang , Yun-Jung Jee , Chung-Sam Jun
发明人： Byung-Sug Lee , Mi-Sung Lee , Yu-Sin Yang , Yun-Jung Jee , Chung-Sam Jun
IPC分类号： H01L21/66 , G01R31/26
CPC分类号： H01L22/12
摘要： In a method of measuring a critical dimension for conductive structures or openings exposing conductive structures formed on a substrate, a corona ion charge is deposited on the conductive structures and/or an insulating layer having the openings in a measurement region of the substrate. The critical dimension of the conductive structures or the openings may be determined by comparing variations of a surface voltage caused by leakage current through the conductive structures with reference data to thereby improve reliability of the critical dimension measurement.
摘要翻译：在测量形成在衬底上的导电结构的导电结构或开口的临界尺寸的方法中，电晕离子电荷沉积在导电结构和/或在衬底的测量区域中具有开口的绝缘层上。可以通过将通过导电结构的漏电流引起的表面电压的变化与参考数据进行比较来确定导电结构或开口的临界尺寸，从而提高临界尺寸测量的可靠性。

2. 发明申请

US20070147300A1 Fast handover method using candidate CoAs 有权
标题翻译：使用候选CoAs的快速切换方法
公开(公告)号：US20070147300A1
公开(公告)日：2007-06-28
申请号：US11636203
申请日：2006-12-08
申请人： Jung Jee , Hong Jeon , Jong Yi , Hyeong Lee
发明人： Jung Jee , Hong Jeon , Jong Yi , Hyeong Lee
IPC分类号： H04Q7/00
CPC分类号： H04W36/0016 , H04W80/04
摘要： Provided is a fast handover method using candidate care-of addresses (CoAs). The method includes obtaining Internet protocol (IP) address information of access routers located adjacent to a previous access router (PAR) to which a mobile node is connected; setting more than one candidate CoAs based on the IP address information; and selecting from the more than one candidate CoAs a CoA of a sub-net to which the mobile node is to move and performing a handover based on the selected CoA. Therefore, a delay and a packet loss caused by the setting of a new NCoAs can be prevented.
摘要翻译：提供了使用候选转交地址（CoAs）的快速切换方法。该方法包括获取与移动节点所连接的先前接入路由器（PAR）相邻的接入路由器的互联网协议（IP）地址信息; 根据IP地址信息设置多个候选CoA; 并且从多于一个候选的CoA中选择CoAs作为移动节点要移动的子网的CoA，并且基于所选择的CoA执行切换。因此，可以防止由新的NCoA的设置引起的延迟和分组丢失。

3. 发明授权

US07186577B2 Method for monitoring a density profile of impurities 有权
标题翻译：监测杂质浓度分布的方法
公开(公告)号：US07186577B2
公开(公告)日：2007-03-06
申请号：US10787772
申请日：2004-02-27
申请人： Yun-Jung Jee , Sun-Yong Choi , Chung-Sam Jun , Kwan-Woo Ryu
发明人： Yun-Jung Jee , Sun-Yong Choi , Chung-Sam Jun , Kwan-Woo Ryu
IPC分类号： H01L21/66
CPC分类号： G01N21/9501
摘要： A method of monitoring a density profile of impurities, the method including presetting a monitoring position of a thin layer coated on a substrate, the density profile of impurities being monitored from the monitoring position in a direction of thickness of the thin layer, moving an exposer for exposing a local area of the thin layer to the monitoring position, exposing the local area of the thin layer along the direction of thickness of the thin layer, forming a shape profile of the exposed local area of the thin layer, and monitoring the density profile of impurities by determining a density of impurities in accordance with the shape profile, and an apparatus therefor. The impurity density profile may be monitored without destroying a substrate on which a thin layer is coated, and an amount of impurities used for forming the thin layer may be monitored and controlled in real-time.
摘要翻译：一种监测杂质浓度分布的方法，该方法包括：预先设置涂覆在基材上的薄层的监测位置，从监测位置监测的杂质的浓度分布沿薄层厚度方向移动，移动曝光器用于将薄层的局部区域暴露于监测位置，使薄层的局部区域沿着薄层的厚度方向暴露，形成薄层暴露局部区域的形状轮廓，并监测密度通过根据形状轮廓确定杂质的密度来描述杂质，及其装置。可以监测杂质浓度分布，而不会破坏其上涂覆有薄层的基底，并且可以实时监测和控制用于形成薄层的杂质的量。

4. 发明申请

US20060011837A1 Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same 有权
标题翻译：形成待检查图案的三维图像的方法及其执行方法
公开(公告)号：US20060011837A1
公开(公告)日：2006-01-19
申请号：US11180504
申请日：2005-07-12
申请人： Yun-Jung Jee , Chung-Sam Jun , Yu-Sin Yang , Tae-Kyoung Kim
发明人： Yun-Jung Jee , Chung-Sam Jun , Yu-Sin Yang , Tae-Kyoung Kim
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.
摘要翻译：在用于形成检查图案的三维图像的方法和装置中，根据连续的扫描深度形成检查X射线的参考强度函数，并且相对于扫描深度是不同的。差分参考强度函数被分解为起始函数和特征函数。差分参考强度函数然后被重复地积分，而临时垂直轮廓函数被替换为开始函数，直到参考X射线的临时强度在可允许的误差范围内。选择满足误差范围的临时垂直剖面函数作为最佳垂直剖面函数。沿着检查图案的深度将表面形状组合到最佳垂直轮廓函数，从而形成用于检查图案的三维图像。

5. 发明申请

US20050105489A1 Network apparatus and packet routing method for ubiquitous computing 有权
标题翻译：用于无处不在计算的网络设备和分组路由方法
公开(公告)号：US20050105489A1
公开(公告)日：2005-05-19
申请号：US10923184
申请日：2004-08-19
申请人： Jung Jee , Jae Nah , Taek Nam , Sung Sohn
发明人： Jung Jee , Jae Nah , Taek Nam , Sung Sohn
IPC分类号： H04L12/56 , H04L29/06 , H04L29/08
CPC分类号： H04W40/02 , H04L45/00 , H04L67/303 , H04L69/329 , H04W8/02 , H04W8/26 , H04W36/0016
摘要： A network apparatus and packet routing method for ubiquitous computing are provided. In the network apparatus, a movement detection unit detects movement from a first network to a second network, and a movement address setting unit generates care-of-address (CoA) information corresponding to prefix information of the second network. A movement registration unit registers a movement address by transmitting a binding update message containing the generated CoA and home address (HoA) mapping information, to a home agent. A resource setting unit registers information on current terminal apparatuses among network terminal apparatuses on the second network. A packet distribution unit distributes the received packet to a current terminal apparatus corresponding to the application characteristic of the packet received from the home agent based on the information on the current terminal apparatuses.
摘要翻译：提供了一种用于无处不在的计算的网络设备和分组路由方法。在网络装置中，移动检测部检测从第一网络向第二网络的移动，移动地址设定部生成与第二网络的前缀信息对应的转交地址（CoA）信息。移动注册单元通过将包含所生成的CoA和归属地址（HoA）映射信息的绑定更新消息发送到归属代理来注册移动地址。资源设置单元在第二网络上的网络终端装置中登记当前终端装置的信息。分组分发单元基于关于当前终端设备的信息，将接收的分组分发到与归属代理接收的分组的应用特性相对应的当前终端设备。

6. 发明申请

US20110135813A1 METHOD OF MANUFACTURING UNIT CELL OF SOLID OXIDE FUEL CELL USING TRANSFER PROCESS 有权
标题翻译：使用转移方法制造固体氧化物燃料电池单元的方法
公开(公告)号：US20110135813A1
公开(公告)日：2011-06-09
申请号：US12963258
申请日：2010-12-08
申请人： Byung Hyun CHOI , Mi Jung Jee , Seong Tae Park , Dae Jin Lee , Mi Jai Lee , Yuong Jin Kwon
发明人： Byung Hyun CHOI , Mi Jung Jee , Seong Tae Park , Dae Jin Lee , Mi Jai Lee , Yuong Jin Kwon
IPC分类号： H01M8/00
CPC分类号： H01M4/8835 , H01M4/8814 , H01M4/8885 , H01M8/1213 , H01M8/1286 , H01M2008/1293 , Y02P70/56
摘要： A method of manufacturing a unit cell of a solid oxide fuel cell using a transfer process, in which an anode, electrolyte, cathode and interconnect are deposited on a substrate using the transfer process when the unit cell of the solid oxide fuel cell having a variety of shapes, such as a planar type, a horizontal pipe type, a tubular type, a segmented type, and the like, is manufactured. In manufacture of solid oxide fuel cells having a variety of shapes according to lamination and arrangement of unit cells, the components of each unit cell, such as the anode, the cathode, the electrolyte, the interconnect, and the like, may be deposited in a desired shape using the transfer process through deposition or coating, so that the components of the unit cell having a large scale or a complicated structure can be deposited without limit in size and shape, the thickness of the components of the unit cell can be easily controlled depending on the number of stacked transfer paper sheets, and a coating film can be formed on a substrate at a lower cost.
摘要翻译：使用转印法制造固体氧化物型燃料电池的单电池的方法，其中当具有多种固体氧化物燃料电池的单电池时，使用转印工艺将阳极，电解质，阴极和互连物质沉积在基板上的形状，例如平面型，水平管型，管状型，分段型等。在根据单元电池的层压和布置制造具有各种形状的固体氧化物燃料电池时，可以将每个单元电池的元件（例如阳极，阴极，电解质，互连等）沉积在使用通过沉积或涂覆的转印工艺的期望形状，使得可以在尺寸和形状上没有限制地沉积具有大尺寸或复杂结构的单元电池的部件，单元电池的部件的厚度可以容易地根据堆叠的转印纸张的数量进行控制，并且可以以较低的成本在基板上形成涂膜。

7. 发明授权

US07666069B2 Wafer holder and wafer conveyor equipped with the same 失效
标题翻译：晶圆架和晶圆输送机配备相同
公开(公告)号：US07666069B2
公开(公告)日：2010-02-23
申请号：US11783534
申请日：2007-04-10
申请人： Tae-Kyoung Kim , Yun-Jung Jee , Kyoung-Su Shin , Chung-Sam Jun
发明人： Tae-Kyoung Kim , Yun-Jung Jee , Kyoung-Su Shin , Chung-Sam Jun
IPC分类号： B24B47/02
CPC分类号： H01L21/68785 , H01L21/6776
摘要： The present invention is directed to a wafer holder and a related wafer conveyor system. The wafer holder holds a wafer and moves horizontally within a chamber. A contact area between the wafer and the wafer holder is reduced, and potential contaminants generated by ear between components of the wafer holder are trapped by an airtight cover. Since the wafer holder moves horizontally while being fixed to a guide rail, the wafer conveyor system reduces friction between the guide rail and the wafer holder.
摘要翻译：本发明涉及晶片保持器和相关的晶片输送系统。晶片保持器保持晶片并且在腔室内水平移动。晶片和晶片保持架之间的接触面积减小，并且由晶片保持器的部件之间的耳朵产生的潜在的污染物被气密的盖子所困住。由于晶片保持架在固定到导轨的同时水平移动，所以晶片传送系统减小了导轨和晶片保持器之间的摩擦。

8. 发明申请

US20070188185A1 Method of inspecgin a leakage current characteristic of a dielectric layer 审中-公开
标题翻译：检测电介质层漏电流特性的方法
公开(公告)号：US20070188185A1
公开(公告)日：2007-08-16
申请号：US11710543
申请日：2007-02-26
申请人： Tae-Min Eom , Chung-Sam Jun , Yu-Sin Yang , Yun-Jung Jee
发明人： Tae-Min Eom , Chung-Sam Jun , Yu-Sin Yang , Yun-Jung Jee
IPC分类号： G01R31/26
CPC分类号： G01R31/1263
摘要： A method of inspecting a leakage current of a dielectric layer on a substrate including a cell array region having a plurality of cell blocks including a patterned structure, the dielectric layer formed on the patterned structure, and a peripheral circuit region includes depositing a corona ion charge on a cell block selected from the plurality of cell blocks and measuring a variance of a surface voltage caused by a leakage current through the dielectric layer on the selected cell block. The variance of the surface voltage is compared with reference data to determine a leakage current characteristic of the dielectric layer.
摘要翻译：一种在包括具有包括图案化结构的多个单元块，形成在图案化结构上的电介质层和外围电路区域的单元阵列区域的基板上检查介质层的漏电流的方法，包括沉积电晕离子电荷在从所述多个单元块中选择的单元块上测量由所选择的单元块上的介电层的漏电流引起的表面电压的方差。将表面电压的方差与参考数据进行比较，以确定电介质层的漏电流特性。

9. 发明申请

US20050221740A1 Wafer holder and wafer conveyor system equipped with the same 失效
标题翻译：晶圆架和晶圆输送系统配备相同
公开(公告)号：US20050221740A1
公开(公告)日：2005-10-06
申请号：US11016247
申请日：2004-12-20
申请人： Tae-Kyoung Kim , Yun-Jung Jee , Kyoung-Su Shin , Chung-Sam Jun
发明人： Tae-Kyoung Kim , Yun-Jung Jee , Kyoung-Su Shin , Chung-Sam Jun
IPC分类号： H01L21/68 , B24B5/00 , H01L21/677 , H01L21/683 , H01L21/687
CPC分类号： H01L21/68785 , H01L21/6776
摘要： The present invention is directed to a wafer holder and a related wafer conveyor system. The wafer holder holds a wafer and moves horizontally within a chamber. A contact area between the wafer and the wafer holder is reduced, and potential contaminants generated by ear between components of the wafer holder are trapped by an airtight cover. Since the wafer holder moves horizontally while being fixed to a guide rail, the wafer conveyor system reduces friction between the guide rail and the wafer holder.
摘要翻译：本发明涉及晶片保持器和相关的晶片输送系统。晶片保持器保持晶片并且在腔室内水平移动。晶片和晶片保持架之间的接触面积减小，并且由晶片保持器的部件之间的耳朵产生的潜在的污染物被气密的盖子所困住。由于晶片保持架在固定到导轨的同时水平移动，所以晶片传送系统减小了导轨和晶片保持器之间的摩擦。

10. 发明授权

US07428328B2 Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same 有权
标题翻译：形成待检查图案的三维图像的方法及其执行方法
公开(公告)号：US07428328B2
公开(公告)日：2008-09-23
申请号：US11180504
申请日：2005-07-12
申请人： Yun-Jung Jee , Chung-Sam Jun , Yu-Sin Yang , Tae-Kyoung Kim
发明人： Yun-Jung Jee , Chung-Sam Jun , Yu-Sin Yang , Tae-Kyoung Kim
IPC分类号： G06K9/00
CPC分类号： G21K7/00
摘要： In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning depth, and is differentiated with respect to the scanning depth. The differential reference intensity function is decomposed into a start function and a characteristic function. The differential reference intensity function is then repeatedly integrated while a temporary vertical profile function is substituted for the start function until the temporary intensity of a reference X-ray is within an allowable error range. The temporary vertical profile function satisfying the error range is selected as an optimal vertical profile function. A surface shape is combined to the optimal vertical profile function along a depth of the inspection pattern to thereby form the three-dimensional image for the inspection pattern.
摘要翻译：在用于形成检查图案的三维图像的方法和装置中，根据连续的扫描深度形成检查X射线的参考强度函数，并且相对于扫描深度是不同的。差分参考强度函数被分解为起始函数和特征函数。差分参考强度函数然后被重复地积分，而临时垂直轮廓函数被替换为开始函数，直到参考X射线的临时强度在可允许的误差范围内。选择满足误差范围的临时垂直剖面函数作为最佳垂直剖面函数。沿着检查图案的深度将表面形状组合到最佳垂直轮廓函数，从而形成用于检查图案的三维图像。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式