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    • 1. 发明授权
    • Ion sources
    • 离子源
    • US06864486B2
    • 2005-03-08
    • US10221545
    • 2002-02-11
    • Valery V. AlekseevVsevolod V. ZelenkovMark M. KrivoruchkoJohn E. Keem
    • Valery V. AlekseevVsevolod V. ZelenkovMark M. KrivoruchkoJohn E. Keem
    • H05H1/54F03H1/00H01J27/02H01J27/18H05H1/92H01J17/04H01J27/00H01L21/306
    • H01J27/143
    • A closed loop exit hole is formed in a magnetically permeable end wall (2) of an enclosure (1) of a closed electron drift ion source. Parts of this end wall separated by the exit hole serve as pole pieces (7 and 8) of the magnetic system and define the first pole gap. The magnetic system includes pole pieces (9 and 10), which define the second pole gap made in the form of a closed loop exit hole and arranged along the direction of ion emission. Magnetomotive force sources (5 and 6) are located in space between two groups of magnetic terminals. The ratio of width of each pole gap and distance between pole pieces of the first (7 and 8) and second (9 and 10) magnetic gaps along the direction of ion emission is not less than 0.05.The invention allows the intensity of the generated ion beam and the energy of ions to be increased, and this is provided by the homogeneous distribution of ion current density across the ion beam section.
    • 在闭合电子漂移离子源的封闭体(1)的导磁性端壁(2)中形成闭环出口孔。 由出口孔分隔的端壁的部分用作磁性系统的极片(7和8)并限定第一极间隙。 磁性系统包括极片(9和10),其限定以闭环出口孔形式并沿着离子发射方向布置的第二极间隙。 磁动势源(5和6)位于两组磁性端子之间的空间中。 第一(7和8)和第二(9和10)磁隙的极点之间的距离与离子发射方向之间的每个磁极间隙的宽度与极片之间的距离比不小于0.05。本发明允许产生的 离子束和离子的能量增加,这是通过离子束截面上的离子电流密度的均匀分布来提供的。
    • 4. 发明授权
    • Multilayer coating and method
    • 多层涂层及方法
    • US4619865A
    • 1986-10-28
    • US658946
    • 1984-10-09
    • John E. KeemJames D. Flasck
    • John E. KeemJames D. Flasck
    • B32B9/00C23C14/06C23C16/00C23C28/00C23C28/04C23C30/00B32B9/04B32B13/04B32B19/00
    • C23C28/00Y10T428/261
    • Multilayer protective coatings that are applied over a substrate are disclosed that comprise a plurality of superimposed multilayer units. Each multilayer unit contains two or more superimposed thin layers in which at least two layers are compositionally different. The properties of the resulting coating are a combination of the properties of the individual layers. One layer of a multilayer unit may provide hardness or wear resistance and another layer may provide lubricity, for example. The thickness of the individual layers can be related to the microscopic surface relief of the substrate to which the protective coating is applied.One disclosed multilayer unit comprises three layers: an oxidation resistant layer; a nitride layer; and a layer of disordered boron and carbon material.
    • 公开了施加在衬底上的多层保护涂层,其包括多个叠加的多层单元。 每个多层单元包含两个或更多个重叠的薄层,其中至少两层在组成上是不同的。 所得涂层的性质是各层的性质的组合。 一层多层单元可提供硬度或耐磨性,另一层可提供例如润滑性。 单个层的厚度可以与施加保护涂层的基材的微观表面浮雕有关。 一个公开的多层单元包括三层:抗氧化层; 氮化物层; 和一层无序的硼和碳材料。