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    • 4. 发明授权
    • Thermal actuator and an optical waveguide switch including the same
    • 热致动器和包括其的光波导开关
    • US06983088B2
    • 2006-01-03
    • US10634941
    • 2003-08-05
    • Joel A. KubbyJun MaKristine A. GermanPeter M. GulvinPinyen Lin
    • Joel A. KubbyJun MaKristine A. GermanPeter M. GulvinPinyen Lin
    • G02B6/26G02B6/42H01H37/00
    • G02B6/3576B81B3/0018G02B6/3566G02B6/3584
    • A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
    • 热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。 每个光束的中点附加或耦合到正交耦合光束。 每个阵列光束具有具有对应的光束加热参数值的光束加热参数。 光束加热参数值基于预定图案在波束阵列上变化。 当束被加热装置加热时,光束阵列中光束温度的分布变得不对称,从而使光束阵列发生弯曲。 光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。 耦合光束运动反过来操作包括的光波导开关。 光束阵列中的光束通过焦耳加热,涡流加热,传导加热,对流加热和辐射加热中的任何一种加热。
    • 6. 发明授权
    • Microelectromechanical structures defined from silicon on insulator wafers
    • 由绝缘体上硅晶片定义的微机电结构
    • US06362512B1
    • 2002-03-26
    • US09468423
    • 1999-12-21
    • Joel A. KubbyJingkuang ChenAlex T. Tran
    • Joel A. KubbyJingkuang ChenAlex T. Tran
    • H01L2982
    • B81B3/0083B81C2201/0109B81C2201/019B81C2201/0191B81C2201/053G02B6/4214
    • A device structure is defined in a single-crystal silicon (SCS) layer separated by an insulator layer, such as an oxide layer, from a handle wafer. The SCS can be attached to the insulator by wafer bonding, and is selectively etched, as by photolithographic patterning and dry etching. A sacrificial oxide layer can be deposited on the etched SCS, on which polysilicon can be deposited. A protective oxide layer is deposited, and CMOS circuitry and sensors are integrated. Silicon microstructures with sensors connected to CMOS circuitry are released. In addition, holes can be etched through the sacrificial oxide layer, sacrificial oxide can be deposited on the etched SCS, polysilicon can be deposited on the sacrificial oxide, PSG can be deposited on the polysilicon layer, which both can then be patterned.
    • 器件结构被限定在由来自处理晶片的绝缘体层(例如氧化物层)分离的单晶硅(SCS)层中。 SCS可以通过晶片接合连接到绝缘体,并且通过光刻图案和干蚀刻被选择性地蚀刻。 可以在蚀刻的SCS上沉积牺牲氧化物层,在其上沉积多晶硅。 沉积保护性氧化物层,并集成CMOS电路和传感器。 释放了连接到CMOS电路的传感器的硅微结构。 此外,可以通过牺牲氧化物层蚀刻孔,牺牲氧化物可以沉积在蚀刻的SCS上,多晶硅可以沉积在牺牲氧化物上,PSG可以沉积在多晶硅层上,然后可以对其进行图案化。
    • 7. 发明授权
    • Monolithic spectrophotometer
    • 单片分光光度计
    • US06249346B1
    • 2001-06-19
    • US09467185
    • 1999-12-20
    • Jingkuang ChenJoel A. Kubby
    • Jingkuang ChenJoel A. Kubby
    • G01J336
    • G01J3/18G01J3/02G01J3/0218G01J3/0256G01J3/0259G01J3/2803
    • A micro spectrophotometer is monolithically constructed on a silicon substrate. The spectrophotometer includes a concave grating, which is used for dispersing optical waves as well as focusing reflected light onto a photodiode array sited on a silicon bridge. The silicon bridge is bent 90° from the surface of the silicon substrate in order to orthogonally intersect the output light from the grating. A precision notch is defined in the silicon substrate for coupling to an optical input fiber. Signal processing circuitry is etched on the substrate using conventional CMOS processes for initial processing of information received from the photodiode array.
    • 微型分光光度计在硅衬底上单片构造。 分光光度计包括凹光栅,其用于分散光波以及将反射光聚焦到位于硅桥上的光电二极管阵列上。 硅桥从硅衬底的表面弯曲90°,以便与光栅的输出光正交相交。 在硅衬底中限定了用于耦合到光输入光纤的精密凹口。 使用常规CMOS工艺在衬底上蚀刻信号处理电路,用于对从光电二极管阵列接收的信息进行初始处理。
    • 9. 发明授权
    • Ink detecting mechanism for a liquid ink printer
    • 液体墨水打印机墨水检测机构
    • US5721574A
    • 1998-02-24
    • US570299
    • 1995-12-11
    • Joel A. Kubby
    • Joel A. Kubby
    • B41J2/175B41J2/05B41J2/125B41J2/14B41J2/165B41J2/01
    • B41J2/04541B41J2/0458B41J2/125B41J2/14129B41J2/14153B41J2/16579B41J2002/14354
    • An ink detecting mechanism for a liquid ink printer including a liquid ink printhead having a plurality of ink carrying conduits terminated by an ink ejecting orifice. The ink detecting mechanism detects the presence of ink within the ink carrying conduits and includes a normally open circuit maintained in an open condition when said ink carrying conduit lacks the presence of ink. The fluid detecting device includes a detecting probe spaced from a transducer element located in the ink carrying conduit such that the presence of ink is detected for between the location of the detecting probe and the location of the transducer element. A signal is generated by a detection circuit for each of the channels of the printhead. Each signal is then summed and a decision signal is generated indicating whether or not the entire array of printhead nozzles should be primed. The detection of ink within the channels is performed without the need for ejecting ink from the channels.
    • 一种用于液体墨水打印机的墨水检测机构,其包括具有由喷墨孔终止的多个墨水输送导管的液体墨水打印头。 墨水检测机构检测墨水携带导管内的墨水的存在,并且当所述墨水输送导管缺少墨水的存在时,包括保持在打开状态的常开电路。 流体检测装置包括与位于墨水输送管道中的换能器元件间隔开的检测探针,使得在检测探针的位置和换能器元件的位置之间检测墨水的存在。 信号由打印头的每个通道的检测电路产生。 然后将每个信号相加,并产生一个决定信号,指示打印头喷嘴的整个阵列是否应该被填充。 在不需要从通道喷射墨水的情况下执行通道内的墨的检测。