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    • 1. 发明授权
    • Memory element with small threshold voltage variance and high-speed logic element with low power consumption
    • 具有小阈值电压差异的存储元件和低功耗的高速逻辑元件
    • US08362565B2
    • 2013-01-29
    • US12630396
    • 2009-12-03
    • Hideaki Kuroda
    • Hideaki Kuroda
    • H01L29/66
    • H01L21/84H01L27/105H01L27/11H01L27/1116H01L27/12H01L29/78648
    • A semiconductor device includes: a semiconductor layer; an element isolation region formed in the semiconductor layer for separation between a memory element part and a logic element part; first and second field-effect transistors formed in the memory element part and having first and second gate electrodes on a first surface side of the semiconductor layer and a second surface side opposite to the first surface, respectively, and having a source and drain region in common with each other; a third field-effect transistor formed in the logic element part and having a third gate electrode on the second surface side; and first and second insulating films formed on the semiconductor layer to cover the first field-effect transistor and the second and third field-effect transistors, respectively. The first field-effect transistor and the second field-effect transistor are fully-depleted field-effect transistors. The first gate electrode and the second gate electrode are electrically connected.
    • 半导体器件包括:半导体层; 形成在所述半导体层中用于在存储元件部分和逻辑元件部分之间分离的元件隔离区; 第一和第二场效应晶体管形成在存储元件部分中,并且在半导体层的第一表面侧上分别具有第一和第二栅极电极以及与第一表面相对的第二表面侧,并且具有源极和漏极区域 相互共同; 形成在所述逻辑元件部分中并且在所述第二表面侧上具有第三栅电极的第三场效应晶体管; 以及形成在所述半导体层上以分别覆盖所述第一场效应晶体管和所述第二和第三场效应晶体管的第一和第二绝缘膜。 第一场效应晶体管和第二场效应晶体管是完全耗尽的场效应晶体管。 第一栅电极和第二栅极电连接。
    • 3. 发明授权
    • Piezoelectric vibration device and piezoelectric resonance component
    • 压电振动装置和压电谐振元件
    • US06362561B1
    • 2002-03-26
    • US09501086
    • 2000-02-09
    • Hideaki KurodaRyuhei Yoshida
    • Hideaki KurodaRyuhei Yoshida
    • H01L4104
    • H03H9/177H03H9/0547H03H9/1014
    • An energy-trapping piezoelectric vibration device generates a thickness shear mode and includes an elongated piezoelectric element having first and second longitudinally opposed ends, top and bottom surfaces provided between the first and second ends such that the top and bottom surfaces oppose each other, and beveled surfaces disposed at a vicinity of the first and second ends such that the thickness of the piezoelectric element gradually decreases towards the first and second ends, respectively. First and second vibration electrodes are disposed on the top surface and the bottom surface of the piezoelectric element, respectively. The first and second vibration electrodes are located at an approximate middle portion of the piezoelectric element so as to oppose each other with the piezoelectric element disposed therebetween, to define opposing portions which constitute a vibrator. A roughness of the beveled surfaces is greater than a roughness of a flat portion of the top and bottom surfaces of the piezoelectric substrate disposed beneath the vibration electrodes.
    • 能量捕获压电振动装置产生厚度剪切模式,并且包括具有第一和第二纵向相对端的细长压电元件,顶表面和底表面设置在第一和第二端之间,使得顶表面和底表面彼此相对,并且倾斜 表面设置在第一端和第二端附近,使得压电元件的厚度分别朝向第一端和第二端逐渐减小。 第一和第二振动电极分别设置在压电元件的顶表面和底表面上。 第一和第二振动电极位于压电元件的大致中间部分处以彼此相对的压电元件设置在它们之间,以限定构成振动器的相对部分。 倾斜表面的粗糙度大于设置在振动电极下方的压电基板的顶表面和底表面的平坦部分的粗糙度。
    • 4. 发明授权
    • LDD buried channel field effect semiconductor device and manufacturing
method
    • LDD掩埋沟道场效应半导体器件及其制造方法
    • US6147383A
    • 2000-11-14
    • US611188
    • 1996-03-05
    • Hideaki Kuroda
    • Hideaki Kuroda
    • H01L21/265H01L21/336H01L29/10H01L29/78H01L29/76H01L29/94H01L31/062
    • H01L29/6659H01L29/1083H01L29/7833H01L29/7838H01L21/26586
    • An LDD-structured field-effect semiconductor device that can eliminate fluctuations in the threshold voltage caused by variations in the position of higher-density diffusion layers, thereby suppressing variations in the threshold voltage to a lower level. The junction depth of each of the lower-density diffusion layers in contact with a substrate is greater than the depth of a depletion layer at the place corresponding to a portion of the channel region contacting the source region. This prevents a change in the positional relationship between diffusion layers serving as, what are referred to as "pocket layers", and the depletion layer adjacent to the source, even though the position of the higher-density diffusion layers is varied in the longitudinal direction of the channel due to variations in the width of a spacer. Thus, there are no fluctuations in the quantity of impurities contained in the pocket layers within the depletion layer adjacent to the source, which would otherwise influence the threshold voltage.
    • 一种LDD结构的场效应半导体器件,其可以消除由高密度扩散层的位置变化引起的阈值电压的波动,从而将阈值电压的变化抑制到较低的水平。 与衬底接触的每个较低密度扩散层的结深度大于在与源区域接触的沟道区的一部分相对应的位置处的耗尽层的深度。 这防止了即使高密度扩散层的位置在纵向方向上变化,即用作“袋层”的扩散层和与源极相邻的耗尽层之间的位置关系发生变化 由于间隔物的宽度的变化引起的通道。 因此,与源极相邻的耗尽层内的杂质层中所含杂质的量不会有波动,否则会影响阈值电压。
    • 9. 发明授权
    • Method for forming dummy pattern in a semiconductor device
    • 在半导体器件中形成虚拟图案的方法
    • US5459093A
    • 1995-10-17
    • US214141
    • 1994-03-17
    • Hideaki KurodaKeiichi Ono
    • Hideaki KurodaKeiichi Ono
    • H01L21/3205G06F17/50H01L21/82H01L23/52H01L27/02H01L21/70H01L27/00
    • H01L27/0207Y10S438/926
    • Method of forming a dummy pattern without inducing crosstalk between conductive interconnects which would normally be caused by increase in capacitance between the interconnects. Also, absolute steps of devices are made uniform. Furthermore, the flatness of devices is improved. In a device having a multilayer aluminum metallization structure, let Chip be data about a region on which a dummy pattern should be defined. Let I.sub.Mi be data about a region occupied by an aluminum interconnect pattern on the ith layer. Let I.sub.Di be data about a dummy pattern on the ith layer, or data sought for. Let (Chip-I.sub.Mi).sub.D be data about the dummy pattern region obtained by decrement of data. The data (Chip-I.sub.Mi).sub.D about the dummy pattern region is ANDed with data I.sub.M(i+1) about the conduction pattern on the (i+1)th layer or with data I.sub.D(i+1) about the dummy pattern. Thus, data I.sub.Di about the dummy pattern is created. The dummy pattern on the ith layer is created, based on the created data I.sub.Di.
    • 形成虚设图案的方法,而不会引起通常由互连之间的电容增加引起的导电互连之间的串扰。 此外,设备的绝对步骤均匀。 此外,设备的平坦度得到改善。 在具有多层铝金属化结构的器件中,令芯片是关于其上应限定虚拟图案的区域的数据。 使IMi是关于第i层上的铝互连图案所占据的区域的数据。 让IDi是关于第i层上的虚拟模式或寻求的数据的数据。 令(Chip-IMi)D是通过数据递减获得的虚拟图形区域的数据。 关于虚拟图案区域的数据(Chip-IMi)D与关于第(i + 1)层上的导电图案的数据IM(i + 1)或关于虚拟图案的数据ID(i + 1)进行AND。 因此,创建关于虚拟图案的数据IDi。 基于创建的数据IDi创建第i层上的虚拟模式。