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    • 2. 发明授权
    • Method apparatus and system for accessing discontinuous media tracks
    • 用于访问不连续媒体轨道的方法装置和系统
    • US07046476B1
    • 2006-05-16
    • US11032355
    • 2005-01-10
    • Thomas Robert AlbrechtHenry Hung Yang
    • Thomas Robert AlbrechtHenry Hung Yang
    • G11B5/596
    • G11B5/59627G11B5/59688
    • An apparatus, system, and method are disclosed for accessing discontinuous media tracks. The apparatus, in one embodiment, accesses discontinuous media tracks of a storage medium having one or more independently formed storage regions thereon. Each storage region may include a set of track segments. A memory may be provided to store track offset information for each storage region. A mapping module may collect track offset information, calculate a physical offset between adjacent storage regions, define a track, create a table, and store the track offset information in the memory. The apparatus may further include a tracking module to sense a position of a head relative to a centerline of a track segment within a current storage region, access offset information, and align a storage head with a closely aligned track segment within a subsequent storage region. Consequently, discontinuous media tracks may be accessed by a storage access device.
    • 公开了用于访问不连续媒体轨道的装置,系统和方法。 在一个实施例中,该装置访问其上具有一个或多个独立形成的存储区域的存储介质的不连续介质轨道。 每个存储区域可以包括一组轨道段。 可以提供存储器来存储每个存储区域的轨道偏移信息。 映射模块可以收集轨道偏移信息,计算相邻存储区域之间的物理偏移量,定义轨道,创建表格,以及将轨道偏移信息存储在存储器中。 该装置还可以包括跟踪模块,用于感测头部相对于当前存储区域内的轨道段的中心线的位置,访问偏移信息,以及使存储头与随后存储区域内的紧密对准的轨道段对准。 因此,不连续媒体轨道可以被存储访问设备访问。
    • 3. 发明授权
    • Method and apparatus for creating a topographically patterned substrate
    • 用于产生地形图案化衬底的方法和装置
    • US07648641B2
    • 2010-01-19
    • US11155099
    • 2005-06-17
    • Thomas Robert AlbrechtHenry Hung Yang
    • Thomas Robert AlbrechtHenry Hung Yang
    • B44C1/22
    • C23F1/02B82Y10/00C23F1/26G11B5/012G11B5/74G11B5/743G11B5/82G11B5/855H01L21/0337H01L21/3086Y10T428/26Y10T428/31504Y10T428/31678Y10T428/31721Y10T428/31935
    • A method of the present invention is presented for deep etching of features on a surface. In one embodiment, the method includes providing a substrate having a surface selected to undergo a feature etching process and coating the substrate surface with a protective layer and an imprintable layer. The coated substrate is then subjected to a feature imprinting and etching process. Subsequent to the feature etching process, exposed portions of the protective layer are removed, exposing a well-defined, topographically patterned substrate. In addition, an apparatus for undergoing a feature etching process is disclosed. The apparatus comprises a substrate, an imprintable layer selected to undergo an imprinting process, and a protective layer positioned between the substrate and the imprintable layer. The protective layer may be selected to provide additional protection to selected portions of the substrate and to prevent non-planar byproducts of the feature etching process from transferring to the selected portions.
    • 本发明的方法用于深刻蚀表面上的特征。 在一个实施例中,该方法包括提供具有被选择用于经历特征蚀刻工艺的表面的衬底,并用保护层和可压印层涂覆衬底表面。 然后将经涂覆的基底进行特征压印和蚀刻工艺。 在特征蚀刻工艺之后,去除保护层的暴露部分,暴露出明确定义的,地形图案化的衬底。 另外,公开了一种经历特征蚀刻工艺的装置。 该装置包括基板,可压印层,其被选择进行压印处理,以及位于基板和可压印层之间的保护层。 可以选择保护层以为衬底的选定部分提供额外的保护,并且防止特征蚀刻工艺的非平面副产物转移到所选择的部分。
    • 4. 发明授权
    • Self-assembly structures used for fabricating patterned magnetic media
    • 用于制造图案化磁性介质的自组装结构
    • US08441758B2
    • 2013-05-14
    • US13108515
    • 2011-05-16
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • G11B5/82
    • G11B5/855B82Y10/00G11B5/743G11B5/82G11B5/865
    • Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
    • 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法,执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到(即蚀刻)数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域,并将第二数据模式传送到数据区域。 因此,通过光刻工艺定义伺服图案,同时通过光刻工艺和自组装的组合来定义数据图案。
    • 7. 发明授权
    • Method for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks, master mold made by the method, and disk imprinted by the master mold
    • 用于制造具有高比特宽比的用于纳米压印图案化磁记录盘的母模的方法,通过该方法制造的母模和由母模印制的盘
    • US08003236B2
    • 2011-08-23
    • US12141060
    • 2008-06-17
    • Thomas R. AlbrechtBarry Cushing StipeHenry Hung Yang
    • Thomas R. AlbrechtBarry Cushing StipeHenry Hung Yang
    • G11B5/64
    • G11B5/855
    • A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.
    • 用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。 柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对图案,其中, 线路被分组成环形区域或带。 可以重复侧壁光刻处理,导致每次重复该过程的行数加倍。 常规光刻用于在径向对平行线上形成同心环。 在蚀刻和抗蚀剂去除之后,主模具有布置成圆形环的柱,其中环被分组成环形带。 主模可以用于纳米压印盘,导致具有大于1的BAR的盘,其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。
    • 8. 发明授权
    • Self-assembly structures used for fabricating patterned magnetic media
    • 用于制造图案化磁性介质的自组装结构
    • US07969686B2
    • 2011-06-28
    • US11964680
    • 2007-12-26
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • G11B5/82
    • G11B5/855B82Y10/00G11B5/743G11B5/82G11B5/865
    • Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
    • 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法,执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到(即蚀刻)数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域,并将第二数据模式传送到数据区域。 因此,通过光刻工艺定义伺服图案,同时通过光刻工艺和自组装的组合来定义数据图案。
    • 10. 发明申请
    • METHOD FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS, MASTER MOLD MADE BY THE METHOD, AND DISK IMPRINTED BY THE MASTER MOLD
    • 用于制造具有高比特率比例的主模具用于纳米图案磁记录盘的方法,通过该方法制造的主模具和主模具所示的盘
    • US20090310256A1
    • 2009-12-17
    • US12141060
    • 2008-06-17
    • Thomas R. AlbrechtBarry Cushing StipeHenry Hung Yang
    • Thomas R. AlbrechtBarry Cushing StipeHenry Hung Yang
    • G11B5/82B44C1/22B28B1/00
    • G11B5/855
    • A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.
    • 用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。 柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对的图案,其中, 线路被分组成环形区域或带。 可以重复侧壁光刻处理,导致每次重复该过程的行数加倍。 常规光刻用于在径向对平行线上形成同心环。 在蚀刻和抗蚀剂去除之后,主模具有布置成圆形环的柱,其中环被分组成环形带。 主模可以用于纳米压印盘,导致具有大于1的BAR的盘,其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。