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    • 8. 发明授权
    • Self-aligned split-gate nonvolatile memory structure and a method of making the same
    • 自对准分离门非易失性存储器结构及其制造方法
    • US07492000B2
    • 2009-02-17
    • US11444369
    • 2006-06-01
    • Hee Seog JeonSeung Beom YoonYong Tae Kim
    • Hee Seog JeonSeung Beom YoonYong Tae Kim
    • H01L29/94
    • H01L27/11521H01L27/115H01L29/42324H01L29/7885
    • Provided are non-volatile split-gate memory cells having self-aligned floating gate and the control gate structures and exemplary processes for manufacturing such memory cells that provide improved dimensional control over the relative lengths and separation of the split-gate elements. Each control gate includes a projecting portion that extends over at least a portion of the associated floating gate with the size of the projecting portion being determined by a first sacrificial polysilicon spacer that, when removed, produces a concave region in an intermediate insulating structure. The control gate is then formed as a polysilicon spacer adjacent the intermediate insulating structure, the portion of the spacer extending into the concave region determining the dimension and spacing of the projecting portion and the thickness of the interpoly oxide (IPO) separating the upper portions of the split-gate electrodes thereby providing improved performance and manufacturability.
    • 提供了具有自对准浮动栅极的非易失性分裂栅极存储器单元以及用于制造这样的存储单元的控制栅极结构和示例性工艺,其提供了分离栅极元件的相对长度和间隔的改进的尺寸控制。 每个控制门包括突出部分,该突出部分在相关联的浮动栅极的至少一部分上延伸,突出部分的尺寸由第一牺牲多晶硅间隔物确定,当被去除时,其在中间绝缘结构中产生凹入区域。 然后,控制栅极形成为与中间绝缘结构相邻的多晶硅间隔物,间隔物的延伸到凹区中的部分确定突出部分的尺寸和间距以及分离上部的多晶硅氧化物(IPO)的厚度 因此分裂栅电极提供了改进的性能和可制造性。