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    • 4. 发明申请
    • Process applied to semiconductor
    • 工艺应用于半导体
    • US20060137420A1
    • 2006-06-29
    • US11319110
    • 2005-12-27
    • Ru- Sheng LiuHan-Lung TsaiCheng-Hsu Hsiao
    • Ru- Sheng LiuHan-Lung TsaiCheng-Hsu Hsiao
    • B21C23/00
    • H01L21/6835H01L21/67132H01L21/6836H01L21/78H01L2221/68327H01L2221/6834H01L2224/32145H01L2924/3511
    • A process applied to grinding, dicing, and/or stacking semiconductors is disclosed. One feature of the process is that after transparent material is stuck on its active surface, a semiconductor is ground from another surface thereof to become thinner, then the semiconductor is diced, by taking advantage of transparency of the transparent material, from its active surface, to obtain at least one smaller semiconductor unit such as die/dice or chip(s). Another feature is that the transparent material remains sticking to the active surface of the die by an adhesion layer until the die is attached to a carrier or another die, and then the transparent material and the adhesion layer are removed by taking advantage of a function of the adhesion layer: receiving a ray to lose adhesion between it and the active surface. Preferably the ray reaches the adhesion layer via the transparent material stuck on the active surface of the die.
    • 公开了一种应用于研磨,切割和/或堆叠半导体的方法。 该方法的一个特征是,在透明材料粘附在其有效表面上之后,从其另一表面研磨半导体以变薄,然后通过利用透明材料的透明度从其活性表面切割半导体, 以获得至少一个较小的半导体单元,例如芯片/芯片或芯片。 另一个特征是透明材料通过粘合层保持粘附到模具的活性表面,直到模具附接到载体或另一个模具,然后通过利用透明材料和粘合层的功能去除透明材料和粘附层 粘合层:接收光线以失去其与活性表面之间的粘附。 优选地,光线通过粘附在模具的有效表面上的透明材料到达粘附层。