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1. 发明授权

US06328903B1 Surface-micromachined chain for use in microelectromechanical structures 有权
标题翻译：用于微机电结构的表面微加工链
公开(公告)号：US06328903B1
公开(公告)日：2001-12-11
申请号：US09520643
申请日：2000-03-07
申请人： George E. Vernon, Sr.
发明人： George E. Vernon, Sr.
IPC分类号： B81B500
CPC分类号： H02N1/008 , B81B5/00 , F16H7/06
摘要： A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.
摘要翻译：公开了一种包含这种链的表面微加工链和微机电（MEM）结构。表面微加工链可以通过沉积和图案化形成链的材料（例如多晶硅）和牺牲材料（例如二氧化硅或硅酸盐）的多个交替层而在衬底（例如硅衬底）上制成就位玻璃）。然后通过蚀刻去除牺牲材料以释放链条用于移动。该链具有用于形成各种类型的MEM装置的应用，其包括连接以旋转驱动链轮的微型发动机（例如静电马达），其中表面微加工链条连接在驱动链轮和一个或多个从动链轮之间。

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