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    • 7. 发明授权
    • Method of tuning thin film resonator filters by removing or adding piezoelectric material
    • 通过去除或添加压电材料来调整薄膜谐振滤波器的方法
    • US06437667B1
    • 2002-08-20
    • US09497880
    • 2000-02-04
    • Bradley Paul BarberLinus Albert FetterGeorge E. RittenhouseMichael George Zierdt
    • Bradley Paul BarberLinus Albert FetterGeorge E. RittenhouseMichael George Zierdt
    • H03H954
    • H03H9/564H03H3/04H03H9/568H03H2003/0435
    • The present invention provides a method for tuning a thin film resonator (TFR) filter comprising a plurality of TFR components formed on a substrate. Each of the TFR components has a set of resonant frequencies that depend on material parameters and construction. TFR bandpass filter response for example can be produced by shifting the set of resonant frequencies in at least one of the series branch TFR components so as to establish the desired shape of the bandpass response and the desired performance of the filter. The shifting may be advantageously performed by removing piezoelectric material from the series branch TFR component, providing a TFR filter with bandwidth and attenuation advantages over that conventionally achieved by down-shifting resonant frequency sets of the shunt TFR components by adding metal material. Additionally, the above method can be used to produce a stopband TFR filter with a desired response by removing piezoelectric material from the shunt branch TFR component, to up-shift the shunt TFR components' set of resonant frequencies with respect to the series branch TFR components.
    • 本发明提供了一种用于调谐薄膜谐振器(TFR)滤波器的方法,该滤波器包括形成在基板上的多个TFR分量。 每个TFR组件具有取决于材料参数和结构的一组谐振频率。 TFR带通滤波器响应例如可以通过在串联分支TFR分量中的至少一个中移位谐振频率的集合来产生,以便建立期望的带通响应形状和滤波器的期望性能。 可以有利地通过从串联分支TFR组件去除压电材料来实现移位,从而提供比通过添加金属材料降低分流TFR分量的谐振频率组通常实现的带宽和衰减优点的TFR滤波器。 另外,上述方法可以用于通过从分流分支TFR分量去除压电材料来产生具有期望响应的阻带TFR滤波器,以使相对于串联分支TFR分量的分流TFR分量的谐振频率集合上移 。
    • 9. 发明授权
    • Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance
    • 薄膜谐振滤波器具有至少一个具有不同谐振频率集合或电极电容的分量
    • US06377136B1
    • 2002-04-23
    • US09497860
    • 2000-02-04
    • George E. RittenhouseMichael George Zierdt
    • George E. RittenhouseMichael George Zierdt
    • H03H954
    • H03H9/605H03H3/04H03H2003/0428
    • A thin film resonator (TFR) filter circuit including a plurality of TFRs connected in a series-shunt or shunt-series arrangement between input and output ports of the filter. A method is provided that allows for the shifting of resonant frequency sets in each TFR in respective series arms and shunt legs of the TFR filter circuit, as opposed to a conventional concatenating approach using a plurality of chained-up building blocks of TFRs, where resonant frequency sets in each of the series arms are equal, and where resonant frequency sets in each of the shunt legs are equal. Additionally, each TFR in the filter may have a unique parallel plate electrode capacitance, as opposed to the conventional concatenating approach where all series arm electrodes in the root filter design have equal capacitance, and where all shunt leg electrodes have equal capacitance. By shifting the resonant frequency sets and/or varying the electrode capacitance of the TFRs, a wider passband width may be achieved for a given return loss performance, as compared to conventionally designed filter circuits.
    • 一种薄膜谐振器(TFR)滤波器电路,包括以过滤器的输入和输出端口之间的串联分流或分流串联布置连接的多个TFR。 提供了一种方法,其允许在TFR滤波器电路的各个串联臂和分流支路中的每个TFR中的谐振频率集合的移位,这与使用多个TFR的链接构建块的常规级联方法相反,其中谐振 每个串联臂中的频率集合相等,并且在每个分流支路中的谐振频率设置相等。 另外,与传统的级联方法相反,滤波器中的每个TFR可以具有独特的平行平板电极电容,其中根滤波器设计中的所有串联臂电极具有相等的电容,并且其中所有分流脚电极具有相等的电容。 通过移动谐振频率集和/或改变TFR的电极电容,与常规设计的滤波器电路相比,可以实现给定的回波损耗性能的更宽的通带宽度。