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1. 发明授权

US08691695B2 CMP compositions and methods for suppressing polysilicon removal rates 有权
标题翻译： CMP组合物和抑制多晶硅去除速率的方法
公开(公告)号：US08691695B2
公开(公告)日：2014-04-08
申请号：US13379911
申请日：2010-06-18
申请人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
发明人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
IPC分类号： H01L21/302 , B44C1/22 , H01L21/3105 , H01L21/321 , C09K3/14 , C09G1/02
CPC分类号： H01L21/31053 , C09G1/02 , C09K3/1463 , H01L21/3212
摘要： The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing a silicon nitride-containing substrate while suppressing polysilicon removal from the substrate. The composition comprises abrasive particles suspended in an acidic aqueous carrier containing a surfactant comprising an alkyne-diol, an alkyne diol ethoxylate, or a combination thereof. Methods of polishing a semiconductor substrate therewith are also disclosed.
摘要翻译：本发明提供了一种适于抛光含氮化硅的衬底同时抑制从衬底去除多晶硅的化学机械抛光（CMP）组合物。该组合物包含悬浮在酸性含水载体中的磨料颗粒，该载体含有包含炔二醇，炔二醇乙氧基化物或其组合的表面活性剂。还公开了对其半导体衬底进行抛光的方法。

2. 发明申请

US20120094489A1 CMP COMPOSITIONS AND METHODS FOR SUPPRESSING POLYSILICON REMOVAL RATES 有权
标题翻译：用于抑制多晶硅去除速率的CMP组合物和方法
公开(公告)号：US20120094489A1
公开(公告)日：2012-04-19
申请号：US13379911
申请日：2010-06-18
申请人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
发明人： Kevin Moeggenborg , William Ward , Ming-Shih Tsai , Francesco De Rege Thesauro
IPC分类号： H01L21/306 , C09K3/14
CPC分类号： H01L21/31053 , C09G1/02 , C09K3/1463 , H01L21/3212
摘要： The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing a silicon nitride-containing substrate while suppressing polysilicon removal from the substrate. The composition comprises abrasive particles suspended in an acidic aqueous carrier containing a surfactant comprising an alkyne-diol, an alkyne diol ethoxylate, or a combination thereof. Methods of polishing a semiconductor substrate therewith are also disclosed.
摘要翻译：本发明提供了一种适于抛光含氮化硅的衬底同时抑制从衬底去除多晶硅的化学机械抛光（CMP）组合物。该组合物包含悬浮在酸性含水载体中的磨料颗粒，该载体含有包含炔二醇，炔二醇乙氧基化物或其组合的表面活性剂。还公开了对其半导体衬底进行抛光的方法。

3. 发明授权

US07776230B2 CMP system utilizing halogen adduct 有权
标题翻译：使用卤素加合物的CMP系统
公开(公告)号：US07776230B2
公开(公告)日：2010-08-17
申请号：US11673518
申请日：2007-02-09
申请人： Steven Grumbine , Francesco De Rege Thesauro
发明人： Steven Grumbine , Francesco De Rege Thesauro
IPC分类号： C03C15/00
CPC分类号： H01L21/31053 , C09G1/02 , H01L21/3212
摘要： The invention provides a chemical-mechanical polishing system for polishing a substrate comprising (a) a polishing component selected from an abrasive, a polishing pad, or both an abrasive and a polishing pad, (b) an aqueous carrier, and (c) the halogen adduct resulting from the reaction of (1) an oxidizing agent selected from the group consisting of iodine, bromine, and a combination thereof, and (2) a carbon acid having a pKa of about 3 to about 14, wherein the halogen adduct is present in a concentration of about 0.01 mM or more in the aqueous carrier. The invention also provides a method of polishing a substrate comprising (i) providing the aforementioned chemical-mechanical polishing system, (ii) contacting the substrate with the polishing system, and (iii) abrading at least a portion of the surface of the substrate with the polishing system to polish the substrate.
摘要翻译：本发明提供了一种用于抛光衬底的化学机械抛光系统，其包括（a）选自研磨剂，抛光垫或研磨剂和抛光垫两者的抛光组分，（b）水性载体，和（c）由（1）选自碘，溴及其组合的氧化剂的反应产生的卤素加合物，和（2）pKa为约3至约14的碳酸，其中卤素加合物为在水性载体中以约0.01mM或更高的浓度存在。本发明还提供了一种抛光衬底的方法，其包括（i）提供上述化学机械抛光系统，（ii）使衬底与抛光系统接触，和（iii）研磨衬底表面的至少一部分，抛光系统抛光底物。

4. 发明授权

US07456107B2 Compositions and methods for CMP of low-k-dielectric materials 有权
标题翻译：低k电介质材料CMP的组成和方法
公开(公告)号：US07456107B2
公开(公告)日：2008-11-25
申请号：US11595536
申请日：2006-11-09
申请人： Jason Keleher , Daniel Woodland , Francesco De Rege Thesauro , Robert Medsker , Jason Aggio
发明人： Jason Keleher , Daniel Woodland , Francesco De Rege Thesauro , Robert Medsker , Jason Aggio
IPC分类号： H01L21/302
CPC分类号： C09K3/1463 , C09G1/02 , H01L21/31053
摘要： The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing low-k dielectric materials. The composition comprises a particulate abrasive material, at least one silicone-free nonionic surfactant comprising a hydrophilic portion and a lipophilic portion, at least one silicone-containing nonionic surfactant comprising a hydrophilic portion and a lipophilic portion, and an aqueous carrier therefor. A CMP method for polishing a low-k dielectric surface utilizing the composition is also disclosed.
摘要翻译：本发明提供适用于抛光低k电介质材料的化学机械抛光（CMP）组合物。所述组合物包含颗粒磨料，至少一种含有亲水部分和亲油部分的无硅氧烷非离子表面活性剂，至少一种含有亲水部分和亲油部分的含硅氧烷的非离子表面活性剂及其水性载体。还公开了利用该组合物来研磨低k电介质表面的CMP方法。

5. 发明申请

US20080203059A1 DILUTABLE CMP COMPOSITION CONTAINING A SURFACTANT 审中-公开
标题翻译：包含表面活性剂的可稀释的CMP组合物
公开(公告)号：US20080203059A1
公开(公告)日：2008-08-28
申请号：US11679273
申请日：2007-02-27
申请人： Francesco De Rege Thesauro , Jason Keleher
发明人： Francesco De Rege Thesauro , Jason Keleher
IPC分类号： B44C1/22
CPC分类号： H01L21/3212 , C09G1/02 , C09K3/1463 , H01L21/31053
摘要： The inventive polishing composition comprises an abrasive, an aqueous medium, a surfactant in an amount above its critical micelle concentration, and a hydrophobic surface active compound. The invention also provides a method of using a polishing composition.
摘要翻译：本发明抛光组合物包含研磨剂，水性介质，高于其临界胶束浓度的表面活性剂和疏水表面活性化合物。本发明还提供了使用抛光组合物的方法。

6. 发明申请

US20060076317A1 CMP composition with a polymer additive for polishing noble metals 有权
公开(公告)号：US20060076317A1
公开(公告)日：2006-04-13
申请号：US10963108
申请日：2004-10-12
申请人： Francesco De Rege Thesauro , Benjamin Bayer
发明人： Francesco De Rege Thesauro , Benjamin Bayer
IPC分类号： C03C15/00 , H01L21/302 , B44C1/22
CPC分类号： C09G1/02 , H01L21/3212 , H01L28/65
摘要： The invention provides a method of polishing a substrate comprising contacting a substrate comprising a noble metal on a surface of the substrate with a chemical-mechanical polishing system comprising (a) a polishing component selected from the group consisting of an abrasive, a polishing pad, and a combination thereof, (b) an oxidizing agent, (c) an ethylene-oxide containing polymer, and (d) a liquid carrier, and abrading at least a portion of the noble metal with the chemical-mechanical polishing system to polish the substrate.

7. 发明申请

US20120280170A1 COMPOSITIONS FOR POLISHING SILICON-CONTAINING SUBSTRATES 有权
标题翻译：用于抛光含硅基材的组合物
公开(公告)号：US20120280170A1
公开(公告)日：2012-11-08
申请号：US13554829
申请日：2012-07-20
申请人： Francesco DE REGE THESAURO , Zhan CHEN
发明人： Francesco DE REGE THESAURO , Zhan CHEN
IPC分类号： C09K13/00
CPC分类号： C09K3/1463 , B24B37/044 , C09G1/02 , H01L21/31053 , H01L21/3212
摘要： The invention provides chemical-mechanical polishing (CMP) compositions and methods for polishing a silicon-containing substrate. A method of the invention comprises the steps of contacting a silicon-containing substrate with a polishing pad and an aqueous CMP composition, and causing relative motion between the polishing pad and the substrate while maintaining a portion of the CMP composition in contact with the surface of the substrate to abrade at least a portion of the substrate. The CMP composition comprises a ceria abrasive, a polishing additive bearing a functional group with a pKa of about 4 to about 9, a nonionic surfactant with an hydrophilic portion and a lipophilic portion wherein the hydrophilic portion has a number average molecular weight of about 500 g/mol or higher, and an aqueous carrier, wherein the pH of the composition is 7 or less. The method reduces defects on the wafers, particularly local areas of high removal. The method is also useful for polishing dielectric silicon-containing substrates at a high rate relative to semiconductor silicon-containing substrates.
摘要翻译：本发明提供用于抛光含硅基材的化学机械抛光（CMP）组合物和方法。本发明的方法包括以下步骤：使含硅衬底与抛光垫和水性CMP组合物接触，并且在保持CMP组合物的一部分与表面接触的同时引起抛光垫和衬底之间的相对运动所述衬底磨损所述衬底的至少一部分。 CMP组合物包括二氧化铈研磨剂，具有pKa约4至约9的官能团的抛光添加剂，具有亲水部分和亲油部分的非离子表面活性剂，其中亲水部分的数均分子量为约500g / mol以上，和水性载体，其中组合物的pH为7以下。该方法减少了晶片上的缺陷，特别是高去除的局部区域。该方法对于相对于含半导体硅的衬底以高速率抛光介电含硅衬底也是有用的。

8. 发明申请

US20100276392A1 CMP SYSTEM UTILIZING HALOGEN ADDUCT 审中-公开
标题翻译： CMP系统利用卤素添加剂
公开(公告)号：US20100276392A1
公开(公告)日：2010-11-04
申请号：US12838813
申请日：2010-07-19
申请人： Steven GRUMBINE , Francesco DE REGE THESAURO
发明人： Steven GRUMBINE , Francesco DE REGE THESAURO
IPC分类号： C23F1/18
CPC分类号： H01L21/31053 , C09G1/02 , H01L21/3212
摘要： The invention provides a method of polishing a substrate comprising (i) providing a chemical-mechanical polishing system comprising (a) a polishing component selected from an abrasive, a polishing pad, or both an abrasive and a polishing pad, (b) an aqueous carrier, and (c) the halogen adduct resulting from the reaction of (1) an oxidizing agent selected from the group consisting of iodine, bromine, and a combination thereof, and (2) a carbon acid having a pKa of about 3 to about 14, wherein the halogen adduct is present in a concentration of about 0.001 mM or more in the aqueous carrier, (ii) contacting the substrate with the polishing system, and (iii) abrading at least a portion of the surface of the substrate with the polishing system to polish the substrate.
摘要翻译：本发明提供一种抛光衬底的方法，其包括（i）提供化学机械抛光系统，其包括（a）选自研磨剂，抛光垫或研磨剂和抛光垫两者的抛光组分，（b）水性载体，和（c）由（1）选自碘，溴及其组合的氧化剂的反应产生的卤素加合物，和（2）pKa约3至约 14，其中所述卤素加合物在所述水性载体中以约0.001mM或更高的浓度存在，（ii）使所述基底与所述抛光系统接触，和（iii）用所述基底的至少一部分研磨所述基底抛光系统抛光底物。

9. 发明申请

US20070181535A1 COMPOSITIONS AND METHODS FOR CMP OF SEMICONDUCTOR MATERIALS 有权
标题翻译：用于半导体材料的CMP的组合物和方法
公开(公告)号：US20070181535A1
公开(公告)日：2007-08-09
申请号：US11673399
申请日：2007-02-09
申请人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
发明人： Francesco De Rege Thesauro , Steven Grumbine , Phillip Carter , Shoutian Li , Jian Zhang , David Schroeder , Ming-Shih Tsai
IPC分类号： H01L21/461 , C09K13/00 , C03C15/00 , B44C1/22 , H01L21/302
CPC分类号： C09G1/02 , H01L21/3212
摘要： The invention provides a composition for chemical-mechanical polishing, The composition comprises an abrasive, a first metal rate polishing modifier agent, a second metal rate polishing modifier agent, and a liquid carrier. In one embodiment, the first metal rate polishing modifier agent has a standard reduction potential less than 0.34 V relative to a standard hydrogen electrode, and the second metal rate polishing modifier agent has a standard reduction potential greater than 0.34 V relative to a standard hydrogen electrode. In other embodiments, the first and second metal rate polishing modifier agents are different oxidizing agents.
摘要翻译：本发明提供了一种用于化学机械抛光的组合物。该组合物包括研磨剂，第一金属速率抛光改性剂，第二金属速率抛光改性剂和液体载体。在一个实施方案中，第一金属速率抛光改性剂相对于标准氢电极具有小于0.34V的标准还原电位，并且第二金属速率抛光改性剂相对于标准氢电极具有大于0.34V的标准还原电位。在其它实施方案中，第一和第二金属速率抛光改性剂是不同的氧化剂。

10. 发明授权

US07161247B2 Polishing composition for noble metals 有权
标题翻译：贵金属抛光组合物
公开(公告)号：US07161247B2
公开(公告)日：2007-01-09
申请号：US10901420
申请日：2004-07-28
申请人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher C. Thompson , Benjamin P. Bayer
发明人： Francesco De Rege Thesauro , Vlasta Brusic , Christopher C. Thompson , Benjamin P. Bayer
IPC分类号： H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： C09G1/02 , C23F3/00 , H01L21/3212 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising a noble metal, the polishing composition comprising (a) an oxidizing agent that oxidizes a noble metal, (b) an anion selected from the group consisting of sulfate, borate, nitrate, and phosphate, and (c) a liquid carrier. The invention further provides a polishing composition and a method of chemically-mechanically polishing a substrate comprising ruthenium, the polishing composition comprising (a) an oxidizing agent that oxidizes ruthenium above the +4 oxidation state, (b) a polishing additive selected from the group consisting of metal sequestering polymers, metal chelators, organic thiols, compounds that reduce ruthenium tetraoxide, lactones, and α-hydroxycarbonyl compounds.
摘要翻译：本发明提供一种抛光组合物和一种化学机械抛光包含贵金属的基材的方法，所述抛光组合物包含（a）氧化贵金属的氧化剂，（b）选自硫酸盐，硼酸盐，硝酸盐和磷酸盐，和（c）液体载体。本发明还提供一种抛光组合物和一种化学机械抛光包含钌的基材的方法，该抛光组合物包含（a）氧化高于+4氧化态的钌的氧化剂，（b）选自下组的抛光添加剂：由金属螯合聚合物，金属螯合剂，有机硫醇，还原四氧化钌的化合物，内酯和α-羟基羰基化合物组成。

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