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1. 发明授权

US06658922B2 Optical equipment assemblies and techniques indexed to a common spindle 失效
公开(公告)号：US06658922B2
公开(公告)日：2003-12-09
申请号：US09996552
申请日：2001-11-27
申请人： Joseph Leigh , David S. Kuo , Li-Ping Wang , Nobuo Kurataka
发明人： Joseph Leigh , David S. Kuo , Li-Ping Wang , Nobuo Kurataka
IPC分类号： G01B528
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/012 , G11B2005/001 , Y10S977/872
摘要： A method and apparatus for scanning a media is described. More particularly, polarization detector and an atomic force microscope are coupled to a common platform indexed to a spindle. Optionally, an optical microscope may be coupled to the common platform. The polarization detector is used to detect a magnetic image, such as at least a portion of a servo pattern, of the media, and the atomic force microscope, which may be aligned using the magnetic image, is used with a magnetic microscopy module to scan the media. Accordingly, magnetic imagery may be achieved with indexing to a single spindle for positional consistency as between equipment. Moreover, the polarization detector may further be configured to detect scattered light for providing topographic imagery of the media.

2. 发明授权

US06898037B2 Optical equipment assemblies and techniques 失效
标题翻译：光学设备组件和技术
公开(公告)号：US06898037B2
公开(公告)日：2005-05-24
申请号：US09996551
申请日：2001-11-27
申请人： Joseph Leigh , David S. Kuo
发明人： Joseph Leigh , David S. Kuo
IPC分类号： G01Q60/00 , G11B5/60 , G11B5/02
CPC分类号： G11B5/6005 , Y10S977/868
摘要： A method and apparatus for detecting a topographic feature on a media is described. More particularly, a light scatter detector is coupled to an atomic force microscope. The detector is used detect scattered optical energy reflected from the surface of the media to identify the topographic feature. The atomic force microscope may then be positioned in response to the topographic feature identified.
摘要翻译：描述了用于检测介质上的地形特征的方法和装置。更具体地，光散射检测器耦合到原子力显微镜。检测器用于检测从介质表面反射的散射光能，以识别地形特征。然后可以响应于所标识的地形特征来定位原子力显微镜。

3. 发明授权

US09330885B2 Method of stack patterning using a ion etching 有权
标题翻译：使用离子蚀刻的叠层图案化方法
公开(公告)号：US09330885B2
公开(公告)日：2016-05-03
申请号：US13174132
申请日：2011-06-30
申请人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Li-Ping Wang
发明人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Li-Ping Wang
IPC分类号： B44C1/22 , C23F1/00 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461 , H01J37/30 , H01J37/305
CPC分类号： H01J37/30 , H01J37/3053 , H01J37/3056 , H01J2237/2007 , H01J2237/31749
摘要： The embodiments disclose a method of stack patterning, including loading a stack into a stationary stack stage, rotating one or more ion beam grid assemblies substantially concentrically aligned with the stationary stack stage to etch the stack and controlling the operation of the one or more ion beam grid assemblies to achieve substantial axial uniformity of the etched stack.
摘要翻译：实施例公开了一种堆叠图案化的方法，包括将堆叠装载到固定堆叠台中，使基本上与固定堆叠台同心对准的一个或多个离子束栅格组件旋转，以蚀刻堆叠并控制一个或多个离子束栅格组件以实现蚀刻堆叠的显着的轴向均匀性。

4. 发明授权

US08900655B2 Method for fabricating patterned magnetic recording device 有权
标题翻译：图案化磁记录装置的制造方法
公开(公告)号：US08900655B2
公开(公告)日：2014-12-02
申请号：US11542129
申请日：2006-10-04
申请人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
发明人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
IPC分类号： B05D5/12 , G11B5/73 , G11B5/65 , G11B5/855
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/855
摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.
摘要翻译：制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。

5. 发明授权

US08792201B2 Method of disc alignment using printed alignment marks 有权
标题翻译：使用印刷对准标记的盘对准方法
公开(公告)号：US08792201B2
公开(公告)日：2014-07-29
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
IPC分类号： G11B21/02 , G11B5/82 , B82Y10/00 , G11B5/855 , G11B5/74 , G11B25/04
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译：过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案碟盘将与盘片驱动主轴的中心同心对齐。当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

6. 发明申请

US20110038082A1 COMBINED CMP AND ETCH PLANARIZATION 审中-公开
标题翻译：组合CMP和ETCH平面化
公开(公告)号：US20110038082A1
公开(公告)日：2011-02-17
申请号：US12540185
申请日：2009-08-12
申请人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
发明人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
IPC分类号： G11B5/74 , B05D5/12
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： A magnetic device having a magnetic feature, the magnetic feature including magnetic portions, a stop layer portion on each magnetic portion, and a region of non-magnetic material adjacent to the magnetic portions and the stop layer portions, where the stop layer portions define planar upper boundaries for the magnetic portions and an endpoint in planarization of the magnetic feature.
摘要翻译：具有磁性特征的磁性装置，磁性部分包括磁性部分，每个磁性部分上的停止层部分和与磁性部分和止挡层部分相邻的非磁性材料区域，其中阻挡层部分限定平面磁性部分的上边界和磁性特征的平坦化终点。

7. 发明申请

US20110027407A1 PROFILE CONTROL UTILIZING A RECESSED IMPRINT TEMPLATE 审中-公开
标题翻译：配置文件控制使用一个被压印的模版
公开(公告)号：US20110027407A1
公开(公告)日：2011-02-03
申请号：US12510894
申请日：2009-07-28
申请人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
发明人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
IPC分类号： B29C59/00 , B44C1/22 , C23F1/00 , G03F7/20
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L2251/105
摘要： An imprint template is provided with a shallower field bordering the patterned region. The shallower field can be formed with additional lithography/etch steps after (or before) the formation of the features in the patterned region. The template is used to establish a thin film pattern with a field thickness that is shallower than the pattern. A shallower field bordering the patterned region alleviates sidewall re-deposition during ion mill. In a planarization/etch-back process, a thinner field helps to achieve a flat top surface by compensating for the thickness variation caused by different filling ratios. Fabrication of the recessed field template comprises a multi-step patterning process. The initial patterns are formed using a convention fabrication process. A second patterning step is used to reduce the height of the field region, which can be applied by coating the “half-finished” template with a suitable resist pattern and patterning the resist using a second lithography step that is aligned to the original pattern. Template material in the field region is then etched with the resist as a mask, forming a template with a recessed field region after the remaining resist is removed. It should be appreciated that the order of these etch steps can be reversed to obtain the same result.
摘要翻译：压印模板设置有与图案化区域相邻的较浅的场。可以在（或之前）在图案化区域中形成特征之后的附加光刻/蚀刻步骤形成较浅的场。该模板用于建立具有比图案浅的场厚的薄膜图案。与图案区域相邻的较浅的场减轻离子磨中的侧壁再沉积。在平坦化/回蚀刻工艺中，通过补偿由不同填充率引起的厚度变化，较薄的场有助于实现平坦的顶表面。凹陷场模板的制造包括多步图案化工艺。使用惯例制作工艺形成初始图案。使用第二图案化步骤来减小场区域的高度，其可以通过用合适的抗蚀剂图案涂覆“半成品”模板并且使用与原始图案对准的第二光刻步骤来图案化抗蚀剂来施加。然后用抗蚀剂作为掩模蚀刻场区域中的模板材料，在除去剩余的抗蚀剂之后，形成具有凹陷场区域的模板。应当理解，可以颠倒这些蚀刻步骤的顺序以获得相同的结果。

8. 发明申请

US20080024772A1 Particle removal tool with integrated defect detection/analysis capability 审中-公开
标题翻译：具有集成缺陷检测/分析能力的除粒工具
公开(公告)号：US20080024772A1
公开(公告)日：2008-01-31
申请号：US11492798
申请日：2006-07-26
申请人： Li-Ping Wang , David S. Kuo , Sophia A. Fujioka , Jianmin Wang
发明人： Li-Ping Wang , David S. Kuo , Sophia A. Fujioka , Jianmin Wang
IPC分类号： G01N21/00
CPC分类号： G01N21/9506 , G01N21/4738
摘要： An integrated unit comprising a particle detection tool and a particle removal tool combined as one merged tool comprising a disc mounting mechanism having a mount for mounting the disc for both particle detection and particle removal, wherein the particle detection tool is adapted to distinguish between a fixed defect in the disc and a particle on the disc is disclosed herein. Also, the methods of manufacturing the integrated unit and using the integrated unit for detect detection and analysis are disclosed herein.
摘要翻译：一种集成单元，包括粒子检测工具和作为一个合并工具组合的颗粒去除工具，其包括盘安装机构，所述盘安装机构具有用于安装盘的用于颗粒检测和颗粒去除的安装件，其中所述粒子检测工具适于区分固定本文公开了盘中的缺陷和盘上的颗粒。此外，本文公开了制造集成单元的方法和使用用于检测检测和分析的集成单元。

9. 发明授权

US06663938B1 Media contact zone with bell-shaped texturing features 失效
标题翻译：具有钟形纹理特征的介质接触区
公开(公告)号：US06663938B1
公开(公告)日：2003-12-16
申请号：US09210018
申请日：1998-12-11
申请人： Wei H. Yao , Yuh-Jen Cheng , Li-Ping Wang , David S. Kuo , Chiao-Ping Ku , Bruno Marchon
发明人： Wei H. Yao , Yuh-Jen Cheng , Li-Ping Wang , David S. Kuo , Chiao-Ping Ku , Bruno Marchon
IPC分类号： G11B582
CPC分类号： G11B5/82 , G11B5/6005 , G11B23/0021 , Y10T428/24355
摘要： A magnetic data recording medium substrate has a contact zone and a data zone. The contact zone is textured by forming multiple texturing features, each having a bell-shaped profile resembling a Gaussian curve. The features preferably are formed by pulsed laser energy applied to a glass substrate, or to an aluminum nickel-phosphorous substrate coated with a glass layer. As compared to previous laser texturing approaches, the laser beam is less narrowly focused to provide a beam impingement area with a diameter of at least three microns, forming texturing features with diameters of at least three microns. The texturing features preferably are uniform in height and diameter, and may be symmetrical or have asymmetrical aspects, so long as bell-shaped profiles are present in the direction of travel of the recording medium, relative to transducing heads.
摘要翻译：磁数据记录介质基板具有接触区和数据区。通过形成多个纹理特征来形成接触区域，每个具有类似于高斯曲线的钟形轮廓。特征优选通过施加到玻璃基板的脉冲激光能量或涂覆有玻璃层的铝镍磷基板形成。与以前的激光纹理方法相比，激光束的聚焦较少，以提供直径至少为三微米的光束冲击区域，形成具有至少三微米直径的纹理特征。纹理特征优选地在高度和直径上是均匀的，并且可以是对称的或具有不对称的方面，只要钟形轮廓相对于换能头在记录介质的行进方向上存在。

10. 发明授权

US06473259B1 Disk head height control 有权
标题翻译：磁盘头高度控制
公开(公告)号：US06473259B1
公开(公告)日：2002-10-29
申请号：US09405832
申请日：1999-09-24
申请人： David S. Kuo , Wei H. Yao , Ramesh Sundaram , Huan Tang
发明人： David S. Kuo , Wei H. Yao , Ramesh Sundaram , Huan Tang
IPC分类号： G11B2102
CPC分类号： G11B21/21 , G11B5/60
摘要： A disk head fly height adjustment method includes positioning a disk head over a surface of a rotating data storage disk and dynamically altering a load point of the disk head by changing an electrical force applied to an active element mounted to a head-gimbal assembly. A data storage apparatus includes a head assembly having a data transfer head coupled to a gimbal and an active element coupling the head assembly and a suspension. The active element is configured to exert a force between the head assembly and the suspension in response to an electrical force applied to the active element. The active element can dynamically shift a load point of a disk head. Shifting the load point can alter the pitch of the disk head and, consequently, the fly height of the head.
摘要翻译：盘头飞行高度调节方法包括将盘头定位在旋转数据存储盘的表面上，并且通过改变施加到安装到头部万向节组件上的有源元件的电力来动态地改变盘头的负载点。数据存储装置包括头组件，其具有耦合到万向节的数据传送头和联接头组件和悬架的有源元件。有源元件构造成响应于施加到有源元件的电力而在头部组件和悬架之间施加力。有源元件可以动态地移动磁盘头的负载点。移动负载点可以改变磁头的间距，从而改变磁头的飞行高度。

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