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    • 5. 发明授权
    • Integrated circuit structure and method of fabrication
    • 集成电路结构及制作方法
    • US07271431B2
    • 2007-09-18
    • US10877441
    • 2004-06-25
    • Chuan-Yi LinShien-Yang WuYee-Chia Yeo
    • Chuan-Yi LinShien-Yang WuYee-Chia Yeo
    • H01L29/76
    • H01L21/823481H01L21/823475
    • According to the present invention, the integrated circuit includes isolation field regions on a semiconductor substrate. Gate dielectrics are formed on a surface of a substrate. Gate electrodes are formed on the gate dielectrics. A photo resist is formed covering the active regions. Dummy patterns are selectively etched. A dummy substrate is selectively etched. The photo resist is then removed. A pair of spacers is formed along opposite sidewalls of the gate electrode and the gate dielectric. The source and drain are formed on the surface of said substrate and on opposite sides of the gate. Silicide is formed on the gate electrode, source, and drain. A layer of inter-level dielectric is then formed. A contact opening and metal wiring are then formed.
    • 根据本发明,集成电路包括半导体衬底上的隔离场区域。 栅极电介质形成在衬底的表面上。 栅电极形成在栅极电介质上。 形成覆盖有源区的光致抗蚀剂。 虚拟图案被有选择地蚀刻。 选择性地蚀刻虚设衬底。 然后去除光刻胶。 在栅电极和栅极电介质的相对侧壁上形成一对间隔物。 源极和漏极形成在所述衬底的表面上和栅极的相对侧上。 在栅电极,源极和漏极上形成硅化物。 然后形成层间电介质层。 然后形成接触开口和金属布线。