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2. 发明授权

US5019479A Positive type radiation-sensitive resin composition comprising a photosensitizer and a novolak resin 失效
标题翻译：包含光敏剂和酚醛清漆树脂的正型辐射敏感性树脂组合物
公开(公告)号：US5019479A
公开(公告)日：1991-05-28
申请号：US373592
申请日：1989-06-30
申请人： Hiroshi Oka , Chozo Okuda , Yoshinori Yoshida , Toshihiko Takahashi , Yoichi Kamoshida , Takao Miura
发明人： Hiroshi Oka , Chozo Okuda , Yoshinori Yoshida , Toshihiko Takahashi , Yoichi Kamoshida , Takao Miura
IPC分类号： G03F7/023
CPC分类号： G03F7/0236
摘要： A positive type radiation-sensitive resin composition comprising an alkali-soluble novolac resin and a 1,2-quinonediazide compound, characterized in that said alkali-soluble novolac resin is a resin produced by condensing a carbonyl compound and a phenol mixture comprising 6 to 94 mole % of m-cresol and 94 to 6 mole % of at least one compound represented by the formula (I) other than m-cresol: ##STR1## wherein X is --CH.sub.3, --C.sub.2 H.sub.5, --C(CH.sub.3).sub.3, --CO.sub.2 CH.sub.3 or --CO.sub.2 C.sub.2 H.sub.5 ; n is an integer satisfying 3.gtoreq.m.gtoreq.1; and m is an integer satisfying 3.gtoreq.m.gtoreq.1, in which resin when the polystyrene-reduced molecular weight is determined by a gel permeation chromatography using a monodisperse polystyrene as the standard, maximum values a, b and c present, respectively, in the molecular weight ranges of 6,300 to 25,000, 2,500 to 6,000 and 150 to 900 in the molecular weight distribution curve obtained satisfy the following relationships: a/b=0-1.5 and c/b=1.4-2. Said positive type-radiation-sensitive resin composition is excellent in resolution, sensitivity, developability, thermal resistance and adhesion and hence is useful as a positive type resist for producing integrated circuits having a higher integration.
摘要翻译：一种阳离子型辐射敏感性树脂组合物，其包含碱溶性酚醛清漆树脂和1,2-醌二叠氮化合物，其特征在于，所述碱溶性酚醛清漆树脂是通过将羰基化合物和包含6至94的酚混合物（I）表示的至少一种由间甲酚表示的至少一种化合物：（I）其中X是-CH 3，-C 2 H 5，-C（CH 3） 3，-CO 2 CH 3或-CO 2 C 2 H 5; n是满足3> / = m> / = 1的整数; m为满足3≤m≥1的整数，当使用单分散聚苯乙烯作为标准的凝胶渗透色谱法测定聚苯乙烯缩小分子量时的树脂，存在最大值a，b和c，在分子量分布曲线中分子量范围为6300〜25000,2500〜6000和150〜900分别满足以下关系：a / b = 0-1.5，c / b = 1.4-2。所述正型辐射敏感性树脂组合物的分辨率，灵敏度，显影性，耐热性和粘附性优异，因此可用作制造具有较高一体化的集成电路的正型抗蚀剂。

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