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    • 5. 发明授权
    • Positive type radiation-sensitive resin composition comprising a
photosensitizer and a novolak resin
    • 包含光敏剂和酚醛清漆树脂的正型辐射敏感性树脂组合物
    • US5019479A
    • 1991-05-28
    • US373592
    • 1989-06-30
    • Hiroshi OkaChozo OkudaYoshinori YoshidaToshihiko TakahashiYoichi KamoshidaTakao Miura
    • Hiroshi OkaChozo OkudaYoshinori YoshidaToshihiko TakahashiYoichi KamoshidaTakao Miura
    • G03F7/023
    • G03F7/0236
    • A positive type radiation-sensitive resin composition comprising an alkali-soluble novolac resin and a 1,2-quinonediazide compound, characterized in that said alkali-soluble novolac resin is a resin produced by condensing a carbonyl compound and a phenol mixture comprising 6 to 94 mole % of m-cresol and 94 to 6 mole % of at least one compound represented by the formula (I) other than m-cresol: ##STR1## wherein X is --CH.sub.3, --C.sub.2 H.sub.5, --C(CH.sub.3).sub.3, --CO.sub.2 CH.sub.3 or --CO.sub.2 C.sub.2 H.sub.5 ; n is an integer satisfying 3.gtoreq.m.gtoreq.1; and m is an integer satisfying 3.gtoreq.m.gtoreq.1, in which resin when the polystyrene-reduced molecular weight is determined by a gel permeation chromatography using a monodisperse polystyrene as the standard, maximum values a, b and c present, respectively, in the molecular weight ranges of 6,300 to 25,000, 2,500 to 6,000 and 150 to 900 in the molecular weight distribution curve obtained satisfy the following relationships: a/b=0-1.5 and c/b=1.4-2. Said positive type-radiation-sensitive resin composition is excellent in resolution, sensitivity, developability, thermal resistance and adhesion and hence is useful as a positive type resist for producing integrated circuits having a higher integration.
    • 一种阳离子型辐射敏感性树脂组合物,其包含碱溶性酚醛清漆树脂和1,2-醌二叠氮化合物,其特征在于,所述碱溶性酚醛清漆树脂是通过将羰基化合物和包含6至94的酚混合物 (I)表示的至少一种由间甲酚表示的至少一种化合物:(I)其中X是-CH 3,-C 2 H 5,-C(CH 3) 3,-CO 2 CH 3或-CO 2 C 2 H 5; n是满足3> / = m> / = 1的整数; m为满足3≤m≥1的整数,当使用单分散聚苯乙烯作为标准的凝胶渗透色谱法测定聚苯乙烯缩小分子量时的树脂,存在最大值a,b和c, 在分子量分布曲线中分子量范围为6300〜25000,2500〜6000和150〜900分别满足以下关系:a / b = 0-1.5,c / b = 1.4-2。 所述正型辐射敏感性树脂组合物的分辨率,灵敏度,显影性,耐热性和粘附性优异,因此可用作制造具有较高一体化的集成电路的正型抗蚀剂。
    • 6. 发明授权
    • Method for separation of solid mixtures by simultaneous multi-stage
recrystallization
    • 通过同时多级重结晶分离固体混合物的方法
    • US4544391A
    • 1985-10-01
    • US434513
    • 1982-10-15
    • Hiroshi Oka
    • Hiroshi Oka
    • B01D9/02B01D9/00
    • B01D9/004B01D9/0013
    • A method for separating a desired component from a solid mixture by repeated recrystallization in a single vertical crystallizer having a plurality of chambers partitioned by solid-liquid separation means, which comprises intermittently feeding a solid mixture to the top chamber and a solvent to the bottom chamber, dissolving the solid in each chamber in the solvent by heating after feeding of the solid mixture to the top chamber, transferring the resulting solution in each chamber to the adjacent lower chamber while taking out from the bottom chamber the solution from which the desired component is recovered as an end product, cooling the solution in each chamber to precipitate crystals, and transferring the resulting mother liquor in each chamber upwardly through the separation means not capable of passing the resulting crystals by the feeding of the solvent to the bottom chamber, while allowing excess mother liquor to overflow from the top of the crystallizer, the above procedures being repeated continuously. The crystallizer suitable for practicing the method is composed of a tower having a feed port for feeding the solid mixture and a discharge port for overflow of the excess mother liquor in the upper end portion, a feed port for feeding the solvent and a discharge port for taking out the solution in the lower end portion, separtion means for separating solid and liquid by which the tower is divided into chambers, and means for heating and cooling the content in the tower.
    • 一种在具有由固液分离装置分隔的多个室的单个垂直结晶器中通过反复重结晶从固体混合物中分离所需组分的方法,其包括将固体混合物间歇地供给到顶部室和溶剂至底部室 ,在将固体混合物送入顶部室之后通过加热将固体溶解在溶剂中,将每个室中的所得溶液转移到相邻的下部室,同时从底部室中取出所需组分为 作为最终产物回收,冷却每个室中的溶液以沉淀晶体,并将每个室中的所得母液向上通过分离装置,其不能通过将溶剂供给到底室而使所得晶体通过,同时允许 过量的母液从结晶器顶部溢出,上述步骤b 不断重复。 适用于实施该方法的结晶器由具有用于供给固体混合物的供给口和用于上端部中的多余母液溢出的排出口的塔架,供给溶剂的供给口和排出口 取出下端部分的溶液,将分离固体和液体的分离装置分离成室,以及用于加热和冷却塔中的内容物的装置。