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    • 3. 发明申请
    • DISPLACEMENT MEASUREMENT SYSTEM AND METHOD THEREOF
    • 位移测量系统及其方法
    • US20100284022A1
    • 2010-11-11
    • US12483263
    • 2009-06-12
    • Kuei-Chu HsuChii-Chang ChenChia-Hua ChanYin-Chieh Lai
    • Kuei-Chu HsuChii-Chang ChenChia-Hua ChanYin-Chieh Lai
    • G01B11/14
    • G01B11/002G01D5/38
    • A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters the two-dimensional grating, a zero-order light beam and a plurality of first-order diffraction beams are generated. The zero-order light beam interferes with two of the first-order beams in different directions, so that corresponding interference fringes are formed on the photo sensor. Accordingly, when the two-dimensional grating moves, displacements of the two-dimensional grating in the different directions are obtained by calculating phase differences of the interference fringes in the corresponding directions. Besides, when the two-dimensional grating rotates, the rotational angle of the two-dimensional grating is obtained from the corresponding rotational angle of a diffraction pattern of the first-order diffraction beams.
    • 提供了包括相干光源,二维光栅,光传感器和信号处理装置的位移测量系统。 在相干光束进入二维光栅之后,产生零级光束和多个一阶衍射光束。 零级光束在不同方向上干扰两个一级光束,从而在光传感器上形成对应的干涉条纹。 因此,当二维光栅移动时,通过计算相应方向上的干涉条纹的相位差来获得二维光栅在不同方向上的位移。 此外,当二维光栅旋转时,二维光栅的旋转角度由第一级衍射光束的衍射图形的相应旋转角度获得。