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1. 发明授权

US08282196B2 Micro electro mechanical system device and method of manufacturing the same 有权
标题翻译：微机电系统装置及其制造方法
公开(公告)号：US08282196B2
公开(公告)日：2012-10-09
申请号：US12058946
申请日：2008-03-31
申请人： Il Woo Kim , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
发明人： Il Woo Kim , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
IPC分类号： B41J2/05
CPC分类号： B41J2/1601 , B33Y80/00 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639
摘要： A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.
摘要翻译：一种MEMS（微机电系统）装置及其制造方法，其中在层叠在基板上的室层上形成检测指示器，使得用户容易地检查室层是否具有所需的厚度。 MEMS器件可以包括形成在室层上并具有彼此不同深度的两个检测指示器，或者形成在腔室层上并具有锥形截面形状的检测指示器，其中检测指示器的上表面是在向下的方向上逐渐变窄，使得使用者可以容易地检查腔室层是否具有所需的厚度。用户可以通过平坦化形成在室层上的检测指示器，并且通过使用光学显微镜检查检测指示器来精确地确定室层是否被平坦化到所需厚度，从而便于检查室层的厚度。

2. 发明申请

US20080283495A1 MICRO ELECTRO MECHANICAL SYSTEM DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：微电子机械系统装置及其制造方法
公开(公告)号：US20080283495A1
公开(公告)日：2008-11-20
申请号：US12058946
申请日：2008-03-31
申请人： Il Woo KIM , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
发明人： Il Woo KIM , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
IPC分类号： C23F1/00 , B41J2/015
CPC分类号： B41J2/1601 , B33Y80/00 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639
摘要： A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.
摘要翻译：一种MEMS（微机电系统）装置及其制造方法，其中在层叠在基板上的室层上形成检测指示器，使得用户容易地检查室层是否具有所需的厚度。 MEMS器件可以包括形成在室层上并具有彼此不同深度的两个检测指示器，或者形成在腔室层上并具有锥形截面形状的检测指示器，其中检测指示器的上表面是在向下的方向上逐渐变窄，使得使用者可以容易地检查腔室层是否具有所需的厚度。用户可以通过平坦化形成在室层上的检测指示器，并且通过使用光学显微镜检查检测指示器来精确地确定室层是否被平坦化到所需厚度，从而便于检查室层的厚度。

3. 发明授权

US07895750B2 Method of manufacturing inkjet print head 失效
标题翻译：制造喷墨打印头的方法
公开(公告)号：US07895750B2
公开(公告)日：2011-03-01
申请号：US11875106
申请日：2007-10-19
申请人： Byung Ha Park , Sung Joon Park , Young Ung Ha , Kyong Il Kim
发明人： Byung Ha Park , Sung Joon Park , Young Ung Ha , Kyong Il Kim
IPC分类号： B23P17/00 , G01D15/00 , B41J2/045
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , Y10T29/49124 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49146 , Y10T29/49401
摘要： A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material. Parylene is used as the second protective layer.
摘要翻译：一种制造喷墨打印头的方法，其包括形成供墨孔的改进方法，从而能够提高生产率并且通过供墨孔提供良好的供墨。该方法包括：准备在其前侧形成有加热油墨的加热器的基板，在基板的前侧形成流路形成层，使得流路形成层限定油墨流路，形成喷嘴层，其在流路形成层上设置有喷嘴，形成第一保护层，使得第一保护层覆盖流路形成层和喷嘴层，将用于蚀刻基板的掩模材料施加到第二保护层的背面衬底，将第二保护层施加到衬底的侧面以保护衬底的侧面，以及通过湿蚀刻在衬底上形成供墨孔。使用钽（Ta）作为掩模材料。聚对二甲苯用作第二保护层。

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