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1. 发明申请

US20050067376A1 Method of manufacturing monolithic inkjet printhead 失效
标题翻译：制造单片喷墨打印头的方法
公开(公告)号：US20050067376A1
公开(公告)日：2005-03-31
申请号：US10917343
申请日：2004-08-13
申请人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
发明人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
IPC分类号： B41J2/34 , B41J2/135 , B41J2/16 , G03F7/20 , G11B5/127
CPC分类号： B41J2/1626 , B41J2/1603 , B41J2/1631
摘要： A method of manufacturing a monolithic inkjet printhead. The method may include forming on a substrate a heater for heating ink and an electrode for supplying current to the heater, forming a passage forming layer that surrounds an ink passage by applying negative-type photoresist to the substrate and patterning the same, forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer by repeatedly applying a positive-type photoresist to the substrate having the passage forming layer and patterning the same by photolithography at least twice, forming a nozzle layer having a nozzle by applying a negative-type photoresist to the passage forming layer and the sacrificial layer and patterning the same, etching the substrate from the bottom surface thereof to be perforated and forming an ink supply hole, and removing the sacrificial layer. Since the top surface of the sacrificial layer is planarized, the shape and dimension of the ink passage can be easily controlled, thereby improving uniformity of the ink passage.
摘要翻译：一种制造单片喷墨打印头的方法。该方法可以包括在基板上形成用于加热油墨的加热器和用于向加热器供应电流的电极，通过向基板施加负型光致抗蚀剂形成通道形成层，以形成墨水通道，从而形成牺牲物层，其在由通道形成层包围的空间中具有平坦化的顶表面，通过重复地向具有通道形成层的基板施加正型光致抗蚀剂，并通过光刻将其图案化至少两次，通过施加形成具有喷嘴的喷嘴层向通道形成层和牺牲层施加负型光致抗蚀剂并对其进行图案化，从其底表面蚀刻衬底以进行穿孔并形成供墨孔，以及去除牺牲层。由于牺牲层的顶表面被平坦化，所以可以容易地控制油墨通道的形状和尺寸，从而提高油墨通道的均匀性。

2. 发明授权

US07070912B2 Method of manufacturing monolithic inkjet printhead 有权
标题翻译：制造单片喷墨打印头的方法
公开(公告)号：US07070912B2
公开(公告)日：2006-07-04
申请号：US11028665
申请日：2005-01-05
申请人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
发明人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
IPC分类号： B41J2/16
CPC分类号： B41J2/1629 , B41J2/1603 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646
摘要： A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.
摘要翻译：一种制造单片喷墨打印头的方法，其中通过确保流路形成层和喷嘴层彼此完全粘合来保持油墨流动路径的均匀性。该方法包括在衬底上形成加热器和电极，在衬底上涂覆负性光致抗蚀剂，并使用光刻工艺对光致抗蚀剂进行构图，以形成限定墨水流路的流路形成层。该方法还包括随后形成牺牲层以便覆盖流路形成层，然后使用化学机械抛光（CMP）工艺使流路形成层和牺牲层的上表面平坦化的步骤，使得当喷嘴层然后形成流路形成层和喷嘴层彼此完全粘合。

3. 发明授权

US07005244B2 Method of manufacturing monolithic inkjet printhead 失效
标题翻译：制造单片喷墨打印头的方法
公开(公告)号：US07005244B2
公开(公告)日：2006-02-28
申请号：US10917343
申请日：2004-08-13
申请人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
发明人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
IPC分类号： B41J2/16
CPC分类号： B41J2/1626 , B41J2/1603 , B41J2/1631
摘要： A method of manufacturing a monolithic inkjet printhead. The method may include forming on a substrate a heater for heating ink and an electrode for supplying current to the heater, forming a passage forming layer that surrounds an ink passage by applying negative-type photoresist to the substrate and patterning the same, forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer by repeatedly applying a positive-type photoresist to the substrate having the passage forming layer and patterning the same by photolithography at least twice, forming a nozzle layer having a nozzle by applying a negative-type photoresist to the passage forming layer and the sacrificial layer and patterning the same, etching the substrate from the bottom surface thereof to be perforated and forming an ink supply hole, and removing the sacrificial layer. Since the top surface of the sacrificial layer is planarized, the shape and dimension of the ink passage can be easily controlled, thereby improving uniformity of the ink passage.
摘要翻译：一种制造单片喷墨打印头的方法。该方法可以包括在基板上形成用于加热油墨的加热器和用于向加热器供应电流的电极，通过向基板施加负型光致抗蚀剂形成通道形成层，以形成墨水通道，从而形成牺牲物层，其在由通道形成层包围的空间中具有平坦化的顶表面，通过重复地向具有通道形成层的基板施加正型光致抗蚀剂，并通过光刻将其图案化至少两次，通过施加形成具有喷嘴的喷嘴层向通道形成层和牺牲层施加负型光致抗蚀剂并对其进行图案化，从其底表面蚀刻衬底以进行穿孔并形成供墨孔，以及去除牺牲层。由于牺牲层的顶表面被平坦化，所以可以容易地控制油墨通道的形状和尺寸，从而提高油墨通道的均匀性。

4. 发明申请

US20050155949A1 Method of manufacturing monolithic inkjet printhead 有权
标题翻译：制造单片喷墨打印头的方法
公开(公告)号：US20050155949A1
公开(公告)日：2005-07-21
申请号：US11028665
申请日：2005-01-05
申请人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
发明人： Byung-ha Park , Myong-jong Kwon , Young-ung Ha , Sung-joon Park
IPC分类号： B41J2/05 , B41J2/16 , G01D15/00 , G11B5/127
CPC分类号： B41J2/1629 , B41J2/1603 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646
摘要： A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.
摘要翻译：一种制造单片喷墨打印头的方法，其中通过确保流路形成层和喷嘴层彼此完全粘合来保持油墨流动路径的均匀性。该方法包括在衬底上形成加热器和电极，在衬底上涂覆负性光致抗蚀剂，并使用光刻工艺对光致抗蚀剂进行构图，以形成限定墨水流路的流路形成层。该方法还包括随后形成牺牲层以便覆盖流路形成层，然后使用化学机械抛光（CMP）工艺使流路形成层和牺牲层的上表面平坦化的步骤，使得当喷嘴层然后形成流路形成层和喷嘴层彼此完全粘合。

5. 发明申请

US20060044362A1 Inkjet printer head and method of fabricating the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060044362A1
公开(公告)日：2006-03-02
申请号：US11059501
申请日：2005-02-17
申请人： Kyong-il Kim , Myong-jong Kwon , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-Sik Min
发明人： Kyong-il Kim , Myong-jong Kwon , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-Sik Min
IPC分类号： B41J2/05
CPC分类号： B41J2/1631 , B41J2/14112 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1646
摘要： An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.
摘要翻译：喷墨打印机头及其制造方法包括：基板，其具有形成在基板的底面的供墨孔，形成在基板的顶面的下室，以及限流器，供给孔和下室，形成在基板上的氧化物层，形成在氧化物层上并且平行于基板的表面设置以跨越下部室的加热器，与该加热器电连接的引线以及设置在喷嘴层在加热器上配置墨水通道与下部腔室并且在喷嘴层的上部具有喷嘴。喷墨打印头能够通过使用加热器的两个表面加热墨水来提高热效率，因为加热器设置在墨水室的中心，并且通过使电流密度和电流流动均匀地提高加热器的特性由于加热器形成为直线而没有任何弯曲或弯曲部分。

6. 发明申请

US20060061629A1 Inkjet printer head and method of manufacturing the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060061629A1
公开(公告)日：2006-03-23
申请号：US11071350
申请日：2005-03-04
申请人： Sung-joon Park , Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Yong-shik Park , Eun-bong Han , Young-ung Ha , Jae-sik Min , Byung-ha Park
发明人： Sung-joon Park , Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Yong-shik Park , Eun-bong Han , Young-ung Ha , Jae-sik Min , Byung-ha Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1634 , B41J2/1639 , B41J2/1642 , B41J2/1646
摘要： An inkjet printer head includes a substrate having a manifold and an ink channel to supply ink, a nozzle plate formed on the substrate, a chamber formed between the substrate and the nozzle plate and extending toward the substrate and the nozzle plate, an electrode formed at an interface between the substrate and the nozzle plate and around the chamber, and a heater having both ends extending in contact with the electrode to be suspended on the chamber in direct contact with the ink and to generate bubbles from both surfaces thereof. The inkjet printer head is capable of improving manufacturing process efficiency by omitting a process of separately forming a heater passivation layer, operating the heater at low electric power by omitting the heater passivation layer, improving integrity of a nozzle by lowering a working voltage, and improving reliability in manufacturing processes by locating the suspended heater to be in parallel with the substrate and the electrode.
摘要翻译：喷墨打印头包括具有歧管和用于供应墨水的墨水通道的基板，形成在基板上的喷嘴板，形成在基板和喷嘴板之间并且朝向基板和喷嘴板延伸的腔室，形成在衬底和喷嘴板之间以及围绕室的界面，以及加热器，其两端延伸成与电极接触，以悬浮在与油墨直接接触的室上并从其两个表面产生气泡。喷墨打印头能够通过省略分开形成加热器钝化层的过程来提高制造工艺效率，通过省略加热器钝化层以低功率操作加热器，通过降低工作电压来改善喷嘴的完整性，并且改进通过将悬挂的加热器定位成与基底和电极平行的方式制造过程中的可靠性。

7. 发明授权

US07278709B2 Photo-curable resin composition, method of patterning the same, and ink jet head and method of fabricating the same 失效
标题翻译：光固化树脂组合物，其图案化方法和喷墨头及其制造方法
公开(公告)号：US07278709B2
公开(公告)日：2007-10-09
申请号：US11004939
申请日：2004-12-07
申请人： Byung-ha Park , Young-ung Ha , Sung-joon Park , Myong-jong Kwon
发明人： Byung-ha Park , Young-ung Ha , Sung-joon Park , Myong-jong Kwon
IPC分类号： B41J2/04 , B41J2/05
CPC分类号： G03F7/038 , B41J2/1603 , B41J2/1631 , G03F7/0043 , G03F7/0048
摘要： A photo-curable resin composition, a method of patterning the same, an ink jet head, and a method of fabricating the same. The photo-curable resin composition includes an epoxy compound, a photo-catalyst provided as a photo-initiator, and a non-photo reactive solvent. The photo-catalyst may be a semiconductor material to generate electron-hall pairs using light energy. The semiconductor material is one selected from a group consisting of TiO2, CdS, Si, SrTiO3, WO, ZnO, SnO2, CdSe and CdTe, CdSe and CdTe. The epoxy compound may include a di-functional epoxy compound and a multi-functional epoxy compound. The non-photo reactive solvent may be one or a mixture selected from a group consisting of gamma-butyrolactone (GBL), cyclopentanone, C1-6 acetate, tetrahydrofurane (THF), and xylene. The photo-curable resin composition is patterned to form a fluid channel structure of the ink jet head.
摘要翻译：光固化树脂组合物，其图案化方法，喷墨头及其制造方法。光固化树脂组合物包括环氧化合物，作为光引发剂提供的光催化剂和非光反应性溶剂。光催化剂可以是使用光能产生电子 - 大厅对的半导体材料。半导体材料选自TiO 2，CdS，Si，SrTiO 3，WO，ZnO，SnO 2，CdSe，和CdTe，CdSe和CdTe。环氧化合物可以包括二官能环氧化合物和多官能环氧化合物。非光反应性溶剂可以是选自γ-丁内酯（GBL），环戊酮，C 1-6乙酸酯，四氢呋喃（THF）和二甲苯中的一种或其混合物。将光固化树脂组合物图案化以形成喷墨头的流体通道结构。

8. 发明申请

US20060044347A1 Inkjet printer head and method of fabricating the same 审中-公开
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20060044347A1
公开(公告)日：2006-03-02
申请号：US11071363
申请日：2005-03-04
申请人： Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-sik Min
发明人： Myong-jong Kwon , Kyong-il Kim , Kwang-ryul Kim , Nam-kyun Kim , Byung-ha Park , Yong-shik Park , Eun-bong Han , Young-ung Ha , Sung-joon Park , Jae-sik Min
IPC分类号： B41J2/135
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1645
摘要： An inkjet printer head includes a substrate having an ink-feed hole to supply ink stored in a cartridge to an ink chamber and a restrictor in fluid communication with the ink chamber, an oxide layer formed on the substrate, a heater disposed on the oxide layer above the restrictor and having fixed parts disposed on the oxide layer, slopes extending upward and away from the restrictor at an incline, and a parallel part extending between the slopes parallel to the substrate, a lead formed to be in electrical contact with the heater, a chamber layer formed to cover the lead and to define the ink chamber, and a nozzle layer formed on the chamber layer and having a nozzle. In the inkjet printer head, the lifespan of the heater may be extended since the heater is supported by the slopes, which function as a shock absorbing member when ink supply pressure or cavitation force is applied to a surface of the heater. In addition, since the heater does not have a right angle structure, the heater may be formed to have a uniform thickness even when a thin layer used for the heater is formed by a deposition method.
摘要翻译：一种喷墨打印头包括：具有供墨孔的基板，用于将存储在墨盒中的墨水供应到墨室;以及限制器，其与所述墨室流体连通;形成在所述基板上的氧化物层;设置在所述氧化物层上的加热器在限流器上方并且具有设置在氧化物层上的固定部分，倾斜在倾斜处向上延伸并远离限制器，并且平行部分在平行于衬底的斜面之间延伸，形成为与加热器电接触的引线，形成为覆盖引线并限定墨水室的室层，以及形成在室层上并具有喷嘴的喷嘴层。在喷墨打印机头中，加热器的寿命可以延长，因为加热器由斜面支撑，当墨水供应压力或空穴力施加到加热器的表面时，该斜面用作减震构件。此外，由于加热器不具有直角结构，即使当通过沉积方法形成用于加热器的薄层时，也可以将加热器形成为具有均匀的厚度。

9. 发明授权

US07513605B2 Inkjet printhead with heat generating resistor 有权
标题翻译：具有发热电阻的喷墨打印头
公开(公告)号：US07513605B2
公开(公告)日：2009-04-07
申请号：US11379126
申请日：2006-04-18
申请人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
发明人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129
摘要： An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.
摘要翻译：喷墨打印头包括具有填充有要喷射的墨水的墨水室的基板，形成在与墨水腔相对应的位置的基板上的喷嘴板，以及安装在墨水室中并由TiNx形成的发热电阻，其中x的范围为0.2至0.5，以通过产生热量在墨中产生墨泡。

10. 发明申请

US20060232635A1 INKJET PRINTHEAD WITH HEAT GENERATING RESISTOR 有权
标题翻译： INKJET PRINTHEAD与发热电阻器
公开(公告)号：US20060232635A1
公开(公告)日：2006-10-19
申请号：US11379126
申请日：2006-04-18
申请人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
发明人： Jae-sik Min , Young-ung Ha , Byung-ha Park , Myong-jong Kwon , Kyong-il Kim , Yong-shik Park
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129
摘要： An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.
摘要翻译：喷墨打印头包括具有填充有要喷射的墨水的墨水室的基板，形成在与墨水腔相对应的位置的基板上的喷嘴板，以及安装在墨水室中并由TiN < 其中x的范围为0.2至0.5，以通过产生热量在墨中产生墨泡。

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