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    • 10. 发明申请
    • INSPECTION APPARATUS AND INSPECTION METHOD
    • 检查装置和检查方法
    • US20100220918A1
    • 2010-09-02
    • US12679363
    • 2008-09-24
    • Takashi IwahashiToshihiko TsujikawaAtsushi Katayama
    • Takashi IwahashiToshihiko TsujikawaAtsushi Katayama
    • G06K9/00
    • G01B11/002G01N21/8806G01N21/956G01N2021/9513G06T7/0006G06T7/73G06T2207/10048G06T2207/20164G06T2207/30141G06T2207/30204
    • Aims to provide an inspection apparatus which precisely detects an amount of misalignment of a component mounted on a panel through an adhesive which contains conductive particles. The inspection apparatus includes: an infrared-light illuminator (305) which is provided on a bottom-surface side of the panel and illuminates with light a panel recognition mark formed on the panel and a component recognition mark formed on the component; an IR camera (307) which is provided opposite to the illuminator (305) and captures images of the light-illuminated recognition marks; and an amount-of-misalignment calculation unit (446) which calculates, using the images captured by the camera (307), an amount of misalignment of the recognition marks as an amount of misalignment in mounting position, wherein the illuminator (305) emits light in an amount which causes halation, the light having a wavelength that allows the light to pass through the panel and the component but does not allow or does not easily allow the light to pass through the conductive particles.
    • 旨在提供一种检查装置,其通过包含导电颗粒的粘合剂精确地检测安装在面板上的部件的未对准量。 检查装置包括:红外光照射器(305),其设置在面板的底面侧,并且用光照亮面板上形成的面板识别标记和形成在所述部件上的部件识别标记; IR照相机(307),其与照明器(305)相对设置并且捕获光照识别标记的图像; 以及未对准计算单元(446),其使用由所述照相机(307)拍摄的图像计算所述识别标记的未对准量作为安装位置的未对准量,其中,所述照明器(305)发射 导致晕光的光,具有允许光穿过面板和部件但不允许或不容易使光通过导电颗粒的波长的光。