专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07042581B2 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers 有权
公开(公告)号：US07042581B2
公开(公告)日：2006-05-09
申请号：US11013070
申请日：2004-12-15
申请人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
发明人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
IPC分类号： G01B11/28 , G01B11/02
CPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G01B11/0625 , G01N21/4738
摘要： A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and, alternatively, if a reflectivity measurement is made, it becomes more accurate. One application is to measure the thickness of a layer or layers, either a layer made of transparent material or a metal layer. A one or multiple wavelength technique allow very precise measurements of layer thickness. Noise from ambient radiation is minimized by modulating the radiation source at a frequency where such noise is a minimum or non-existent. The measurements may be made during processing of the surface in order to allow precise control of processing semiconductor wafers, flat panel displays, or other articles. A principal application is in situ monitoring of film thickness reduction by chemical-mechanical-polishing (CMP).

2. 发明授权

US06934040B1 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers 有权
标题翻译：用于测量诸如半导体晶片的物体的层厚度和其它表面特性的光学技术
公开(公告)号：US06934040B1
公开(公告)日：2005-08-23
申请号：US10672558
申请日：2003-09-26
申请人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
发明人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
IPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G01B11/06 , G01N21/47 , G01B11/28
CPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G01B11/0625 , G01N21/4738
摘要： A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and, alternatively, if a reflectivity measurement is made, it becomes more accurate. One application is to measure the thickness of a layer or layers, either a layer made of transparent material or a metal layer. A one or multiple wavelength technique allow very precise measurements of layer thickness. Noise from ambient radiation is minimized by modulating the radiation source at a frequency where such noise is a minimum or non-existent. The measurements may be made during processing of the surface in order to allow precise control of processing semiconductor wafers, flat panel displays, or other articles. A principal application is in situ monitoring of film thickness reduction by chemical-mechanical-polishing (CMP).
摘要翻译：通过用广角的光学辐射照射表面并且接收从取决于照明角度的延伸的角度接收从表面反射的辐射来测量表面的特性。对于表面进行发射率测量，或者如果进行反射率测量，则其变得更准确。一种应用是测量一层或多层的厚度，即由透明材料或金属层制成的层。一种或多种波长技术允许对层厚度进行非常精确的测量。通过以这样的噪声为最小或不存在的频率调制辐射源来最小化来自环境辐射的噪声。在处理表面期间可以进行测量，以便能够精确地控制半导体晶片，平板显示器或其他物品的处理。主要应用是通过化学机械抛光（CMP）原位监测膜厚减少。

3. 发明授权

US5860972A Method of detection and destruction of urinary calculi and similar structures 失效
标题翻译：尿结石和类似结构的检测和破坏方法
公开(公告)号：US5860972A
公开(公告)日：1999-01-19
申请号：US548846
申请日：1995-10-26
申请人： Anh N. Hoang
发明人： Anh N. Hoang
IPC分类号： A61B17/00 , A61B18/26 , A61N5/06
CPC分类号： A61B18/26 , A61B2017/00057
摘要： The present invention relates generally to methods and devices for detecting, destroying and removing urinary calculi and other similar structures anywhere within an animal body, and more specifically to a method for locating such structures, fragmenting and vaporizing them and related detection and control schemes. The method for destruction and detection of urinary stones, calculi and similar structures includes the following steps: (a) providing a laser source suitable for performing laser lithotripsy; (b) initiating transmission of laser energy via a fiber optic laser delivery device so as to impinge upon a urinary stone or other structure and create a sparkle or emission of visible light; (c) transmitting the sparkle or emission of visible light reflected back through the fiber optic laser delivery device to a photomultiplier tube; (d) detecting an amplified signal corresponding to the sparkle or emission of visible light created upon fragmentation of the urinary stones, calculi or other obstruction; (e) creating a control signal for the power supply of the laser source; (f) controlling the laser source so as to continue to transmit laser energy through the fiber optic laser delivery device to a urinary stone or other structure; (g) repeating steps (c) through (f) until no sparkle or visible light emission is detected; and (h) terminating transmission of the laser energy.
摘要翻译：本发明一般涉及用于检测，破坏和去除动物体内任何地方的尿结石和其它类似结构的方法和装置，更具体地涉及一种用于定位这种结构，分段和蒸发它们的方法以及相关的检测和控制方案。用于破坏和检测尿石，结石和类似结构的方法包括以下步骤：（a）提供适合于执行激光碎石术的激光源; （b）通过光纤激光输送装置启动激光能量的传递，以便撞击在尿石或其它结构上并产生可见光的闪耀或发射; （c）将通过光纤激光输送装置反射的可见光的闪光或发射透射到光电倍增管; （d）检测对应于由于尿石，结石或其他阻塞分裂而产生的可见光的闪光或发射的放大信号; （e）创建用于激光源的电源的控制信号; （f）控制激光源，以便继续将激光能量通过光纤激光输送装置传送到尿石或其他结构; （g）重复步骤（c）至（f），直到没有检测到闪光或可见光发射; 和（h）终止激光能量的传输。

4. 发明授权

US06654132B1 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers 有权
标题翻译：用于测量诸如半导体晶片的物体的层厚度和其它表面特性的光学技术
公开(公告)号：US06654132B1
公开(公告)日：2003-11-25
申请号：US09577795
申请日：2000-05-24
申请人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
发明人： Charles W. Schietinger , Anh N. Hoang , Dmitry V. Bakin
IPC分类号： G01B1128
CPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G01B11/0625 , G01N21/4738
摘要： A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and, alternatively, if a reflectivity measurement is made, it becomes more accurate. One application is to measure the thickness of a layer or layers, either a layer made of transparent material or a metal layer. A one or multiple wavelength technique allow very precise measurements of layer thickness. Noise from ambient radiation is minimized by modulating the radiation source at a frequency where such noise is a minimum or non-existent. The measurements may be made during processing of the surface in order to allow precise control of processing semiconductor wafers, flat panel displays, or other articles. A principal application is in situ monitoring of film thickness reduction by chemical-mechanical-polishing (CMP).
摘要翻译：通过用广角的光学辐射照射表面并且接收从取决于照明角度的延伸的角度接收从表面反射的辐射来测量表面的特性。对于表面进行发射率测量，或者如果进行反射率测量，则其变得更准确。一种应用是测量一层或多层的厚度，即由透明材料或金属层制成的层。一种或多种波长技术允许对层厚度进行非常精确的测量。通过以这样的噪声为最小或不存在的频率调制辐射源来最小化来自环境辐射的噪声。在处理表面期间可以进行测量，以便能够精确地控制半导体晶片，平板显示器或其他物品的处理。主要应用是通过化学机械抛光（CMP）原位监测膜厚减少。

5. 发明授权

US06572265B1 In situ optical surface temperature measuring techniques and devices 有权
标题翻译：原位光学表面温度测量技术和设备
公开(公告)号：US06572265B1
公开(公告)日：2003-06-03
申请号：US09839857
申请日：2001-04-20
申请人： John P. Gotthold , Anh N. Hoang , Surinder S. Sandhu , John Leonard Shaver , Terry M. Stapleton
发明人： John P. Gotthold , Anh N. Hoang , Surinder S. Sandhu , John Leonard Shaver , Terry M. Stapleton
IPC分类号： G01J508
CPC分类号： G01J5/02 , G01J1/28 , G01J1/58 , G01J5/0003 , G01J5/0007 , G01J5/0205 , G01J5/025 , G01J5/046 , G01J5/08 , G01J5/0821 , G01J5/084 , G01J5/0887 , G01K1/14 , G01K11/3213
摘要： A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.
摘要翻译：利用光学温度测量技术的温度传感器被构造成与正在测量温度的表面牢固接触，示例应用是在处理时监视半导体晶片或平板显示器。盖子安装在光波导管的端部附近但与光波导的端部间隔开，弹性元件将帽的力抵抗温度被测量的表面，当盖被朝向光纤端被推压时。光学温度感测元件，例如发光材料或已知辐射率的表面，被承载在盖内。具有封闭端的波纹管方便地用作盖和弹性元件。替代的温度测量装置将光学温度感测材料安装在光学窗口后面的测试基板内，然后通过窗口观察感测材料。

6. 发明授权

US5689520A Method and apparatus for variable waveform output in surgical lasers 失效
标题翻译：手术激光器可变波形输出的方法和装置
公开(公告)号：US5689520A
公开(公告)日：1997-11-18
申请号：US550631
申请日：1995-10-31
申请人： Anh N. Hoang
发明人： Anh N. Hoang
IPC分类号： A61B17/00 , A61B18/20 , H01S3/102 , H01S3/00
CPC分类号： H01S3/102 , A61B18/20 , A61B2017/00159
摘要： Variable waveform output in surgical laser is achieved by controlling power into a solid-state laser cavity. A control circuit is used to coordinate pulse energy, pulse frequency, and pulsewidth into a solid-state laser cavity to achieve a user desired waveform output. An Insulated Gate Bipolar Transistor (IGBT) or similar solid-state transistor switching device under the direction of a control circuit is used to switch energy into the solid-state laser cavity thereby modulating the pulse frequency and pulsewidth. The pulse energy is varied by varying the charge across the capacitor bank which sends energy through the IGBT to the solid-state laser cavity. By having the ability to vary the laser's output pulse frequency, pulsewidth, and pulse energy, multiple tissue effects can be achieved using one solid-state laser cavity.
摘要翻译：外科激光器中的可变波形输出通过控制固态激光器腔体的功率来实现。控制电路用于将脉冲能量，脉冲频率和脉冲宽度调整到固态激光腔中，以实现用户期望的波形输出。使用绝缘栅双极晶体管（IGBT）或类似的固态晶体管开关器件，在控制电路的方向上将能量切换到固态激光器腔中，从而调制脉冲频率和脉冲宽度。通过改变电容器组上的电荷来改变脉冲能量，电容器组通过IGBT发送能量到固态激光器腔。通过具有改变激光器的输出脉冲频率，脉冲宽度和脉冲能量的能力，可以使用一个固态激光器腔实现多个组织效应。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式