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1. 发明申请

US20090030547A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 有权
标题翻译：高速装载机校准运输系统
公开(公告)号：US20090030547A1
公开(公告)日：2009-01-29
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

2. 发明授权

US5338924A Apparatus and method for automatic focusing of light using a fringe plate 失效
标题翻译：使用边缘板自动对焦光的装置和方法
公开(公告)号：US5338924A
公开(公告)日：1994-08-16
申请号：US927959
申请日：1992-08-11
申请人： William A. Barrett , Amit Puri
发明人： William A. Barrett , Amit Puri
IPC分类号： G02B7/28 , G03F7/20 , G01J1/20
CPC分类号： G03F7/70483 , G02B7/28 , G03F7/70375
摘要： The present invention provides an apparatus and method to automatically focus an incident beam of monochromatic parallel planar light on a work piece, using a fringe plate and a vision detector. The work piece may have a perfect mirror surface, or have a non-reflective patterned surface. The incident light beam is focused on the work piece and then reflected through a fringe plate forming an interference pattern on the vision detector. The incident light beam is then scanned or wobbled. The wobbling incident light beam forms a distinctively oscillating output signal from the vision detector when the light is focused on the work piece. When the light is not focused on the work piece a distinctive and more constant output signal is produced by the vision detector. For a given position of the work piece, by noting whether the output signal is rapidly changing or relatively constant, the invention can automatically determine whether or not the work piece is at the focal point of the incident light beam. This can be used to automatically focus the etching or writing laser on the chip or wafer in a laser etching system. The present invention can also be used to automatically determine the focal surface of an objective lens.
摘要翻译：本发明提供一种使用边缘板和视觉检测器将单色平行平面光的入射光束自动聚焦在工件上的装置和方法。工件可以具有完美的镜面，或者具有非反射图案的表面。入射光束聚焦在工件上，然后通过在视觉检测器上形成干涉图案的边缘板反射。然后将入射光束扫描或摆动。当光聚焦在工件上时，摆动入射光束从视觉检测器形成明显的振荡输出信号。当光不集中在工件上时，视觉检测器产生一个独特和更恒定的输出信号。对于工件的给定位置，通过注意输出信号是快速变化还是相对恒定，本发明可以自动确定工件是否在入射光束的焦点处。这可以用于在激光蚀刻系统中自动将蚀刻或写入激光器聚焦在芯片或晶片上。本发明也可用于自动确定物镜的焦面。

3. 发明授权

US07433756B2 Calibration of high speed loader to substrate transport system 失效
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07433756B2
公开(公告)日：2008-10-07
申请号：US10987956
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

4. 发明申请

US20050186063A1 Calibration of high speed loader to substrate transport system 失效
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US20050186063A1
公开(公告)日：2005-08-25
申请号：US10987956
申请日：2004-11-12
申请人： Michael Rice , Eric Englhardt , Robert Lowrance , Martin Elliott , Jeffrey Hudgens , Kirk Katwyk , Amit Puri
发明人： Michael Rice , Eric Englhardt , Robert Lowrance , Martin Elliott , Jeffrey Hudgens , Kirk Katwyk , Amit Puri
IPC分类号： H01L21/68 , B65G49/05 , B65G49/06 , B65G49/07 , H01L21/00 , H01L21/677 , B65F3/02
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

5. 发明授权

US07912576B2 Calibration of high speed loader to substrate transport system 有权
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07912576B2
公开(公告)日：2011-03-22
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

6. 发明申请

US20080187419A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 审中-公开
标题翻译：高速装载机校准运输系统
公开(公告)号：US20080187419A1
公开(公告)日：2008-08-07
申请号：US12099780
申请日：2008-04-08
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： H01L21/67
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

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