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    • 1. 发明授权
    • Laser trim process control
    • 激光修整过程控制
    • US06621043B1
    • 2003-09-16
    • US10033061
    • 2001-11-09
    • Don LambertValerie VivaresAjit M. Dubey
    • Don LambertValerie VivaresAjit M. Dubey
    • B23K2600
    • B23K26/02B23K26/702
    • A method of calibrating a laser utilized in a laser element cutting system utilizing a mechanical gauge having pairs of metal pads formed in rows and columns on a substrate material. The height of the metal pads varies in each row with each column having the same height. The depth of the substrate material under the metal pads varies. The mechanical gauge is subjected to a laser cut process and the mechanical gauge is illuminated by a light source. The light shining through positions of metal pads indicates that the metal pad and the underlying substrate material have been cut. The depth of cut is determined from the thickness of the metal layer and the thickness of the substrate material that have been cut.
    • 一种校准在激光元件切割系统中使用的激光的方法,该激光元件切割系统利用在基片材料上以行和列形成的金属片对。 金属垫的高度在每一列上变化,每列具有相同的高度。 金属焊盘下方的基板材料的深度变化。 机械量规经受激光切割过程,机械表由光源照射。 通过金属垫的位置照射的光指示金属垫和下面的基底材料已被切割。 切割深度由金属层的厚度和已经切割的基材的厚度确定。