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    • 84. 发明申请
    • WIRE BONDING APPARATUS
    • 电线连接装置
    • US20140332583A1
    • 2014-11-13
    • US14339632
    • 2014-07-24
    • SHINKAWA LTD.
    • Toru MAEDA
    • H01L23/00
    • H01L24/78B23K20/004H01L24/45H01L24/85H01L2224/45144H01L2224/45147H01L2224/7801H01L2224/78301H01L2224/78601H01L2224/78611H01L2224/85013H01L2924/00014H01L2924/00015H01L2224/48H01L2924/00
    • Provided is a wire bonding apparatus including: a base (11); a bonding head (13) configured to move a capillary (15) in X, Y, and Z directions with respect to the base (11); and a wire-cleaning plasma unit (30). The wire-cleaning plasma unit (30) includes: hollow casings (31a), (31b) in which an inert gas is introduced so that an internal pressure is higher than an atmospheric pressure; holes (33a), (33b) respectively provided in the casings (31a), (31b) so that the wire (21) is inserted therebetween; and electrodes for plasma respectively disposed within the casings (31a), (31b) around circumferences of the holes (33a), (33b). The wire (21) is cleaned by having the wire (21) be inserted into plasma generated within the casings (31a), (31b) in a state in which air is not contained. With this, a surface of the wire used for wire bonding can be effectively cleaned.
    • 提供一种引线接合装置,包括:基座(11); 结合头(13),其构造成相对于所述基部(11)在X,Y和Z方向上移动毛细管(15); 和线清洁等离子体单元(30)。 线清洗等离子体单元(30)包括:中空壳体(31a),(31b),其中引入惰性气体以使内部压力高于大气压力; 分别设置在壳体(31a),(31b)中的孔(33a),(33b),使得线(21)插入其间; 以及分别设置在孔(33a),(33b)周围的壳体(31a),(31b)内的等离子体用电极。 在未包含空气的状态下,通过使导线(21)插入在壳体(31a),(31b)内产生的等离子体来清洁导线(21)。 由此,可以有效地清洁用于引线接合的线的表面。
    • 87. 发明申请
    • BONDING APPARATUS
    • 绑定装置
    • US20140305996A1
    • 2014-10-16
    • US14364059
    • 2013-07-23
    • KAIJO CORPORATION
    • Shuichi Takanami
    • B23K20/10
    • B23K20/106H01L24/78H01L2224/78301H01L2224/78309H01L2224/78349H01L2224/789H01L2924/00014H01L2224/45099H01L2224/05599
    • A bonding apparatus includes a bonding arm which has a receiving portion facing a center axis of a bonding tool; a pair of capillary holding portions in contact with the bonding tool; a pair of piezoelectric elements configured to generate an ultrasonic vibration in contact with the capillary holding portions; and a pressurizing device which has a pressurizing member arranged to face the receiving portion of the bonding arm and a moving device configured to move the pressurizing member toward the receiving portion of the bonding arm. The pressurizing member is moved in a state in which the pair of piezoelectric elements, the pair of capillary holding portions, and the bonding tool are placed between the receiving portion of the bonding arm to cause the bonding arm to hold the pair of capillary holding portion and the bonding tool.
    • 一种接合装置,包括:接合臂,其具有面向接合工具的中心轴的接收部; 与接合工具接触的一对毛细管保持部; 配置成产生与毛细管保持部接触的超声波振动的一对压电元件; 以及加压装置,其具有设置成面向接合臂的接收部分的加压构件和构造成使加压构件朝向接合臂的接收部分移动的移动装置。 加压构件在将一对压电元件,一对毛细管保持部和接合工具放置在接合臂的接收部之间的状态下移动,以使接合臂保持一对毛细管保持部 和粘合工具。