专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

81. 发明授权

US5406833A Atomic force microscope 失效
标题翻译：原子力显微镜
公开(公告)号：US5406833A
公开(公告)日：1995-04-18
申请号：US106409
申请日：1993-08-13
申请人： Hiroyoshi Yamamoto
发明人： Hiroyoshi Yamamoto
IPC分类号： G01B11/30 , G01B5/28 , G01B21/30 , G01N37/00 , G01Q60/24 , G01Q60/36 , G01Q70/02 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q10/02 , G01Q20/02 , G01Q30/025 , Y10S977/851
摘要： In an atomic force microscope capable of permitting the non-destructive testing of a large sample, a fine motion element is provided for three-dimensional scanning of the sample in order to determine the surface topography thereof. The fine motion element has attached thereto one end of a small spring element, and a detecting tip is connected to the opposite end of the spring element for positioning the end portion of the spring element proximate the sample surface. A displacement detector detects displacement of the spring element by detecting laser light obtained by irradiating a laser beam on the rear surface of the spring element and detecting the displacement using a multi-segment photodetector. Since the fine motion element does not support the sample, the three-dimensional relative scanning of the sample surface by the detecting tip is possible even for large-sized samples.
摘要翻译：在能够允许对大样品进行非破坏性测试的原子力显微镜中，为了确定其表面形貌，提供了用于样品的三维扫描的微动元件。微动元件附着在小弹簧元件的一端，检测头连接到弹簧元件的相对端，用于将弹簧元件的端部定位在靠近样品表面的位置。位移检测器通过检测通过在弹簧元件的后表面上照射激光而获得的激光并使用多段光电检测器检测位移来检测弹簧元件的位移。由于微细运动元件不支持样品，所以即使对于大尺寸的样品也可以通过检测头进行样品表面的三维相对扫描。

82. 发明授权

US4999494A System for scanning large sample areas with a scanning probe microscope 失效
标题翻译：用扫描探针显微镜扫描大样本区域的系统
公开(公告)号：US4999494A
公开(公告)日：1991-03-12
申请号：US405660
申请日：1989-09-11
申请人： Virgil B. Elings
发明人： Virgil B. Elings
IPC分类号： G01Q10/02 , H01J37/20
CPC分类号： G01Q10/02 , H01J37/20
摘要： A scanning probe microscope head, which includes means for scanning a probe over a limited portion of a sample surface, includes a casing having feet resting on the sample surface and is moved by positioning means to different portions of the sample surface while the head slides across the sample surface. In one embodiment, a positioning arm is mounted on a carriage driven by a first feed screw, while a sample support is mounted for adjustment by a second feed screw perpendicular to the first. In a second embodiment, the arm is mounted on an X-Y stage adjusted by perpendicular feed screws. In another embodiment, the head rests on the support surface for the sample and slides along this surface as its position is adjusted. The positioning arm supports one or two magnets which magnetically couple the arm to the head casing. The casing is made of ferromagnetic material or nonmagnetic material with a ferromagnetic insert.
摘要翻译：扫描探针显微镜头，其包括用于在样本表面的有限部分上扫描探针的装置，包括具有搁置在样品表面上的脚的壳体，并且通过定位装置移动到样品表面的不同部分，同时头部滑过样品表面。在一个实施例中，定位臂安装在由第一进给螺杆驱动的滑架上，同时样品支撑件安装成通过垂直于第一进给螺杆的第二进给螺杆进行调节。在第二实施例中，臂安装在通过垂直进给螺钉调节的X-Y台上。在另一个实施例中，头部搁置在用于样品的支撑表面上，并且当其位置被调整时，该滑动件沿着该表面滑动。定位臂支撑一个或两个将臂连接到头部外壳上的磁体。外壳由铁磁材料或具有铁磁性插入物的非磁性材料制成。

83. 发明授权

US4894537A High stability bimorph scanning tunneling microscope 失效
标题翻译：高稳定性双压电晶片扫描隧道显微镜
公开(公告)号：US4894537A
公开(公告)日：1990-01-16
申请号：US222623
申请日：1988-07-21
申请人： Bradford L. Blackford , Douglas C. Dahn , Manfred H. Jericho
发明人： Bradford L. Blackford , Douglas C. Dahn , Manfred H. Jericho
IPC分类号： G01Q10/06 , G01Q10/02 , G01Q10/04 , G01Q30/10 , G01Q60/16 , G01Q60/40 , G01Q70/04 , G01Q70/10 , G01Q70/18 , H01L41/09
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/02 , G01Q10/04 , G01Q70/04 , H02N2/028 , Y10S977/861 , Y10S977/872
摘要： A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tirpod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order, and the resulting drift is .ltoreq.0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations.
摘要翻译：描述了一种新颖的扫描隧道显微镜（STM），其几乎完全由一个金属构成。铝，并使用双压电晶片作为x，y，z驱动元件。该设计使用简单，坚固的Tirpod配置为微动驱动臂。安装在铝制支架上的样品的粗略运动是通过用压电榫推动或拉动来实现的。差分热膨胀效应可以通过设计，一级顺序避免，在短暂的预热时间后，每分钟产生的漂移为

84. 发明授权

US4762996A Coarse approach positioning device 失效
标题翻译：粗略定位装置
公开(公告)号：US4762996A
公开(公告)日：1988-08-09
申请号：US40659
申请日：1987-04-20
申请人： Gerd K. Binning , Christoph E. Gerber
发明人： Gerd K. Binning , Christoph E. Gerber
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q30/20 , G01Q60/16 , G05D3/12 , H01J37/20 , H05K13/00 , G21K5/10 , G21K5/08
CPC分类号： G01Q10/02 , B82Y35/00 , H01J37/20 , H05K13/0015 , Y10S977/872 , Y10T74/20006 , Y10T74/20207
摘要： This die-shaped coarse-approach positioning device is particularly suited for the sample holder of a scanning tunneling microscope or the like. It comprises two blocks (21, 23), one (21) stationary, the other tiltable with respect to the stationary one. The blocks (21, 23) are connected on one side by a spring-like sheet metal (20). The tiltable block (23) can be moved, and with it the sample (33), by turning a screw (28) which presses down onto an elastic pad (30). The tilting of the tiltable block (23) occurs against the effect of the sheet metal (20) until the block (23) touches down onto a wedge (39) insertable in the gap (24) between the blocks (21, 23), and consisting of an elastic material, however, having a spring constant much higher than the effective spring constant of the sheet metal (20). In the application shown, the sample can be lowered onto a tunnel tip (34) attached to a fine-approach positioning device (35).
摘要翻译：该模形粗略定位装置特别适用于扫描隧道显微镜等的样品架。它包括两个块（21,23），一个（21）固定，另一个可相对于静止的倾斜。块体（21,23）在一侧由弹簧状的金属片（20）连接起来。可倾斜块（23）可以通过转动按压到弹性垫（30）上的螺钉（28）而移动样品（33）。倾斜块（23）的倾斜发生在金属板（20）的作用下，直到块（23）接触到可插入块（21,23）之间的间隙（24）内的楔（39）然而由弹性材料组成，其弹簧常数远高于金属板（20）的有效弹簧常数。在所示的应用中，样品可以下降到连接到精细定位装置（35）上的隧道末端（34）上。

85. 发明授权

US11656245B2 Method and device for measuring dimension of semiconductor structure 有权
公开(公告)号：US11656245B2
公开(公告)日：2023-05-23
申请号：US17392430
申请日：2021-08-03
申请人： CHANGXIN MEMORY TECHNOLOGIES, INC.
发明人： Zheng Li
IPC分类号： G01Q60/24 , G01Q20/00 , G01Q10/02
CPC分类号： G01Q60/24 , G01Q10/02 , G01Q20/00
摘要： A method and device for measuring dimension of a semiconductor structure are provided. A probe of an Atomic Force Microscope (AFM) is controlled at first to move a first distance from a preset reference position to a top surface of a semiconductor structure to be measured in a direction perpendicular to the top surface of the semiconductor structure to be measured, then the probe is controlled to scan the surface of the semiconductor structure to be measured while keeping the first distance in a direction parallel to the top surface of the semiconductor structure to be measured, amplitudes of the probe at respective scanning points on the surface of the semiconductor structure to be measured are detected, and a Critical Dimension (CD) of the semiconductor structure to be measured is determined according to the amplitudes of the probe at respective scanning points on the surface of the semiconductor structure.

86. 发明申请

US20180238931A1 DEVICE AND METHOD FOR MEASURING AND/OR MODIFYING SURFACE FEATURES ON A SURFACE OF A SAMPLE 审中-公开
公开(公告)号：US20180238931A1
公开(公告)日：2018-08-23
申请号：US15753094
申请日：2016-08-18
申请人： Nerderlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人： Hamed SADEGHIAN MARNANI
IPC分类号： G01Q70/02 , G01Q10/02
CPC分类号： G01Q70/02 , G01Q10/02 , G01Q70/06
摘要： The present document describes a device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample. The system comprises a sample carrier, one or more heads, and a support structure. The support structure comprises a reference surface for providing a positioning reference. The heads are separate from the sample carrier and the support structure, and the device further comprises a pick and place manipulator arranged for positioning the heads at respective working positions. The manipulator comprises a gripper and an actuator for moving the gripper, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface. The gripper is arranged for engaging and releasing the respective heads from the transverse motion. The document also describes a method of measuring and/or modifying surface features on a surface of a sample.

87. 发明申请

US20180074092A1 INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE 审中-公开
公开(公告)号：US20180074092A1
公开(公告)日：2018-03-15
申请号：US15813272
申请日：2017-11-15
申请人： OLYMPUS CORPORATION
发明人： Nobuaki SAKAI
IPC分类号： G01Q10/02
CPC分类号： G01Q10/02 , G01Q10/06 , G01Q30/04
摘要： An information acquiring method in an atomic force microscope includes, during causing the microscope to raster scan a cantilever and a sample relatively while causing a mechanical interaction between the sample and a probe provided at a free end of the cantilever, causing a first interaction having first strength between the probe and sample, acquiring first information on the sample when the first interaction is generated, causing a second interaction having second strength between the probe and sample, and acquiring second information on the sample when the second interaction is generated. The first strength and second strength are different. The causing the first interaction, the acquiring the first information, the causing the second interaction, and the acquiring the second information are performed in a same scanning region.

88. 发明授权

US09841436B2 AM/FM measurements using multiple frequency of atomic force microscopy 有权
公开(公告)号：US09841436B2
公开(公告)日：2017-12-12
申请号：US15275770
申请日：2016-09-26
申请人： Oxford Instruments Asylum Research, Inc.
发明人： Roger Proksch , Jason Bemis , Aleksander Labuda
IPC分类号： G01Q40/00 , G01Q10/02 , G01Q10/04 , G01Q60/32
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q40/00 , G01Q60/32
摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

89. 发明授权

US09506947B2 System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing 有权
标题翻译：用于非接触式显微镜的系统和方法用于样品的三维预表征，用于在纳米孔径下进行样品导航的快速和非破坏性
公开(公告)号：US09506947B2
公开(公告)日：2016-11-29
申请号：US14552399
申请日：2014-11-24
申请人： DCG Systems, Inc.
发明人： Vladimir A. Ukraintsev , Richard Stallcup , Sergiy Pryadkin , Mike Berkmyre , John Sanders
IPC分类号： G02B27/32 , G01Q10/00 , G01Q60/28 , G01Q60/48 , G01Q10/02 , G01Q30/02 , G01Q60/00 , G01Q60/38
CPC分类号： G01Q10/02 , G01Q10/00 , G01Q30/025 , G01Q60/00 , G01Q60/38 , G01Q60/48
摘要： A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
摘要翻译：用于执行抽样探测的系统。该系统包括构造成基于至少三个基准标记接收样本的三维坐标的地形显微镜; 接收安装在支架上的样品; 并基于至少三个基准标记和三维坐标导航到样本上的至少一个位置。

90. 发明申请

US20150241469A1 PRECISE PROBE PLACEMENT IN AUTOMATED SCANNING PROBE MICROSCOPY SYSTEMS 有权
标题翻译：自动扫描探针显微系统中的精密探针放置
公开(公告)号：US20150241469A1
公开(公告)日：2015-08-27
申请号：US14630074
申请日：2015-02-24
申请人： Bruker Nano, Inc.
发明人： Jason Osborne , Eric Milligan , Andrew Lopez , Robert Wu , Sean Hand , Vladimir Fonoberov
IPC分类号： G01Q10/02
CPC分类号： G01Q10/02 , G01Q10/065 , G01Q30/06
摘要： A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.
摘要翻译：扫描探针显微镜（SPM）系统及相关方法。所述SPM系统具有适于与样本的纳米尺度特征相互作用以及在目标区域内扫描以产生所述目标区域的三维图像的探针，所述系统根据所述样本维持所述样本感兴趣的多个特征的位置信息特定于样本的坐标系，其中所述SPM系统被配置为根据SPM坐标系来调整所述探针相对于所述样本的定位，所述SPM系统还被配置为管理所述样本特定坐标系和所述SPM之间的动态关系通过确定样本特定坐标系和SPM坐标系之间的一组对准误差来对坐标系进行校正，并对SPM坐标系进行校正以偏移所确定的对准误差。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式