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    • 87. 发明授权
    • Electrochemical sensor
    • 电化学传感器
    • US5900128A
    • 1999-05-04
    • US866103
    • 1997-05-30
    • Walter GumbrechtBernhard MontagReinhard Kress
    • Walter GumbrechtBernhard MontagReinhard Kress
    • G01N27/414G01N27/404
    • G01N27/4141
    • An electrochemical sensor is provided on a substrate whereby a precious metal layer is arranged in an inner region under an electrolyte layer that is surrounded by a polyimide structure. A hydrophobic layer is surrounded by an outer polyimide structure and further is located on top of the electrolyte layer and extends laterally beyond the electrolyte layer. A lead for electrical connection of the precious metal layer extends under the hydrophobic layer laterally from the electrolyte layer is sealed from the hydrophobic layer by a protective layer. The protective layer prevents the penetration of analysis fluid into the gap between the hydrophobic layer and the surrounding polyimide structure into the inner region of the sensor. The material of the protective layer is preferably a double layer of PECVD oxide and PECVD nitride.
    • 电化学传感器设置在基板上,由此在由聚酰亚胺结构包围的电解质层下面的内部区域中布置有贵金属层。 疏水层被外聚酰亚胺结构包围,并且还位于电解质层的顶部并且横向延伸超过电解质层。 在电解质层侧向疏水层下延伸的贵金属层的电连接用引线用保护层与疏水层密封。 保护层防止分析流体渗透到疏水层和周围聚酰亚胺结构之间的间隙中,进入传感器的内部区域。 保护层的材料优选为双层PECVD氧化物和PECVD氮化物。