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81. 发明授权

US08451008B2 Alignment correction system and method of use 失效
标题翻译：对准校正系统及其使用方法
公开(公告)号：US08451008B2
公开(公告)日：2013-05-28
申请号：US12499419
申请日：2009-07-08
申请人： Robert J. Foster , Lin Zhou , Shahin Zangodie , Roger M. Young , Clemente Bottini
发明人： Robert J. Foster , Lin Zhou , Shahin Zangodie , Roger M. Young , Clemente Bottini
IPC分类号： G01R31/08
CPC分类号： G01B7/30 , G05B15/02 , H01L21/68
摘要： A system and method is provided for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool that includes at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact.
摘要翻译：提供了一种用于校正工具上的产品对准的系统和方法，更具体地，涉及用于校正工具的卡盘上的晶片对准的系统和方法。该系统是一种工具，其包括在工具的圆周附近的至少一个接触件和靠近至少一个触点的接地触头。

82. 发明申请

US20130101378A1 Device Used for Capturing Micro-Particles and a Micro-Particles Transporting Equipment Provided with the Device Thereof 有权
标题翻译：用于捕获微粒的装置及其装置所提供的微粒输送装置
公开(公告)号：US20130101378A1
公开(公告)日：2013-04-25
申请号：US13807490
申请日：2011-03-18
申请人： Xiaomin Cheng , Lin Zhou , Hongchao Fan
发明人： Xiaomin Cheng , Lin Zhou , Hongchao Fan
IPC分类号： B25J15/00 , B25J11/00
CPC分类号： B25J15/00 , B25J9/104 , B25J11/00
摘要： A device used for capturing micro-particles, which comprises a pressure regulator, a micro-jet nozzle, and a hydraulic device for providing injection liquid for the micro-jet nozzle; wherein the micro-jet nozzle is provided with an annular jet hole, the annular jet hole having a bottom end, a top end, an inner diameter, an entrance port located at the top end, and an injection port located at the bottom end, the output of the pressure regulator is connected to the entrance port of the micro-jet nozzle. Compared with the prior art, in the present invention, the liquid is taken as the medium, a kind of upward support on the micro-particles and a flow-around lift force perpendicular to the jet direction are generated by the micro-jet nozzle with the annular jet hole, which jointly act on the micro-particles, so as to achieve the micro-particle capture.
摘要翻译：用于捕获微粒的装置，其包括压力调节器，微喷嘴和用于为微喷嘴提供喷射液体的液压装置; 其中所述微喷嘴设置有环形喷射孔，所述环形喷射孔具有底端，顶端，内径，位于所述顶端的入口和位于所述底端的喷射口，压力调节器的输出端连接到微喷嘴的入口。与现有技术相比，在本发明中，将液体作为介质，通过微喷嘴产生一种微粒上的向上支撑和垂直于喷射方向的流动升力，环形喷射孔共同作用在微粒上，以实现微粒捕获。

83. 发明授权

US08144872B2 System and method for generating analog-digital mixed chaotic signal, encryption communication method thereof 有权
标题翻译：用于产生模数混合混沌信号的系统和方法，其加密通信方法
公开(公告)号：US08144872B2
公开(公告)日：2012-03-27
申请号：US12163744
申请日：2008-06-27
申请人： Hanping Hu , Zuxi Wang , Xiaogang Wu , Lin Zhou , Ziqi Zhu , Jiwei Wei , Jie Yang , Pengyu Lu , Zhibin Zheng
发明人： Hanping Hu , Zuxi Wang , Xiaogang Wu , Lin Zhou , Ziqi Zhu , Jiwei Wei , Jie Yang , Pengyu Lu , Zhibin Zheng
IPC分类号： H04L9/00 , G06F21/00
CPC分类号： H04L9/001 , H04L9/12
摘要： A system and method for generating analog-digital mixed chaotic signal and an encryption communication method thereof are provided. In the system and method, the complementarity between continuous chaotic systems (12, 22) and digital chaotic systems (11, 21) are reasonably utilized. In specific, the digital chaotic systems, which are separated from each other, control the local continuous chaotic systems respectively, so as to enable the continuous chaotic systems, which are also separated from each other, to stably and synchronously work for a long time. Thus, there is no need to transmit the synchronizing signal, and as a result the anti-attack capability is increased effectively. Further, the continuous chaotic systems disturb the local digital chaotic systems to prevent the digital chaotic systems from degradation. This compensates the drawbacks of digital chaotic systems.
摘要翻译：提供了一种用于产生模数混合混沌信号的系统和方法及其加密通信方法。在系统和方法中，合理利用连续混沌系统（12,22）和数字混沌系统（11,21）之间的互补性。具体来说，相互分离的数字混沌系统分别控制局部连续混沌系统，使连续混沌系统彼此分离，能够长时间稳定同步工作。因此，不需要发送同步信号，结果有效地提高了防攻击能力。此外，连续混沌系统扰乱了本地数字混沌系统，以防止数字混沌系统的退化。这弥补了数字混沌系统的缺点。

84. 发明申请

US20120042422A1 VARIABLE PIXEL DENSITY IMAGING 有权
标题翻译：可变像素密度成像
公开(公告)号：US20120042422A1
公开(公告)日：2012-02-16
申请号：US12854122
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
IPC分类号： G01Q10/00 , G06K9/00
CPC分类号： G01Q10/06
摘要： A method and associated apparatus for topographically characterizing a workpiece. The workpiece is scanned with a scanning probe along a first directional grid, thereby scanning a reference surface and an area of interest subportion of the reference surface, at a variable pixel density including a first pixel density outside the area of interest and a second pixel density inside the area of interest to derive a first digital file characterizing topography of the workpiece. The workpiece is further scanned along the reference surface and the area of interest with the scanning probe along a second directional grid that is substantially orthogonal to the first directional grid and at a constant pixel density to derive a second digital file characterizing topography of the workpiece. A processor executes computer-readable instructions stored in memory that generate a topographical profile of the workpiece in relation to the first and second digital files.
摘要翻译：一种用于表征工件的方法和相关设备。用扫描探针沿着第一方向网格扫描工件，从而以包括感兴趣区域外的第一像素密度的可变像素密度扫描参考表面的感兴趣部分区域和第二像素密度在感兴趣的区域内导出表征工件的形貌的第一数字文件。沿着与第一方向栅格基本正交并且处于恒定像素密度的第二方向栅格，沿着参考表面和扫描探测器的感兴趣区域进一步扫描工件，以导出表征工件的形貌的第二数字文件。处理器执行存储在存储器中的计算机可读指令，其生成相对于第一和第二数字文件的工件的地形轮廓。

85. 发明申请

US20110138505A1 SCANNING PROBE MICROSCOPY EMPLOYING CORRELATION PATTERN RECOGNITION 失效
标题翻译：扫描探针显微镜使用相关图案识别
公开(公告)号：US20110138505A1
公开(公告)日：2011-06-09
申请号：US12854112
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
IPC分类号： G01Q30/04 , G01Q10/00
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
摘要翻译：一种用于地形学表征工件的装置和相关方法。扫描探头从工件获取地形数据。处理器控制扫描探针扫描工件的参考表面以导出第一数字文件并扫描包括参考表面的至少一部分的感兴趣的表面以导出第二数字文件。相关模式识别逻辑将第一和第二数字文件集成在一起以将参考表面与感兴趣的表面对齐。

86. 发明申请

US20100235956A1 ATOMIC FORCE MICROSCOPY TRUE SHAPE MEASUREMENT METHOD 有权
标题翻译：原子力显微镜真实形状测量方法
公开(公告)号：US20100235956A1
公开(公告)日：2010-09-16
申请号：US12404849
申请日：2009-03-16
申请人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
发明人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
IPC分类号： G12B21/08
CPC分类号： G01Q30/06
摘要： An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.
摘要翻译：原子力显微镜（AFM）方法包括扫描结构的表面以产生第一结构图像的扫描探针。然后将结构相对于扫描探针旋转90°。扫描探针再次扫描结构的表面以产生第二结构图像。第一和第二结构图像被组合以产生结构的表面积的最佳拟合图像。使用相同的方法来产生平坦标准的最佳拟合图像。从结构的最佳拟合图像中减去平面标准的最佳拟合图像，以获得其中Z方向耗尽误差大大降低或消除的真实地形图像。

87. 发明授权

US07569112B2 Scanning probe apparatus with in-situ measurement probe tip cleaning capability 失效
标题翻译：扫描探头设备具有原位测量探头尖端清洁能力
公开(公告)号：US07569112B2
公开(公告)日：2009-08-04
申请号：US11687033
申请日：2007-03-16
申请人： Lin Zhou , Dmitriy Shneyder
发明人： Lin Zhou , Dmitriy Shneyder
IPC分类号： B08B11/00 , B08B6/00 , G12B21/00 , G01N13/10 , H01J99/00
CPC分类号： G01Q70/00
摘要： A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus.
摘要翻译：扫描探针装置包括测量探针尖端和相对于测量探针尖端可移动地定位的辅助探针尖端。测量探针尖端和辅助探针尖端可以并置，使得可以在测量探针尖端和辅助探针尖端之间进行放电以从测量探针尖端去除污染物。辅助探针尖端可以与扫描探针装置内的样品支撑板成一体。

88. 发明授权

US07485859B2 Charged beam apparatus and method that provide charged beam aerial dimensional map 失效
标题翻译：带电波束装置和方法，提供带电波束空间立体图
公开(公告)号：US07485859B2
公开(公告)日：2009-02-03
申请号：US11736191
申请日：2007-04-17
申请人： Lin Zhou , Eric Peter Solecky
发明人： Lin Zhou , Eric Peter Solecky
IPC分类号： G01R27/00 , F41G1/30
CPC分类号： G01N23/225
摘要： A charged beam apparatus, such as an electron microscopy apparatus, and a method for determining an aerial dimensional map of a charged beam within the charged beam apparatus, each use a test structure that includes a feature located upon a substrate. One of the feature and the substrate is conductive and the other of the feature and the structure is non conductive. The charged beam within the charged beam apparatus is scanned in a plurality of non-parallel linear directions with respect to the substrate and the feature to provide a corresponding plurality of current versus position response curves from which may be determined the aerial dimensional map of the charged beam within the charged beam apparatus.
摘要翻译：带电波束装置，例如电子显微镜装置，以及用于确定带电波束装置内的带电波束的空间维度图的方法，每个使用包括位于基底上的特征的测试结构。特征和衬底之一是导电的，另一个特征和结构是不导电的。带电波束装置内的带电波束相对于基底以多个非平行线性方向被扫描，并且该特征以提供对应的多个电流对位置响应曲线，从该电流对位置响应曲线可以确定带电波束的空间维度图在带电束装置内的光束。

89. 发明申请

US20080276696A1 ATOMIC FORCE MICROSCOPY OF SCANNING AND IMAGE PROCESSING 有权
标题翻译：原子力显微镜扫描和图像处理
公开(公告)号：US20080276696A1
公开(公告)日：2008-11-13
申请号：US12179688
申请日：2008-07-25
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
IPC分类号： G01B5/28
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
摘要翻译：使用原子力显微镜产生结构的形貌。扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。然后基于扫描生成结构的轮廓。为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。

90. 发明申请

US20080223118A1 SCANNING PROBE APPARATUS WITH IN-SITU MEASUREMENT PROBE TIP CLEANING CAPABILITY 失效
标题翻译：具有现场测量的扫描探测器探头提示清洁能力
公开(公告)号：US20080223118A1
公开(公告)日：2008-09-18
申请号：US11687033
申请日：2007-03-16
申请人： Lin Zhou , Dmitriy Shneyder
发明人： Lin Zhou , Dmitriy Shneyder
IPC分类号： G01B5/28
CPC分类号： G01Q70/00
摘要： A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus.
摘要翻译：扫描探针装置包括测量探针尖端和相对于测量探针尖端可移动地定位的辅助探针尖端。测量探针尖端和辅助探针尖端可以并置，使得可以在测量探针尖端和辅助探针尖端之间进行放电以从测量探针尖端去除污染物。辅助探针尖端可以与扫描探针装置内的样品支撑板成一体。

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