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    • 82. 发明授权
    • Semiconductor pressure sensor utilizing capacitance change
    • 半导体压力传感器利用电容变化
    • US06631645B1
    • 2003-10-14
    • US09653165
    • 2000-09-01
    • Shinya SatouKeiji HanzawaSatoshi ShimadaNaohiro MonmaAtsushi Miyazaki
    • Shinya SatouKeiji HanzawaSatoshi ShimadaNaohiro MonmaAtsushi Miyazaki
    • G01L912
    • G01L9/0073G01L9/125
    • An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element and a reference capacitance element. This semiconductor pressure sensor has: a pressure sensitive capacitance element having an electrostatic capacitance Cs changing with a pressure to be detected; a reference capacitance element having an electrostatic capacitance Cr not changing with the pressure; and a unit for detecting the pressure by outputting a signal corresponding to a ratio between the capacitances Cs and Cr, wherein an initial value Cr0 of the capacitance Cr and an initial value Cs0 of the capacitance Cs are defined by 1.2
    • 提高半导体压力传感器的输出的S / N比,该传感器是用于根据压敏电容元件的电容与参考电容元件之间的比率产生输出的静电电容式压力传感器。 该半导体压力传感器具有:静电电容Cs随着要检测的压力而变化的压敏电容元件; 具有不随压力变化的静电电容Cr的参考电容元件; 以及用于通过输出对应于电容Cs和Cr之间的比率的信号来检测压力的单元,其中电容Cr的初始值Cr 0 和初始值Cs 电容Cs的 0 由1.2 0 / Cs 0 <1.8。 通过改变两个元件的电极面积等来调节CR 0 / Cs 0 的比例。 以这种方式,可以获得较大的压力表输出DeltaV,降低放大器的放大系数,并提供传感器的高精度。
    • 85. 发明授权
    • Sensor adjusting circuit
    • 传感器调节电路
    • US06188340B1
    • 2001-02-13
    • US09167984
    • 1998-10-08
    • Masahiro MatsumotoSatoshi ShimadaSeikou SuzukiAkihiko SaitoAtsushi MiyazakiKeiji Hanzawa
    • Masahiro MatsumotoSatoshi ShimadaSeikou SuzukiAkihiko SaitoAtsushi MiyazakiKeiji Hanzawa
    • H03M100
    • G01D3/022G01D3/02
    • A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.
    • 提供了一种用于调整数字传感器的传感器调节电路,其电路规模小并且可以在宽的调节范围内保持高精度。 一种传感器调节电路,用于调节从传感器输入的模拟输入信号,并根据要感测的物理量将其输出为另一个模拟输出信号,包括:第一模数转换器,具有模拟积分器(2),用于 积分模拟输入信号,比较器(3),用于将模拟积分器的输出与预定值进行比较;以及D / A转换器(7),用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器(5)。
    • 88. 发明授权
    • Semiconductor type pressure sensor
    • 半导体式压力传感器
    • US6122974A
    • 2000-09-26
    • US139273
    • 1998-08-25
    • Shinya SatoSeikou SuzukiShinichi YamaguchiYoshiyuki SasadaMasayuki MikiMasanori KubotaAtsushi Miyazaki
    • Shinya SatoSeikou SuzukiShinichi YamaguchiYoshiyuki SasadaMasayuki MikiMasanori KubotaAtsushi Miyazaki
    • G01L9/04G01L9/00G01L7/08
    • G01L19/147
    • A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low pressures are formed on a silicon board, the pressure sensing sections each com ing an outer frame portion, a diaphragm portion, a strain gauge portion and an electrode portion. The silicon board side with the strain gauge portions formed thereon and an insulating substrate having electrode take-out portions are bonded together in such a manner that the strain gauge portions are hermetically sealed and that the electrode portions on the silicon board and the electrode take-out portions of the insulating substrate are electrically connected with each other, to constitute a pressure sensing unit. The pressure sensing unit, a low-melting glass and a stem are laminated together in such a manner that lead pins are electrically bonded by solder to the electrode portions of the silicon board through the electrode take-out portions of the insulating substrate. In this state, the low-melting glass is melted to bond the pressure sensing unit and the stem with each other.
    • 要提供耐压性能优异且能够从低压到高压范围覆盖的压力传感器作为测量范围。 用于高压和低压的多个压力感测部分形成在硅板上,每个压力感测部分均设有外框部分,隔膜部分,应变计部分和电极部分。 在其上形成有应变计部分的硅板侧和具有电极取出部分的绝缘基板以使应变计部分气密密封的方式接合在一起,并且硅板和电极上的电极部分 绝缘基板的外侧部分彼此电连接,以构成压力感测单元。 将压力感测单元,低熔点玻璃和阀杆以这样的方式层压在一起,使得引脚通过焊料通过绝缘基板的电极取出部分与硅板的电极部分电连接。 在这种状态下,低熔点玻璃被熔化,以将压力感测单元和杆彼此粘合。