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    • 82. 发明申请
    • THIN FILM DEPOSITION APPARATUS
    • 薄膜沉积装置
    • US20100310768A1
    • 2010-12-09
    • US12795001
    • 2010-06-07
    • Choong-Ho LeeJung-Min Lee
    • Choong-Ho LeeJung-Min Lee
    • C23C16/455C23C16/00
    • C23C14/243C23C14/044
    • A thin film deposition apparatus capable of forming a precise deposition pattern on a large substrate includes a deposition source; a first nozzle disposed at a side of the deposition source having a plurality of first slits; a second nozzle disposed opposite to the first nozzle having a plurality of second slits; and a second nozzle frame bound to the second nozzle so as to support the second nozzle. The second nozzle frame includes two first frame portions spaced apart from each other and disposed in a direction in which the plurality of second slits are arranged, and two second frame portions each connecting the two first frame portions to each other, wherein the second frame portions are curved in the direction in which the plurality of second slits are arranged, so as to form arches.
    • 能够在大的基板上形成精确的沉积图案的薄膜沉积装置包括沉积源; 设置在沉积源侧的第一喷嘴具有多个第一狭缝; 与所述第一喷嘴相对设置的具有多个第二狭缝的第二喷嘴; 以及与第二喷嘴结合以支撑第二喷嘴的第二喷嘴框架。 第二喷嘴框架包括彼此间隔开并沿着布置多个第二狭缝的方向设置的两个第一框架部分,以及将两个第一框架部分彼此连接的两个第二框架部分,其中第二框架部分 在多个第二狭缝的排列方向上弯曲,形成拱形。
    • 83. 发明申请
    • METHOD AND APPARATUS FOR CLEANING ORGANIC DEPOSITION MATERIALS
    • 清洁有机沉积材料的方法和装置
    • US20100310759A1
    • 2010-12-09
    • US12795896
    • 2010-06-08
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • C23C16/04B05D5/06
    • C23C14/042B08B7/0035B08B7/0042C23C14/564H01L51/56
    • A method of cleaning off organic deposition material accumulated on a mask includes forming an organic deposition material pattern on a substrate using the mask, which includes a plurality of slots, in a deposition chamber including a deposition source; transporting the mask to a stock chamber that is maintained at a vacuum and adjacent to the deposition chamber; and partially cleaning off the organic deposition material accumulated along the boundaries of the slots of the mask in the stock chamber. A system to clean off an organic deposition material accumulated on a mask having a plurality of slots, includes a deposition chamber including a deposition source; and a stock chamber that is maintained at substantially the same vacuum as the deposition chamber and includes a cleaning device that cleans off the organic deposition material accumulated on the mask.
    • 清理积聚在掩模上的有机沉积材料的方法包括:在包括沉积源的沉积室中,使用包括多个槽的掩模在基板上形成有机沉积材料图案; 将掩模运送到保持在真空并邻近沉积室的储存室; 并且部分地清除沿着储存室中的掩模的槽的边界积聚的有机沉积材料。 一种清除积聚在具有多个狭缝的掩模上的有机沉积材料的系统,包括:沉积室,包括沉积源; 以及保持在与沉积室基本相同的真空的储存室,并且包括清除积聚在掩模上的有机沉积材料的清洁装置。
    • 86. 发明申请
    • Nonvolatile Memory Device
    • 非易失性存储器件
    • US20090315094A1
    • 2009-12-24
    • US12437773
    • 2009-05-08
    • Jong-Ho LimChoong-Ho LeeHye-Jin Cho
    • Jong-Ho LimChoong-Ho LeeHye-Jin Cho
    • H01L29/788
    • H01L27/11551
    • Provided is a nonvolatile memory device having a three dimensional structure. The nonvolatile memory device includes a plurality of stacked semiconductor layers and a plurality of memory cell transistors which is formed on each of a plurality of semiconductor layers and serially connected. Memory cell transistors disposed on different semiconductor layers are serially connected to include one cell string forming a current path in a plurality of semiconductor layers, a first selection transistor serially connected to one edge portion of the cell string and a second selection transistor serially connected to the other edge portion of the cell string.
    • 具有三维结构的非易失性存储装置。 非易失性存储器件包括多个堆叠的半导体层和形成在多个半导体层中的每一个上并且串联连接的多个存储单元晶体管。 配置在不同的半导体层上的存储单元晶体管被串联连接以包括在多个半导体层中形成电流路径的一个单元串,串联连接到单元串的一个边缘部分的第一选择晶体管和串联连接到单元串的第二选择晶体管 单元格串的其他边缘部分。
    • 87. 发明授权
    • Non-volatile memory device and method of manufacturing the same
    • 非易失性存储器件及其制造方法
    • US07615437B2
    • 2009-11-10
    • US12153071
    • 2008-05-13
    • Suk-Kang SungKyu-Charn ParkChoong-Ho Lee
    • Suk-Kang SungKyu-Charn ParkChoong-Ho Lee
    • H01L21/8238
    • H01L21/743H01L21/28123H01L27/115H01L27/11521H01L27/11524
    • A method of manufacturing a non-volatile memory device includes sequentially depositing a first insulation layer, a charge storage layer, and a second insulation layer on a substrate, forming a first opening through the resultant structure to expose the substrate, forming second and third openings through the second insulation layer to form a second insulation layer pattern, forming a conductive layer on the second insulation layer pattern, forming a photoresist pattern structure on the conductive layer, and forming simultaneously a common source line, at least one ground selection line, at least one string selection line, and a plurality of gate structures on the substrate by etching through the photoresist pattern structure, wherein the common source line and the gate structures are formed simultaneously on a substantially same level and of substantially same components.
    • 一种制造非易失性存储器件的方法包括在衬底上依次沉积第一绝缘层,电荷存储层和第二绝缘层,形成通过所得结构的第一开口以露出衬底,形成第二和第三开口 通过第二绝缘层形成第二绝缘层图案,在第二绝缘层图案上形成导电层,在导电层上形成光致抗蚀剂图形结构,同时形成共同的源极线,至少一个接地选择线, 至少一个串选择线,以及通过蚀刻通过光致抗蚀剂图案结构在衬底上的多个栅极结构,其中公共源极线和栅极结构同时形成在基本相同的水平面上并且基本上相同的部件。
    • 88. 发明授权
    • Non-volatile memory device, method of manufacturing the same, and method of operating the same
    • 非易失性存储器件,其制造方法及其操作方法
    • US07602633B2
    • 2009-10-13
    • US11946737
    • 2007-11-28
    • Byung-Yong ChoiChoong-Ho LeeKyu-Charn Park
    • Byung-Yong ChoiChoong-Ho LeeKyu-Charn Park
    • G11C11/00
    • H01L29/685
    • A non-volatile memory device includes a substrate, resistance patterns, a gate dielectric layer, a gate electrode pattern, a first impurity region and a second impurity region. The substrate has recesses. The recesses are filled with the resistance patterns. The resistance patterns include a material having a resistance that is variable in accordance with a voltage applied thereto. The gate dielectric layer is formed on the substrate. The gate electrode pattern is formed on the gate dielectric layer. The first and second impurity regions are formed in the substrate. The first impurity region and the second impurity region contact side surfaces of the resistance patterns. Further, the resistance patterns, the first impurity region and the second impurity region define a channel region. Thus, the non-volatile memory device may store data using a variable resistance of the resistance patterns so that the non-volatile memory device may have excellent operational characteristics.
    • 非易失性存储器件包括衬底,电阻图案,栅极介电层,栅极电极图案,第一杂质区域和第二杂质区域。 基板有凹槽。 凹槽中填充有电阻图案。 电阻图案包括具有根据施加到其上的电压而可变的电阻的材料。 栅极电介质层形成在基板上。 栅极电极图案形成在栅极介电层上。 在衬底中形成第一和第二杂质区。 电阻图案的第一杂质区和第二杂质区接触侧表面。 此外,电阻图案,第一杂质区域和第二杂质区域限定沟道区域。 因此,非易失性存储器件可以使用电阻图案的可变电阻来存储数据,使得非易失性存储器件可以具有优异的操作特性。
    • 90. 发明授权
    • Non-volatile memory device and methods of forming the same
    • 非易失性存储器件及其形成方法
    • US07465985B2
    • 2008-12-16
    • US11580086
    • 2006-10-13
    • Byung-Yong ChoiChoong-Ho LeeDong-Gun Park
    • Byung-Yong ChoiChoong-Ho LeeDong-Gun Park
    • H01L21/334
    • H01L27/115H01L27/11519H01L27/11526H01L27/11529
    • A non-volatile memory device and a method of forming the same are provided. The non-volatile memory device may include a cell isolation pattern and a semiconductor pattern sequentially stacked on a predetermined or given region of a semiconductor substrate, a cell gate line on the semiconductor pattern and on a top surface of the semiconductor substrate on one side of the cell isolation pattern, a multi-layered trap insulation layer between the cell gate line and the semiconductor substrate, and the cell gate line and the semiconductor pattern, a first impurity diffusion layer in the semiconductor substrate on both sides of the cell gate line and a second impurity diffusion layer in the semiconductor pattern on both sides of the cell gate line.
    • 提供了一种非易失性存储器件及其形成方法。 非易失性存储器件可以包括依次层叠在半导体衬底的预定或给定区域上的单元隔离图案和半导体图案,半导体图案上的单元栅极线和半导体衬底的一侧的顶表面上的半导体图案 电池隔离图案,单元栅极线和半导体衬底之间的多层陷阱绝缘层,以及单元栅极线和半导体图案,在单元栅极线的两侧的半导体衬底中的第一杂质扩散层和 位于单元栅极线两侧的半导体图案中的第二杂质扩散层。