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    • 2. 发明授权
    • Organic light-emitting display device and thin film deposition apparatus for manufacturing the same
    • 有机发光显示装置及其制造用薄膜蒸镀装置
    • US08907326B2
    • 2014-12-09
    • US12814816
    • 2010-06-14
    • Jung-Min LeeChoong-Ho Lee
    • Jung-Min LeeChoong-Ho Lee
    • H01L29/08C23C14/04C23C14/24H01L51/00H01L27/32H01L51/56
    • H01L51/0011C23C14/042C23C14/044C23C14/243H01L27/3244H01L51/56
    • A thin film deposition apparatus that can be used to manufacture large substrates on a mass scale and that improves manufacturing yield, and an organic light-emitting display device manufactured using the thin film deposition apparatus. The organic light-emitting display device includes: a substrate including a plurality of sub-deposition areas arranged parallel to each other; at least one thin film transistor formed on the substrate, the at least one thin film transistor comprising a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes contacting the semiconductor active layer; a plurality of pixel electrodes formed on the thin film transistor; a plurality of organic layers formed on each of the pixel electrodes; and a counter electrode formed on the organic layers, wherein the plurality of organic layers lie in each of the sub-deposition areas and have a larger shadow zone the further a distance from a center of the corresponding deposition area.
    • 可以用于大规模制造大型基板并提高制造成品率的薄膜沉积装置以及使用薄膜沉积装置制造的有机发光显示装置。 有机发光显示装置包括:包括彼此平行布置的多个次沉积区域的基板; 形成在所述基板上的至少一个薄膜晶体管,所述至少一个薄膜晶体管包括半导体有源层,与半导体有源层绝缘的栅极电极以及与半导体活性层接触的源极和漏极; 形成在所述薄膜晶体管上的多个像素电极; 形成在每个像素电极上的多个有机层; 以及形成在所述有机层上的对电极,其中所述多个有机层位于每个所述次沉积区域中,并且具有比相应的沉积区域的中心更远的阴影区域。
    • 3. 发明授权
    • Method and apparatus for cleaning organic deposition materials
    • 用于清洁有机沉积材料的方法和装置
    • US08802200B2
    • 2014-08-12
    • US12795896
    • 2010-06-08
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • B05D3/00
    • C23C14/042B08B7/0035B08B7/0042C23C14/564H01L51/56
    • A method of cleaning off organic deposition material accumulated on a mask includes forming an organic deposition material pattern on a substrate using the mask, which includes a plurality of slots, in a deposition chamber including a deposition source; transporting the mask to a stock chamber that is maintained at a vacuum and adjacent to the deposition chamber; and partially cleaning off the organic deposition material accumulated along the boundaries of the slots of the mask in the stock chamber. A system to clean off an organic deposition material accumulated on a mask having a plurality of slots, includes a deposition chamber including a deposition source; and a stock chamber that is maintained at substantially the same vacuum as the deposition chamber and includes a cleaning device that cleans off the organic deposition material accumulated on the mask.
    • 清理积聚在掩模上的有机沉积材料的方法包括:在包括沉积源的沉积室中,使用包括多个槽的掩模在基板上形成有机沉积材料图案; 将掩模运送到保持在真空并邻近沉积室的储存室; 并且部分地清除沿着储存室中的掩模的槽的边界积聚的有机沉积材料。 一种清除积聚在具有多个狭缝的掩模上的有机沉积材料的系统,包括:沉积室,包括沉积源; 以及保持在与沉积室基本相同的真空的储存室,并且包括清除积聚在掩模上的有机沉积材料的清洁装置。
    • 4. 发明授权
    • Thin film deposition apparatus
    • 薄膜沉积装置
    • US08790750B2
    • 2014-07-29
    • US12820270
    • 2010-06-22
    • Jung-Min LeeChoong-Ho Lee
    • Jung-Min LeeChoong-Ho Lee
    • C23C16/44
    • C23C14/042C23C14/044C23C14/12C23C14/243
    • A thin film deposition apparatus that can be simply applied to manufacture a thin film on a large substrate on a mass scale and that improves manufacturing yield includes a deposition source; a first nozzle disposed at a side of the deposition source and including first slits arranged in a first direction; a second nozzle assembly disposed opposite to the deposition source and including strings arranged in the first direction; and a barrier wall assembly including barrier walls disposed between the first nozzle and the second nozzle assembly to partition a space between the first nozzle and the second nozzle assembly into a plurality of sub-deposition spaces. The second nozzle assembly is movable relative to the target along a plane parallel to a surface of the target, or the target is movable relative to the second nozzle along the plane.
    • 可以简单地应用于在大型基板上以大规模制造薄膜并且提高制造成品率的薄膜沉积装置包括沉积源; 第一喷嘴,其设置在所述沉积源的一侧,并且包括沿第一方向布置的第一狭缝; 第二喷嘴组件,其布置成与所述沉积源相对并且包括沿所述第一方向布置的弦; 以及阻挡壁组件,其包括设置在第一喷嘴和第二喷嘴组件之间的阻挡壁,以将第一喷嘴和第二喷嘴组件之间的空间分隔成多个次沉积空间。 第二喷嘴组件可以沿着平行于靶的表面的平面相对于靶移动,或者靶可沿着平面相对于第二喷嘴移动。
    • 6. 发明授权
    • Mask frame assembly for thin film deposition
    • 用于薄膜沉积的面罩框组件
    • US08746169B2
    • 2014-06-10
    • US12986894
    • 2011-01-07
    • Choong-Ho LeeJung-Min LeeYoon-Chan Oh
    • Choong-Ho LeeJung-Min LeeYoon-Chan Oh
    • B05C11/00C25D1/10C23C16/00C23C14/04H01L51/00C23C14/12
    • C23C14/042C23C14/12C25D1/10G03F1/10H01L51/0011
    • A mask frame assembly for thin film deposition includes a frame having an opening and at least two unit masks having end parts in a longitudinal direction fixed to the frame, each of the unit masks comprising first regions and second regions, the first regions having unit masking patterns, each of the unit masking patterns having a plurality of openings for thin film deposition, the unit masking pattern being spaced apart from each other, each of the second regions being interposed between a pair of adjacent ones of the first regions, the first regions having a first thickness from a first surface of the unit masks, and at least a portion of the second regions having a second thickness from a second surface of the unit masks opposite to the first surface of the unit masks, such that the first regions and the at least the portion of the second regions are offset from each other in a direction normal to the first and second surfaces. A plurality of unit masks are each half etched from different surfaces and thus a height of wrinkles generated in the mask of the mask frame assembly may be reduced.
    • 用于薄膜沉积的掩模框架组件包括具有开口的框架和至少两个单元掩模,其具有沿着固定到框架的纵向方向上的端部,每个单元掩模包括第一区域和第二区域,第一区域具有单元屏蔽 图案,每个单位掩模图案具有多个用于薄膜沉积的开口,单元掩模图案彼此间隔开,每个第二区域插入在一对相邻的第一区域之间,第一区域 具有来自所述单元掩模的第一表面的第一厚度,并且所述第二区域的至少一部分具有来自所述单元的第二表面的第二厚度,掩模与所述单元掩模的第一表面相反,使得所述第一区域和 所述第二区域的至少所述部分在垂直于所述第一和第二表面的方向上彼此偏移。 多个单元掩模每个从不同的表面被半蚀刻,因此可以减少在掩模框组件的掩模中产生的皱纹的高度。
    • 7. 发明授权
    • Display device and organic light emitting diode display
    • 显示设备和有机发光二极管显示
    • US08674344B2
    • 2014-03-18
    • US13064865
    • 2011-04-21
    • Jung-Min LeeChoong-Ho LeeKie Hyun Nam
    • Jung-Min LeeChoong-Ho LeeKie Hyun Nam
    • H01L29/08G09G3/06
    • H01L51/5246G06F1/1601
    • A display device includes: a display substrate; a display formed on the display substrate; an encapsulation substrate affixed to the display substrate by an adhering layer surrounding the display, the display substrate including a composite member including a resin matrix and a plurality of carbon fibers and an insulation member attached to an edge of the composite member and forming a through hole; a metal layer positioned on a side of the encapsulation substrate facing the substrate; and a conductive connector filling the through hole and contacting the metal layer. The composite member is stacked with at least two layers with different sizes, and the insulation member contacts sides of the at least two layers and has the same thickness as the composite member.
    • 显示装置包括:显示基板; 显示基板上形成的显示器; 通过围绕显示器的粘附层固定在显示基板上的封装基板,显示基板包括具有树脂基体和多个碳纤维的复合部件,以及附着在复合部件的边缘上的绝缘部件,并形成通孔 ; 位于所述封装基板的面向所述基板的一侧的金属层; 以及填充所述通孔并与所述金属层接触的导电连接器。 复合构件层叠有至少两层不同的尺寸,并且绝缘构件接触至少两层的侧面并且具有与复合构件相同的厚度。