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    • 83. 发明授权
    • Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
    • 用于通过光刻技术来调整图案的尺寸的方法,以及带电粒子束写入方法
    • US08429575B2
    • 2013-04-23
    • US13275448
    • 2011-10-18
    • Jun YashimaJunichi SuzukiTakayuki Abe
    • Jun YashimaJunichi SuzukiTakayuki Abe
    • G06F17/50
    • H01J37/3174B82Y10/00B82Y40/00H01J37/3026
    • A method for resizing a pattern to be written by using lithography technique includes calculating a first dimension correction amount of a pattern for correcting a dimension error caused by a loading effect, for each small region made by virtually dividing a writing region of a target workpiece into meshes of a predetermined size, based on an area density of the each small region, calculating a second dimension correction amount in accordance with a line width dimension of the pattern to be written in the each small region, correcting the first dimension correction amount by using the second dimension correction amount, and resizing the line width dimension of the pattern by using a corrected first dimension correction amount, and outputting a result of the resizing.
    • 通过使用光刻技术来调整要写入的图案的尺寸的方法包括:对通过将目标工件的写入区域进行实际分割而形成的每个小区域,计算用于校正由负载效应引起的尺寸误差的图案的第一维度校正量 基于每个小区域的面积密度预定尺寸的网格,根据要写入每个小区域的图案的线宽度尺寸来计算第二维度校正量,通过使用来校正第一维度校正量 第二维度校正量,并且通过使用校正的第一维度校正量来调整图案的线宽度尺寸,并输出调整大小的结果。
    • 85. 发明授权
    • Wireless fire alarm system
    • 无线火灾报警系统
    • US08199002B2
    • 2012-06-12
    • US12523530
    • 2008-01-16
    • Junichi SuzukiTakashi SaekiKoji SakamotoMasanori Kurita
    • Junichi SuzukiTakashi SaekiKoji SakamotoMasanori Kurita
    • G08B1/08
    • G08B25/10G08B25/007
    • A power saving wireless fire alarm system has a master station and a plurality of battery-powered fire detecting terminals linked for wireless communication with each other. Upon detection of a fire occurrence at one of the fire detecting terminals, the fire detecting terminal transmit a fire detection message to a master station which in turn transmit a wake-up message to the other fire detecting terminals and thereafter a fire information message which starts a multiple synchronous communication between the master station and the fire detecting terminals. Each fire detecting terminal has a power controller which selects an intermittent reception mode of activating its own receiver only intermittently until receiving the wake-up message or information indicative of the fire occurrence, and select a constant operation mode thereafter to make the fire detecting terminals be ready for the multiple synchronous communication commenced by the fire information message from the master station.
    • 省电无线火灾报警系统具有主站和多个电池供电的火灾检测终端,用于彼此无线通信链接。 在火灾检测终端中的一个检测到火灾发生时,火情检测终端向主站发送火灾检测消息,主站又向其他火情检测终端发送唤醒消息,之后发送起火信息消息 主站和火灾检测终端之间的多重同步通信。 每个火灾检测终端具有功率控制器,其选择间歇地激活其自己的接收机的间歇接收模式,直到接收到唤醒消息或指示火灾发生的信息,并且此后选择恒定操作模式以使火情检测终端为 准备好从主站的火灾信息消息开始的多个同步通信。
    • 86. 发明授权
    • Beam dose computing method and writing method and record carrier body and writing apparatus
    • 光束剂量计算方法和写入方法和记录载体体和书写装置
    • US08103980B2
    • 2012-01-24
    • US12566525
    • 2009-09-24
    • Keiko EmiJunichi SuzukiTakayuki AbeTomohiro IljimaJun Yashima
    • Keiko EmiJunichi SuzukiTakayuki AbeTomohiro IljimaJun Yashima
    • G06F17/50G06F19/00G03F1/00G03C5/00G06K9/00
    • H01J37/3174B82Y10/00B82Y40/00H01J2237/31764H01J2237/31769
    • A beam dose computing method includes specifying a matrix of rows and columns of regions as divided from a surface area of a target object to include first, second and third regions of different sizes, the third regions being less in size than the first and second regions, determining first corrected doses of a charged particle beam for correcting fogging effects in the first regions, determining corrected size values for correcting pattern line width deviations occurring due to loading effects in the second regions, using said corrected size values in said second regions to create a map of base doses of the beam in respective ones of said second regions, using said corrected size values to prepare a map of proximity effect correction coefficients in respective ones of said second regions, using the maps to determine second corrected doses of said beam for correction of proximity effects in said third regions, and using the first and second corrected doses to determine an actual beam dose at each position on the surface of said object.
    • 光束剂量计算方法包括:从目标对象的表面区域划分出区域的行和列的矩阵,以包括不同大小的第一,第二和第三区域,第三区域的尺寸小于第一和第二区域 确定用于校正所述第一区域中的雾化效应的带电粒子束的第一校正剂量,确定用于校正由于所述第二区域中的负载效应而导致的图案线宽度偏差的校正大小值,使用所述第二区域中的所述校正大小值来创建 使用所述校正的大小值,在所述第二区域的各个区域中的所述光束的基本剂量的映射,以使用所述映射来确定所述第二区域中的相应的所述第二区域中的邻近效应校正系数的映射,以确定所述光束的第二校正剂量 校正所述第三区域中的邻近效应,并且使用第一和第二校正剂量来确定实际波束d 在所述对象的表面上的每个位置上。
    • 90. 发明授权
    • Charged particle beam writing method and apparatus and readable storage medium
    • 带电粒子束写入方法和装置以及可读存储介质
    • US07619230B2
    • 2009-11-17
    • US11535725
    • 2006-09-27
    • Junichi SuzukiKeiko EmiTakayuki AbeTomohiro IijimaHideyuki Tsurumaki
    • Junichi SuzukiKeiko EmiTakayuki AbeTomohiro IijimaHideyuki Tsurumaki
    • G21K5/10H01J37/00
    • H01J37/3174B82Y10/00B82Y40/00H01J37/3026H01J2237/31769
    • A charged particle beam writing method includes inputting pattern data for writing a writing region, predicting a writing time for writing the pattern of the pattern data, acquiring, by using a correlation among a time required from a writing start time, the predicted writing time and a base dose of a charged particle beam, a base dose of the charged particle beam after an optional time from a writing start in the case in which the pattern are written, acquiring, by using a correlation among the time required from the writing start time, the predicted writing time and a proximity effect correction coefficient, a proximity effect correction coefficient after an optional time from the writing start in the case in which the pattern are written, calculating, by using the base dose and the proximity effect correction coefficient after the optional time, an exposure dose of the charged particle beam after an optional time from a writing start in the writing time, and writing an optional position in the writing region by using the charged particle beam corresponding to the dose.
    • 带电粒子束写入方法包括输入用于写入写入区域的图形数据,预测用于写入图案数据的图案的写入时间,通过使用从写入开始时间所需的时间,预测写入时间和 带电粒子束的基本剂量,在写入图案的情况下从写入开始的任意时间之后的带电粒子束的基本剂量,通过使用写入开始时间所需的时间之间的相关性来获取 ,预测写入时间和接近效应校正系数,在写入图案的情况下从写入开始的可选时间之后的邻近效应校正系数,通过使用基本剂量和后面的邻近效应校正系数 可选时间,在写入时间从写入开始的可选时间之后的带电粒子束的曝光剂量,以及写入可选的posi 通过使用与剂量对应的带电粒子束,在写入区域中进行。