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    • 10. 发明申请
    • BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BODY AND WRITING APPARATUS
    • 光束剂量计算方法和书写方法和记录载体体系和书写装置
    • US20120108063A1
    • 2012-05-03
    • US13323986
    • 2011-12-13
    • Keiko EMIJunichi SUZUKITakayuki ABETomohiro IIJIMAJun YASHIMA
    • Keiko EMIJunichi SUZUKITakayuki ABETomohiro IIJIMAJun YASHIMA
    • H01L21/306
    • H01J37/3174B82Y10/00B82Y40/00H01J2237/31764H01J2237/31769
    • A beam dose computing method includes dividing a surface area of a target object into include first, second and third regions of different sizes, the third regions being less in size than the first and second regions, determining first corrected doses of a charged particle beam for correcting fogging effects in the first regions, determining corrected size values for correcting pattern line width deviations occurring due to loading effects in the second regions to create a map of base doses of the beam in respective of said second regions and to prepare a map of proximity effect correction coefficients in respective of said second regions, using the maps to determine second corrected doses of the beam for proximity effect correction in the third regions, and using the first and second corrected doses to determine an actual beam dose at each position on the surface of said object.
    • 射束剂量计算方法包括将目标物体的表面积分成包括不同尺寸的第一,第二和第三区域,第三区域的尺寸小于第一和第二区域,确定带电粒子束的第一校正剂量,以便 校正第一区域中的雾化效果,确定用于校正由于第二区域中的负载效应而发生的图案线宽度偏差的校正大小值,以在所述第二区域的各自中创建所述光束的基本剂量图,并且准备接近的图 在所述第二区域的各个区域中的效应校正系数,使用该图确定在第三区域中用于邻近效应校正的光束的第二校正剂量,并且使用第一和第二校正剂量来确定表面上每个位置处的实际光束剂量 的所述物体。