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71. 发明授权

US06937635B2 High rep-rate laser with improved electrodes 有权
标题翻译：高倍率激光器具有改进的电极
公开(公告)号：US06937635B2
公开(公告)日：2005-08-30
申请号：US10638247
申请日：2003-08-07
申请人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
发明人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko , Walter Gillespie , Curtis Rettig
IPC分类号： G03F7/20 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0979 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/20 , H01S3/09
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译：本发明提供了一种气体放电激光器，其具有至少一个长寿命的细长电极，用于在含氟激光气体中产生至少120亿个高压放电。在优选实施例中，至少一个电极由具有相对低的阳极腐蚀速率的第一材料和具有相对较高的阳极侵蚀速率的第二阳极材料构成。第一阳极材料位于电极的期望的阳极放电区域。第二阳极材料沿第一材料的至少两个长边位于第一阳极材料附近。在两种材料的激光冲蚀操作过程中，第二种材料的腐蚀速度较高，确保放电扩散到第二种材料上的任何趋势将迅速消除第二种材料，从而阻止放电扩散。在优选实施例中，阳极如上所述，阴极也是双材料电极，其中第一材料在放电区域为C26000黄铜，第二材料为C36000黄铜。脉冲功率系统以至少1KHz的速率提供电脉冲。鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

72. 发明授权

US5923693A Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper 失效
标题翻译：放电电极，其形状修复，准分子激光振荡器和步进机
公开(公告)号：US5923693A
公开(公告)日：1999-07-13
申请号：US807784
申请日：1997-02-28
申请人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
发明人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
IPC分类号： H01L21/027 , H01S3/038 , H01S3/0979 , H01S3/134 , H01S3/225 , H01S3/22
CPC分类号： H01S3/0388
摘要： A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.
摘要翻译：根据本发明的准分子激光振荡器用放电电极含有不大于10ppm的氧，并且根据本发明的恢复放电电极的形状的方法包括将惰性气体引入激光室并进行放电几秒钟。

73. 发明授权

US5384802A Laser apparatus 失效
标题翻译：激光设备
公开(公告)号：US5384802A
公开(公告)日：1995-01-24
申请号：US965004
申请日：1992-10-20
申请人： Boyd B. Bushman
发明人： Boyd B. Bushman
IPC分类号： H01S3/0979 , H01S3/09
CPC分类号： F41H13/0062 , F41H13/00 , H01S3/0979
摘要： A laser device utilizes a turbojet engine to provide a stimulation source. The turbojet engine is conventional, having a compression section, a fuel injection and igniting section, and an afterburner section. A pair of mirrors are mounted adjacent the hot gaseous stream produced by the turbojet engine. One of the mirrors is fully reflective and the other is partially reflective. The mirrors face each other and are perpendicular to the flow of the gaseous stream, creating a reflection path that is transverse to the flow. The high temperature creates excited molecules in the gaseous stream. This results in photons being emitted, which when striking other excited atoms which emit photons of the same wavelength, create additional photons to combine into a laser beam travelling along a reflection path between the mirrors. A portion of the laser beam passes through the partially reflecting mirror where it strikes an inclined mirror that aims the beam toward a desired target.
摘要翻译：激光装置利用涡轮喷气发动机来提供刺激源。涡轮喷气发动机是常规的，具有压缩部分，燃料喷射和点燃部分以及后燃器部分。靠近由涡轮喷气发动机产生的热气流附近安装一对反射镜。其中一个镜子是完全反光的，另一个是部分反光。镜子彼此面对并且垂直于气流的流动，产生横向于流动的反射路径。高温在气流中产生激发的分子。这导致光子被发射，当发射发射相同波长的光子的其它激发原子时，产生附加的光子以组合成沿着反射镜之间的反射路径传播的激光束。激光束的一部分通过部分反射镜，其中它撞击倾斜的镜子，其将光束朝向期望的目标。

74. 再颁专利

USRE33803E Gas laser with at least one excitation tube wherethrough gas is actually flowing 失效
公开(公告)号：USRE33803E
公开(公告)日：1992-01-21
申请号：US426570
申请日：1989-10-25
申请人： Hardy P. Weiss
发明人： Hardy P. Weiss
IPC分类号： H01S3/03 , H01S3/036 , H01S3/038 , H01S3/07 , H01S3/0953 , H01S3/097 , H01S3/0979
CPC分类号： H01S3/0979 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/073
摘要： An axial flow gas transport laser comprising an excitation tube through which gas flows along an axis of the tube, an inlet arrangement to feed gas towards the excitation tube and an outlet arrangement to discharge gas from the excitation tube. At least one of the inlet and outlet arrangements comprises a circumferential opening arrangements evenly distributed along the periphery of the excitation tube, substantially in a cross-section plane of the tube. A gas flow channel arrangement to the opening arrangement is directed at least substantially in the direction of the excitation tube axis and into the excitation tube at the opening arrangement for preventing wide-areal turbulances of the gas flowing in the excitation tube.

75. 发明授权

US4488310A Continuously excited laser 失效
标题翻译：持续兴奋的激光
公开(公告)号：US4488310A
公开(公告)日：1984-12-11
申请号：US387880
申请日：1982-06-04
申请人： Ross C. McLeary , Peter J. Beckwith
发明人： Ross C. McLeary , Peter J. Beckwith
IPC分类号： H01S3/03 , H01S3/097 , H01S3/0971 , H01S3/0979 , H01S3/223 , H01S3/22
CPC分类号： H01S3/0979 , H01S3/09713
摘要： There is disclosed continuously-excited lasers of the CO.sub.2 mixing, and supersonic CO, types. There is specifically disclosed a method, and a laser apparatus, for producing a repetitively pulsed output, in which a stream of excited gas, of the type having a relatively long excitation life, is produced, stored and subsequently transferred, in the form of pulses, to a power extraction zone incorporating a resonator. In one example the gas laser is a supersonic CO laser in which the CO is excited in the excitation zone and is, after storage, transferred under supersonic conditions to the resonator. In the main example the gas to be excited is N.sub.2 which is initially transferred to a storage chamber provided between a rotatable storage cylinder (16) and an axial supporting shaft (18) therefor, and thereafter the N.sub.2 is transferred through holes (17) in the storage cylinder (16) which align during rotation with slots (20) through a surrounding fixed cylinder (19) to allow pulses of excited gas to be transferred to the power extraction zone (12) where it is mixed with CO.sub.2 and He, entering through supply tubes (23), and to which it transfers its excitation before flowing to the resonator.
摘要翻译： PCT No.PCT / AU81 / 00177 Sec。 371日期1982年6月4日 102（e）日期1982年6月4日PCT提交1981年12月2日PCT公布。出版物WO82 / 01964 日期：1982年6月10日。公开了CO2混合和超音速CO的连续激发激光器。具体公开了一种用于产生重复脉冲输出的方法和激光装置，其中产生具有较长激发寿命的类型的激发气体流，以脉冲的形式存储并随后传送涉及包含谐振器的功率提取区域。在一个示例中，气体激光器是超音速CO激光器，其中CO在激发区域被激发，并且在存储之后，在超音速条件下被转移到谐振器。在主要示例中，待激发的气体是N2，其最初被转移到设置在可旋转储存筒（16）和轴向支撑轴（18）之间的储存室中，然后将N2通过孔（17）转移到存储缸（16），其在与槽（20）旋转期间通过周围的固定气缸（19）对准，以允许激发气体的脉冲被传送到与CO 2和He混合的动力提取区域（12），进入通过供应管（23），并在流入谐振器之前传递其激励。

76. 发明授权

US4257012A Nozzle assembly for gas-dynamic high efficiency lasers 失效
标题翻译：气动高效激光喷嘴组件
公开(公告)号：US4257012A
公开(公告)日：1981-03-17
申请号：US945832
申请日：1978-09-26
申请人： Werner Malburg , Friedbert Mohr
发明人： Werner Malburg , Friedbert Mohr
IPC分类号： H01S3/0953 , H01S3/0979 , H01S3/02
CPC分类号： H01S3/0953 , H01S3/0979
摘要： The present nozzle assembly for gas-dynamic high efficiency lasers with a oling system comprises a plurality of specially formed nozzle members or so-called lamellae. Each nozzle has its own cooling passages, matching bodies and glide surfaces. A series of nozzle members are placed in thermal contact with each other within a mounting or holding block. A coolant flows through said cooling passages which extend through each nozzle throat region and through matching bodies of the nozzle members so that a uniform temperature prevails across the nozzle assembly whereby the nozzle dimensions are maintained constant especially at the nozzle throat width and whereby leakage flows are eliminated.
摘要翻译：用于具有冷却系统的气动高效激光器的本喷嘴组件包括多个特别形成的喷嘴构件或所谓的薄片。每个喷嘴具有自己的冷却通道，匹配体和滑动表面。一系列喷嘴构件在安装或保持块内彼此热接触地放置。冷却剂流过所述冷却通道，其延伸穿过每个喷嘴喉部区域并且通过喷嘴构件的匹配体，使得整个喷嘴组件均匀地保持温度，从而喷嘴尺寸保持恒定，特别是在喷嘴喉部宽度处，因此泄漏流消除了

77. 发明授权

US4215321A Method for obtaining high beam quality in a gas dynamic laser 失效
标题翻译：在气体动态激光器中获得高光束质量的方法
公开(公告)号：US4215321A
公开(公告)日：1980-07-29
申请号：US893906
申请日：1978-04-05
申请人： Edward A. Pinsley , Richard A. Schmidtke
发明人： Edward A. Pinsley , Richard A. Schmidtke
IPC分类号： H01S3/0979 , H01S3/22
CPC分类号： H01S3/0979
摘要： An apparatus and method for minimizing gas density perturbation within an optical region of a gas dynamic laser to improve the optical quality of the output laser is disclosed. Gas disturbance generators disposed intermediate the throat region of the nozzle and the optical region are adapted for producing a disturbance to the flow to oppose flow density disturbances resulting from shock or expansion waves emanating from the intersection of the ends of the nozzle and side walls. In one embodiment the gas disturbance generator is a protrusion into the gas path. A further embodiment utilizes a jet of gas into the gas path to produce the disturbance. A further embodiment utilizes suction along the side wall to produce the disturbance. The optical quality of the laser energy passing across the gas flow is significantly improved.
摘要翻译：公开了一种用于使气体动态激光器的光学区域内的气体密度扰动最小化以提高输出激光器的光学质量的装置和方法。设置在喷嘴的喉部区域和光学区域之间的气体干扰发生器适于产生对流动的干扰，以对抗由喷嘴和侧壁的端部相交处产生的冲击或膨胀波形引起的流量密度扰动。在一个实施例中，气体扰动发生器是进入气体通道的突起。另一实施例利用气体入射气体来产生干扰。另一实施例利用沿着侧壁的吸力产生干扰。通过气流的激光能量的光学质量显着提高。

78. 发明授权

US4132961A Gaseous discharge stabilization apparatus and method 失效
标题翻译：气体放电稳定装置和方法
公开(公告)号：US4132961A
公开(公告)日：1979-01-02
申请号：US783111
申请日：1977-03-31
申请人： Richard C. Bergman
发明人： Richard C. Bergman
IPC分类号： H01S3/0979 , H01S3/097
CPC分类号： H01S3/0979
摘要： The electrical and mass efficiencies of an electrically excited flowing gas laser are improved by lining the discharge tube with a filler which minimizes the regions of slow or recirculating gas flow, and by utilizing a wire anode gas injector to feed laser gases into the discharge.

79. 发明授权

US4114114A Apparatus and method for initiating electrical discharge in a laser 失效
标题翻译：用于在激光器中启动电子放电的装置和方法
公开(公告)号：US4114114A
公开(公告)日：1978-09-12
申请号：US773826
申请日：1977-03-03
申请人： Robert J. Pressley , Theodore S. Fahlen
发明人： Robert J. Pressley , Theodore S. Fahlen
IPC分类号： H01S3/0979 , H01S3/097
CPC分类号： H01S3/0979
摘要： An apparatus for initiating electrical discharge in a gas transport laser having two or more sets of electrodes comprises a pulse generator connected to both sets of electrodes. The pulse generator comprises an alternating current (AC) source connected to the primary windings of two transformers having secondaries connected to the sets, respectively of electrodes. By energizing the transformers after the application of a direct current (DC) voltage across the electrodes of each set, a discharge across the sets of electrodes occurs simultaneously for a balanced starting of the lasing action.The invention also comprehends the method of starting a laser having a plurality of sets of electrodes consisting of the steps of applying a DC potential across each set of electrodes and transmitting at least one voltage pulse simultaneously to one of the electrodes of each set to produce simultaneously an electrical discharge between all sets of electrodes.

80. 发明授权

US4077018A High power gas transport laser 失效
标题翻译：大功率气体输送激光
公开(公告)号：US4077018A
公开(公告)日：1978-02-28
申请号：US662941
申请日：1976-03-01
申请人： Theodore S. Fahlen , Russell F. Kirk
发明人： Theodore S. Fahlen , Russell F. Kirk
IPC分类号： H01S3/0979 , H01S3/097
CPC分类号： H01S3/0979
摘要： Continuous wave (CW) output power from a gas transport laser is substantially increased by disposing a plurality of parallel cylindrically tubular cathodes in the main stream transversely of the direction of gas flow and spaced above a coextensive segmented anode in the opposite wall of the channel. Ballast resistors are connected between the cathodes, respectively, and the power supply to optimize the uniform arcless distribution of current passing between each cathode and the anode. Continuous output power greater than 3 kw is achieved with this electrode configuration.
摘要翻译：通过在主流中横向于气流的方向设置多个平行的圆柱形管状阴极并且在通道的相对壁中的共同延伸的分段阳极上方间隔开来，气体输送激光器的连续波（CW）输出功率大大增加。阴极分别连接镇流电阻和电源，以优化每个阴极和阳极之间通过的电流的均匀无弧分布。通过该电极配置实现大于3kw的连续输出功率。

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