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    • 73. 发明申请
    • Abrasive particles based on aluminium oxynitride
    • 基于氮氧化铝的磨料颗粒
    • US20050160678A1
    • 2005-07-28
    • US10504154
    • 2003-02-24
    • Florent Bourlier
    • Florent Bourlier
    • C01B21/082C04B35/107C04B35/111C04B35/117C04B35/581C04B35/653C09K3/14B24D3/02
    • C04B35/653C01B21/0821C01P2006/80C04B35/107C04B35/1115C04B35/117C04B35/581C09K3/1418C09K3/1427
    • A plasma processing apparatus includes an evacuatable processing vessel; a workpiece mount base for mounting thereon an object to be processed; a microwave transmitting plate provided in an opening of a ceiling of the processing vessel; a planar antenna member for supplying a microwave into the processing vessel via the microwave transmitting plate; a shield lid grounded to cover a top of the planar antenna member; a waveguide for guiding the microwave to the planar antenna member; a member elevating mechanism for relatively varying a vertical distance between the planar antenna member and the shield lid; a tuning rod insertable into the waveguide; a tuning rod driving mechanism for moving the tuning rod to adjust an insert amount thereof; and a matching control section for controlling an elevation amount of the planar antenna member and the insert amount of the tuning rod to obtain a matching adjustment.
    • 等离子体处理装置包括可抽空处理容器; 用于在其上安装待处理物体的工件安装基座; 设置在处理容器的天花板的开口中的微波传输板; 平面天线构件,用于经由微波发射板向处理容器提供微波; 屏蔽盖,其接地以覆盖所述平面天线构件的顶部; 用于将微波引导到平面天线构件的波导; 用于相对改变平面天线构件和屏蔽盖之间的垂直距离的构件升降机构; 调谐杆可插入到波导中; 调节杆驱动机构,用于移动调音杆以调节其插入量; 以及匹配控制部分,用于控制平面天线部件的仰角量和调节杆的插入量以获得匹配调整。
    • 80. 发明授权
    • Manufacture of complex shaped Cr.sub.3 C.sub.2 /Al.sub.2 O.sub.3
components by injection molding technique
    • 通过注塑技术制造复杂形状的Cr3C2 / Al2O3组分
    • US5993726A
    • 1999-11-30
    • US839160
    • 1997-04-22
    • Jow-Lay HuangKuo-Chi TwuJiunn-Jye Huang
    • Jow-Lay HuangKuo-Chi TwuJiunn-Jye Huang
    • B28B1/24B28B11/24C04B35/117
    • C04B35/117B28B1/24B28B11/243
    • The purpose of this invention is to manufacture complex shaped Cr.sub.3 C.sub.2 /Al.sub.2 O.sub.3 components efficiently with effective cost. Chromium carbide, which is quite chemically inert at elevated temperature, is added into an alumina matrix for toughening purposes. Chromium carbide and alumina ceramic powders are mixed with binders to form a solidified suspension. The suspension is then crushed, heated, and injected into green products. Controlled solvent and thermal debinding processes are followed before performing pressureless sintering. Samples are sintered in pre-treated argon gas with minimum oxygen partial pressure, or in vacuum for controlling the phase stability and microstructure for tailoring mechanical properties. The processing parameters for injection molding, the composition design of binders and ceramic composites, and the techniques for controlling the phase transformation of chromium carbide are developed. A near-net shape complex component with minimum after machining can be manufactured. The injection molding and pressureless sintering process make the mass production possible. Optimized properties of 97.8% in the theoretical density, 500 Mpa in strength, and 5.85 MPam.sup.1/2, are obtained. These properties are greater, in comparison, than the properties of conventional alumina ceramics.
    • 本发明的目的是有效地制造复杂形状的Cr 3 C 2 / Al 2 O 3组分。 在高温下相当化学惰性的碳化铬被加入到氧化铝基质中用于增韧目的。 将碳化铬和氧化铝陶瓷粉末与粘合剂混合以形成固化悬浮液。 然后将悬浮液压碎,加热并注入绿色产品。 在进行无压烧结之前,遵循控制溶剂和热脱脂方法。 样品在具有最小氧分压的预处理氩气中或在真空中烧结以控制相稳定性和显微组织以调整机械性能。 开发了注塑加工参数,粘结剂和陶瓷复合材料的组成设计,以及控制碳化铬相变的技术。 可以制造加工后具有最小值的近净形状复合部件。 注塑和无压烧结工艺使得批量生产成为可能。 理论密度为97.8%,强度为500 Mpa,最大特性为5.85 MPam + E,fra 1/2 + EE。 与常规氧化铝陶瓷的性能相比,这些性能更大。