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71. 发明授权

US07152300B1 Method of manufacturing a micromechanical structure 有权
标题翻译：微机械结构的制造方法
公开(公告)号：US07152300B1
公开(公告)日：2006-12-26
申请号：US09702881
申请日：2000-11-01
申请人： Kenichiro Suzuki
发明人： Kenichiro Suzuki
IPC分类号： H02K15/00 , H02K15/14 , H02K15/16
CPC分类号： B81B3/0008 , B81B2201/034 , H02N1/008 , Y10T29/49002 , Y10T29/49007 , Y10T29/49009 , Y10T29/49021
摘要： A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.
摘要翻译：微致动器包括固定元件，可移动元件和第一微结构。固定元件固定在基板上，并且具有以预定间距排列的多个固定元件电极。可移动元件具有与固定元件电极相对的多个可移动元件电极。通过施加跨过固定元件和可移动元件的电压来移动可移动元件。第一微结构形成在可移动元件和固定元件的至少一个相对表面上，以防止可移动元件附接到固定元件。

72. 发明授权

US07030537B2 Movable MEMS-based noncontacting device 失效
标题翻译：可移动的基于MEMS的非接触器件
公开(公告)号：US07030537B2
公开(公告)日：2006-04-18
申请号：US10791633
申请日：2004-03-01
申请人： Bevan Staple , Richard Roth
发明人： Bevan Staple , Richard Roth
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： B81B3/0008 , B81B2201/042 , G02B6/3518 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/3566 , G02B6/357 , G02B6/358
摘要： A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.
摘要翻译：提供了一种减轻沉降问题的转向灯微结构。包括反射涂层的第一可倾斜组件与衬底连接。第二可倾斜组件也与衬底连接。第一手第二电极与衬底连接并且被配置为使两个可倾斜组件倾斜以使它们相互交错。在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。

73. 发明授权

US06829399B2 Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge 失效
标题翻译：卷帘快门光开关装置带有快门上的凹坑，光口处的环形边缘和缩短的快门附件边缘
公开(公告)号：US06829399B2
公开(公告)日：2004-12-07
申请号：US09799826
申请日：2001-03-05
申请人： Carl O. Bozler , Steven Rabe , Dale C. Flanders , Peter S. Whitney
发明人： Carl O. Bozler , Steven Rabe , Dale C. Flanders , Peter S. Whitney
IPC分类号： G02B626
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译：一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。滚动快门可以采取两种状态之一。在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。此功能也用于保持镜子的平整度。开关器件可用作光开关阵列的一部分。

74. 发明授权

US06819820B1 Use of applied force to improve MEMS switch performance 有权
标题翻译：使用施加力来提高MEMS开关性能
公开(公告)号：US06819820B1
公开(公告)日：2004-11-16
申请号：US09932433
申请日：2001-08-18
申请人： Murali Chaparala , Michael J. Daneman
发明人： Murali Chaparala , Michael J. Daneman
IPC分类号： G02B642
CPC分类号： G02B26/0841 , B81B3/0008 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81C1/00214 , G02B6/32 , G02B6/3514 , G02B6/3518 , G02B6/3548 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B2006/12104
摘要： A method is disclosed for operating a MEMS device having a flap that is movable with respect to a base. The method includes applying a force to the flap to move the flap at least partially out of contact with an underlying base. Means for applying such a biasing force may be incorporated into a microelectromechanical (MEMS) apparatus having a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.
摘要翻译：公开了一种用于操作具有相对于基座可移动的翼片的MEMS装置的方法。所述方法包括向所述翼片施加力以使所述翼片至少部分地与下面的基座接触。用于施加这种偏压力的装置可以结合到具有基部和翼片的微机电（MEMS）装置中，该翼片具有联接到基部的部分，使得翼片可以在第一和第二位置之间移动离开基部的平面。底座可以具有一个具有很大垂直侧壁的空腔，当瓣片处于第二位置时，电极可以被放置在垂直侧壁上并与底座电隔离以提供瓣片向侧壁的静电夹持。基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。可以使用一个或多个这样的结构的阵列来形成光学开关。

75. 发明申请

US20040217919A1 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers 有权
标题翻译：具有抗静电凸块，整体微透镜和反射吸收层的自包装光学干涉显示装置
公开(公告)号：US20040217919A1
公开(公告)日：2004-11-04
申请号：US10428247
申请日：2003-04-30
发明人： Arthur Piehl , James R. Przybyla , Adam L. Ghozeil , Eric T. Martin
IPC分类号： G09G003/00
CPC分类号： G09G3/3466 , B81B3/0008 , B81B2201/047 , G02B1/11 , G02B26/001 , G09G2300/06
摘要： An electronic device of an embodiment of the invention is disclosed that at least partially displays a pixel of a display image. The device includes a first reflector and a second reflector defining an optical cavity therebetween that is selective of a visible wavelength at an intensity. The device includes a mechanism to allow optical properties of the cavity to be varied such that the visible wavelength and/or the intensity are variably selectable in correspondence with the pixel of the displayable image. The device also includes one or more transparent deposited films, one or more absorbing layers, an integral micro-lens, and/or one or more anti-stiction bumps. The deposited films are over one of the reflectors, for self-packaging of the device. The absorbing layers are over one of the reflectors, to reduce undesired reflections. The integral micro-lens is over one of the reflectors, and the anti-stiction bumps are between the reflectors.
摘要翻译：公开了本发明的实施例的电子设备，其至少部分地显示显示图像的像素。该装置包括第一反射器和第二反射器，其在其间限定光学腔，其具有在强度下的可见波长的选择性。该装置包括允许空腔的光学特性变化的机构，使得可视波长和/或强度可变地与可显示图像的像素相对应地选择。该装置还包括一个或多个透明沉积膜，一个或多个吸收层，整体微透镜和/或一个或多个抗静电凸块。沉积的膜位于一个反射器上，用于器件的自包装。吸收层在一个反射器上方，以减少不期望的反射。整体微透镜超过一个反射器，并且抗静电凸块在反射器之间。

76. 发明授权

US06808640B2 Micromechanical part and method for its manufacture 失效
标题翻译：微机械部件及其制造方法
公开(公告)号：US06808640B2
公开(公告)日：2004-10-26
申请号：US10077422
申请日：2002-02-14
申请人： Frank Fischer , Wilhelm Frey
发明人： Frank Fischer , Wilhelm Frey
IPC分类号： B81C100
CPC分类号： B81B3/0008 , B81B3/0086 , B81B2201/0235 , B81C2201/112
摘要： A method for manufacturing a micromechanical part, having a plurality of components that move with respect to one another, from a substrate, with a conductive coating being applied to at least one facing surface of the plurality of components that move with respect to one another.
摘要翻译：一种用于制造具有多个相对于彼此移动的部件的微机械部件的方法，其中导电涂层被施加到相对于彼此移动的多个部件的至少一个相对表面。

77. 发明授权

US06791441B2 Micro-electro-mechanical switch, and methods of making and using it 有权
标题翻译：微机电开关及其制作和使用方法
公开(公告)号：US06791441B2
公开(公告)日：2004-09-14
申请号：US10140658
申请日：2002-05-07
申请人： Brandon W. Pillans , David I. Forehand
发明人： Brandon W. Pillans , David I. Forehand
IPC分类号： H01H5122
CPC分类号： B81B3/0008 , B81B3/001 , B81B2201/014 , B81B2203/0118 , B81B2203/04 , H01H1/06 , H01H59/0009 , H01H2059/0018 , H01H2059/0072
摘要： A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.
摘要翻译：微电子机械（MEMS）开关（10,110）具有由电介质层（23,123）覆盖的电极（22,122），并且具有柔性导电膜（31,131），其在间隔开的位置从电介质层接合和接合。膜和电介质层中的至少一个具有纹理化表面（138），其在致动位置与另一个接合。纹理表面减小了物理接触的面积，通过该面积，来自膜的电荷可以穿透入电介质层并被捕获在电介质层内。这减少了可能用于将膜闩锁在其致动位置的捕获电荷的量，这反过来又显着地增加了开关的使用寿命。

78. 发明授权

US06764936B2 Mechanical landing pad formed on the underside of a MEMS device 有权
标题翻译：机械着陆垫形成在MEMS器件的下侧
公开(公告)号：US06764936B2
公开(公告)日：2004-07-20
申请号：US09912150
申请日：2001-07-23
申请人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
发明人： Michael J. Daneman , Behrang Behin , Meng-Hsiung Kiang
IPC分类号： H01L2144
CPC分类号： G02B26/085 , B81B3/0008 , B81B3/001 , B81B3/0051 , G02B26/0833 , G02B26/0841
摘要： A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.
摘要翻译：一种在装置的下侧具有着陆垫结构的装置及其制造方法。该装置由具有从其下侧突出的至少一个着陆板的装置层形成。着陆垫通过穿过装置层中的开口的塞子附接到装置层。该装置可以通过一个或多个柔顺的挠曲件附接到装置层，这允许装置在由装置层限定的平面内进出。通过形成穿过器件层的一个或多个通孔来制造着陆焊盘。然后将底层牺牲层部分地蚀刻以在对应于器件层中的通孔的位置的位置处形成一个或多个凹陷。通孔和凹陷然后用着陆垫材料填充以形成具有从装置层的下侧突出的一个或多个着陆垫的结构。随后去除牺牲层以释放该装置。两种方法的特定实施例可以应用于制造微机电系统（MEMS），特别是MEMS镜。各种实施例非常适合于与绝缘体上硅（SOI）衬底一起使用。

79. 发明授权

US06594058B2 Rolling shutter optical switch device with mirror on shutter and open aperture optical port 有权
公开(公告)号：US06594058B2
公开(公告)日：2003-07-15
申请号：US09800062
申请日：2001-03-05
申请人： Dale C. Flanders
发明人： Dale C. Flanders
IPC分类号： G02B2602
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

80. 发明申请

US20020104377A1 Dynamic sensor having capacitance varying according to dynamic force applied thereto 有权
标题翻译：具有根据施加到其上的动态力而变化的电容的动态传感器
公开(公告)号：US20020104377A1
公开(公告)日：2002-08-08
申请号：US10029025
申请日：2001-12-28
发明人： Seiichiro Ishio
IPC分类号： G01C019/00
CPC分类号： B81B3/0008 , B81B2201/0235 , G01P15/125 , G01P2015/0814
摘要： A dynamic sensor includes stationary electrodes and movable electrodes facing each other and forming a capacitance therebetween. The capacitance changes in accordance with a dynamic force such as acceleration imposed on the sensor. Plural projections are formed on the stationary electrodes to avoid or suppress electrode sticking between the movable electrodes and the stationary electrodes due to an excessive impact imposed on the sensor. The projections are formed to have various heights so that higher projections first hit the movable electrodes and thereby protect lower projections. Even after the higher projections are destroyed by the excessive impact, the lower projections remain intact and serve to prevent the electrode sticking by the excessive impact which may occur later.
摘要翻译：动态传感器包括固定电极和彼此面对并在其间形成电容的可动电极。电容根据传感器施加的加速度等动力而变化。在固定电极上形成多个突起，以避免或抑制由于施加在传感器上的过度冲击而导致的可动电极和固定电极之间的电极粘附。突起形成为具有各种高度，使得较高的突起首先撞击可动电极，从而保护较低的突起。即使在较高的投影被过度的冲击破坏之后，较低的投影仍然保持不变，并且用于防止由于稍后可能发生的过度的冲击而导致的电极粘附。

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