专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07030537B2 Movable MEMS-based noncontacting device 失效
标题翻译：可移动的基于MEMS的非接触器件
公开(公告)号：US07030537B2
公开(公告)日：2006-04-18
申请号：US10791633
申请日：2004-03-01
申请人： Bevan Staple , Richard Roth
发明人： Bevan Staple , Richard Roth
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： B81B3/0008 , B81B2201/042 , G02B6/3518 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/3566 , G02B6/357 , G02B6/358
摘要： A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.
摘要翻译：提供了一种减轻沉降问题的转向灯微结构。包括反射涂层的第一可倾斜组件与衬底连接。第二可倾斜组件也与衬底连接。第一手第二电极与衬底连接并且被配置为使两个可倾斜组件倾斜以使它们相互交错。在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。

2. 发明授权

US06616853B1 Method for reducing leaching in metal-coated MEMS 有权
标题翻译：金属涂层MEMS中减少浸出的方法
公开(公告)号：US06616853B1
公开(公告)日：2003-09-09
申请号：US09799916
申请日：2001-03-05
申请人： Bevan Staple , David Miller , Lilac Muller
发明人： Bevan Staple , David Miller , Lilac Muller
IPC分类号： H01L2100
CPC分类号： B81C1/00476 , B81B2201/042 , B81C2201/0133 , G02B6/3518
摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.
摘要翻译：提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

3. 发明授权

US09041915B2 Systems and methods of scene and action capture using imaging system incorporating 3D LIDAR 有权
标题翻译：使用包含3D LIDAR的成像系统进行场景和动作捕获的系统和方法
公开(公告)号：US09041915B2
公开(公告)日：2015-05-26
申请号：US13099118
申请日：2011-05-02
申请人： Ronald P. Earhart , Rex M. Craig , Christian J. Grund , Bevan Staple , Carl S. Weimer
发明人： Ronald P. Earhart , Rex M. Craig , Christian J. Grund , Bevan Staple , Carl S. Weimer
IPC分类号： G01C3/08 , G01S3/786 , G01S7/481 , G01S17/02 , G01S17/58 , G01S17/87 , G01S17/88 , G01S17/89 , G01S17/93 , G01S7/00
CPC分类号： G01S3/7867 , G01S7/003 , G01S7/4813 , G01S7/4814 , G01S7/4816 , G01S17/023 , G01S17/58 , G01S17/87 , G01S17/88 , G01S17/89 , G01S17/933
摘要： The present invention pertains to systems and methods for the capture of information regarding scenes using single or multiple three-dimensional LADAR systems. Where multiple systems are included, those systems can be placed in different positions about the imaged scene such that each LADAR system provides different viewing perspectives and/or angles. In accordance with further embodiments, the single or multiple LADAR systems can include two-dimensional focal plane arrays, in addition to three-dimensional focal plane arrays, and associated light sources for obtaining three-dimensional information about a scene, including information regarding the contours of the objects within the scene. Processing of captured image information can be performed in real time, and processed scene information can include data frames that comprise three-dimensional and two-dimensional image data.
摘要翻译：本发明涉及用于捕获关于使用单个或多个三维LADAR系统的场景的信息的系统和方法。在包括多个系统的地方，这些系统可以被放置在关于成像场景的不同位置，使得每个LADAR系统提供不同的观看视角和/或角度。根据另外的实施例，除了三维焦平面阵列之外，单个或多个LADAR系统还可以包括二维焦平面阵列，以及用于获得关于场景的三维信息的相关联的光源，包括关于轮廓的信息的场景内的物体。拍摄图像信息的处理可以实时执行，并且处理的场景信息可以包括包括三维和二维图像数据的数据帧。

4. 发明申请

US20120044476A1 SYSTEMS AND METHODS OF SCENE AND ACTION CAPTURE USING IMAGING SYSTEM INCORPORATING 3D LIDAR 有权
标题翻译：使用3D激光雷达的成像系统的场景和动作捕捉方法
公开(公告)号：US20120044476A1
公开(公告)日：2012-02-23
申请号：US13099118
申请日：2011-05-02
申请人： Ronald P. Earhart , Rex M. Craig , Christian J. Grund , Bevan Staple , Carl S. Weimer
发明人： Ronald P. Earhart , Rex M. Craig , Christian J. Grund , Bevan Staple , Carl S. Weimer
IPC分类号： G01C3/08
CPC分类号： G01S3/7867 , G01S7/003 , G01S7/4813 , G01S7/4814 , G01S7/4816 , G01S17/023 , G01S17/58 , G01S17/87 , G01S17/88 , G01S17/89 , G01S17/933
摘要： The present invention pertains to systems and methods for the capture of information regarding scenes using single or multiple three-dimensional LADAR systems. Where multiple systems are included, those systems can be placed in different positions about the imaged scene such that each LADAR system provides different viewing perspectives and/or angles. In accordance with further embodiments, the single or multiple LADAR systems can include two-dimensional focal plane arrays, in addition to three-dimensional focal plane arrays, and associated light sources for obtaining three-dimensional information about a scene, including information regarding the contours of the objects within the scene. Processing of captured image information can be performed in real time, and processed scene information can include data frames that comprise three-dimensional and two-dimensional image data.
摘要翻译：本发明涉及用于捕获关于使用单个或多个三维LADAR系统的场景的信息的系统和方法。在包括多个系统的地方，这些系统可以被放置在关于成像场景的不同位置，使得每个LADAR系统提供不同的观看视角和/或角度。根据另外的实施例，除了三维焦平面阵列之外，单个或多个LADAR系统还可以包括二维焦平面阵列，以及用于获得关于场景的三维信息的相关联的光源，包括关于轮廓的信息的场景内的物体。拍摄图像信息的处理可以实时执行，并且处理的场景信息可以包括包括三维和二维图像数据的数据帧。

5. 发明授权

US06625342B2 Systems and methods for overcoming stiction using a lever 有权
公开(公告)号：US06625342B2
公开(公告)日：2003-09-23
申请号：US09898988
申请日：2001-07-03
申请人： Bevan Staple , David Paul Anderson , Lilac Muller
发明人： Bevan Staple , David Paul Anderson , Lilac Muller
IPC分类号： G02B626
CPC分类号： G02B6/358 , B81B3/0016 , B81B2201/047 , B81B2203/0181 , G02B6/29307 , G02B6/2931 , G02B6/3518 , G02B6/352 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/356 , G02B6/3566 , G02B6/357 , G02B6/3584 , G02B6/3598 , G02B26/0841 , Y10T307/977
摘要： A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.

6. 发明授权

US06525352B1 Method to reduce release time of micromachined devices 有权
标题翻译：减少微加工设备的释放时间的方法
公开(公告)号：US06525352B1
公开(公告)日：2003-02-25
申请号：US09837362
申请日：2001-04-18
申请人： Lilac Muller , Bevan Staple
发明人： Lilac Muller , Bevan Staple
IPC分类号： H01L2714
CPC分类号： B81C1/00547
摘要： A method for fabricating a micromachined device with a fast release step is provided. A first undoped sacrificial layer is deposited on a structural layer. A doped sacrificial layer is deposited on the first undoped sacrificial layer. A second undoped sacrificial layer is deposited on the doped sacrificial layer to produce a layered structure. An etchant is then applied to the layered structure.
摘要翻译：提供了一种用于制造具有快速释放步骤的微加工装置的方法。第一未掺杂的牺牲层沉积在结构层上。掺杂的牺牲层沉积在第一未掺杂的牺牲层上。第二未掺杂的牺牲层沉积在掺杂牺牲层上以产生分层结构。然后将蚀刻剂施加到分层结构。

7. 发明授权

US07560037B2 Surfactant-enhanced protection of micromechanical components from galvanic degradation 失效
标题翻译：表面活性剂增强了微机械部件对电流退化的保护
公开(公告)号：US07560037B2
公开(公告)日：2009-07-14
申请号：US11213466
申请日：2005-08-26
申请人： Bevan Staple , Jillian Buriak
发明人： Bevan Staple , Jillian Buriak
IPC分类号： H01B13/00
CPC分类号： B82Y30/00 , B81C1/00476 , B81C1/00801 , B81C2201/0114 , B81C2201/0133 , B81C2201/0139 , B81C2201/053
摘要： A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.
摘要翻译：通过将牺牲和结构材料沉积在衬底上以在与衬底电连接的部件上形成结构层来形成微机电结构。结构层的电位大于元件的电位。结构材料的至少一部分被保护材料覆盖，该保护材料具有小于或等于部件的电位的电位。牺牲材料用释放溶液除去。保护材料和释放溶液中的至少一种被表面活性化，表面活性剂对组分的表面进行官能化。

8. 发明申请

US20070289940A1 Surfactant-enhanced protection of micromechanical components from galvanic degradation 失效
标题翻译：表面活性剂增强了微机械部件对电流退化的保护
公开(公告)号：US20070289940A1
公开(公告)日：2007-12-20
申请号：US11213466
申请日：2005-08-26
申请人： Bevan Staple , Jillian Buriak
发明人： Bevan Staple , Jillian Buriak
IPC分类号： H01B13/00
CPC分类号： B82Y30/00 , B81C1/00476 , B81C1/00801 , B81C2201/0114 , B81C2201/0133 , B81C2201/0139 , B81C2201/053
摘要： A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.
摘要翻译：通过将牺牲和结构材料沉积在衬底上以在与衬底电连接的部件上形成结构层来形成微机电结构。结构层的电位大于元件的电位。结构材料的至少一部分被保护材料覆盖，该保护材料具有小于或等于部件的电位的电位。牺牲材料用释放溶液除去。保护材料和释放溶液中的至少一种被表面活性化，表面活性剂对组分的表面进行官能化。

9. 发明授权

US06969996B2 Methods for affirming switched status of MEMS-based devices 失效
标题翻译：确定MEMS器件开关状态的方法
公开(公告)号：US06969996B2
公开(公告)日：2005-11-29
申请号：US10839545
申请日：2004-05-04
申请人： Bevan Staple , Robert Anderson
发明人： Bevan Staple , Robert Anderson
IPC分类号： G02B26/08 , G01R31/02
CPC分类号： G02B26/0841
摘要： A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.
摘要翻译：提供了可以确定MEMS器件是否处于选择状态的配置。选择状态由可动元件的位置限定，可移动元件在电极激活时用静电力移动。用具有第一和第二区域的感测配置来检测选择状态。这些区域通常被分开，使得它们被电分离，除非可移动元件处于限定选择状态的位置。可以提供检测器来指示第一和第二区域是否电耦合。

10. 发明授权

US06939574B2 Method for reducing leaching in metal-coated MEMS 失效
标题翻译：金属涂层MEMS中减少浸出的方法
公开(公告)号：US06939574B2
公开(公告)日：2005-09-06
申请号：US10632698
申请日：2003-08-01
申请人： Bevan Staple , David Miller , Lilac Muller Muller
发明人： Bevan Staple , David Miller , Lilac Muller Muller
IPC分类号： B05D5/12 , B81C1/00 , B44C1/22 , H01L21/00
CPC分类号： B81C1/00476 , B81B2201/042 , B81C2201/117
摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.
摘要翻译：提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式