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    • 1. 发明授权
    • Mechanical memory transistor
    • 机械记忆晶体管
    • US08704314B2
    • 2014-04-22
    • US11951535
    • 2007-12-06
    • Carl O. Bozler
    • Carl O. Bozler
    • H01L21/00H01L27/12H01L29/84H01L21/48
    • H01L29/84B82Y10/00G11C23/00H01H59/0009H01L29/685H01L29/78
    • A mechanical memory transistor includes a substrate having formed thereon a source region and a drain region. An oxide is formed upon a portion of the source region and upon a portion of the drain region. A pull up electrode is positioned above the substrate such that a gap is formed between the pull up electrode and the substrate. A movable gate has a first position and a second position. The movable gate is located in the gap between the pull up electrode and the substrate. The movable gate is in contact with the pull up electrode when the movable gate is in a first position and is in contact with the oxide to form a gate region when the movable gate is in the second position. The movable gate, in conjunction with the source region and the drain region and when the movable gate is in the second position, form a transistor that can be utilized as a non-volatile memory element.
    • 机械存储晶体管包括其上形成有源极区和漏极区的衬底。 在源区的一部分上和漏极区的一部分上形成氧化物。 上拉电极位于衬底之上,使得在上拉电极和衬底之间形成间隙。 可动门具有第一位置和第二位置。 可移动栅极位于上拉电极和基板之间的间隙中。 当可移动栅极处于第一位置时,可移动栅极与上拉电极接触并且当可移动栅极处于第二位置时与可动栅极接触以形成栅极区域。 可移动栅极与源极区域和漏极区域结合,并且当可移动栅极处于第二位置时,形成可用作非易失性存储元件的晶体管。
    • 8. 发明授权
    • Microelectro-mechanical system actuator device and reconfigurable
circuits utilizing same
    • 微电子机械系统致动器装置和利用其的可重构电路
    • US6127908A
    • 2000-10-03
    • US972224
    • 1997-11-17
    • Carl O. BozlerRichard G. DrangmeisterRobert J. ParrLawrence J. Kushner
    • Carl O. BozlerRichard G. DrangmeisterRobert J. ParrLawrence J. Kushner
    • B81B3/00B81C99/00H01H59/00H01P1/12H01P1/203H01P5/04H01P1/10H01C10/06H01G5/011H03F1/00
    • B81B3/0021B81C1/00214H01G5/18H01G5/40H01P1/12H01P1/20327H01P1/20363H01P1/20381H01P1/2039H01P5/04B81B2201/014B81B2203/0118H01H2059/0081H01H59/0009
    • A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.
    • 一种微电子机械装置,其包括形成在基板上的固定电极,所述固定电极包括透明的高电阻层和在预定方向上形成有各向异性应力并且邻近所述固定电极设置的可移动电极。 该器件包括通过固定电极彼此隔离的第一和第二导电区域。 可移动电极移动以覆盖固定电极并且电耦合到第二导电区域,从而响应于施加在固定和可移动电极上的电势而电耦合第一和第二导电区域。 固定电极对电磁信号或波是透明的,并且可移动电极阻止或允许电磁信号或波的传输。 在本发明的一个实施例中,固定和可移动电极被配置在类似器件的阵列内,并且阵列中的每个器件或器件组可单独寻址以致动可移动电极。 在本发明的另一个实施例中,提供了一种可重构电路,其包括单独寻址或选定组中的致动装置阵列,每个可致动装置具有形成在基板上的固定电极,固定电极包括透明高 电阻层和在预定方向上形成有各向异性应力的可动电极,并且邻近固定电极设置。