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71. 发明申请

US20070181554A1 THERMAL TYPE FLOW SENSOR 有权
标题翻译：热流型传感器
公开(公告)号：US20070181554A1
公开(公告)日：2007-08-09
申请号：US11627111
申请日：2007-01-25
申请人： Hiroshi NAKANO , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
发明人： Hiroshi NAKANO , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe
IPC分类号： H05B3/00
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译：热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流变异。

72. 发明申请

US20070089503A1 Thermal airflow meter 有权
公开(公告)号：US20070089503A1
公开(公告)日：2007-04-26
申请号：US10560896
申请日：2004-03-05
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/696
摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.

73. 发明授权

US07181962B2 Thermal flow sensor 有权
标题翻译：热流量传感器
公开(公告)号：US07181962B2
公开(公告)日：2007-02-27
申请号：US10546174
申请日：2004-05-26
申请人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
发明人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/698
摘要： A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature (ΔTh=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
摘要翻译：一种以低成本制造并具有改进的可靠性的热流传感器。在形成在半导体衬底（2）中的空腔（7）上，在腔的中心附近形成至少一个加热电阻（4），其中电绝缘膜置于加热电阻和空腔之间。加热电阻（4）的温度（Th）被控制为高于介质温度（Ta）恒温（DeltaTh = Th-Ta）。从加热电阻（4）的上游端到位于空腔上的电绝缘膜的上游端和恒温（DeltaTh）的气流方向的距离（Ws）满足以下关系： line-formula description =“In-line Formulas”end =“lead”？> DeltaTh / Ws <= 800（°C./mm)

74. 发明授权

US07137298B2 Thermal air flowmeter 失效
标题翻译：热空气流量计
公开(公告)号：US07137298B2
公开(公告)日：2006-11-21
申请号：US10860326
申请日：2004-06-04
申请人： Masahiro Matsumoto , Masamichi Yamada , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F7/00 , G01F1/684 , G01F1/692 , G01F1/6986
摘要： A thermal air flowmeter which improves air flow rate measurement sensitivity, reduces power consumption of a heating element and broadens the measuring range. A heating resistor is provided on insulating film in a thermal insulating area as a rectangular space on a flat substrate; and two resistance temperature detectors are provided upstream and downstream of the heating resistor. The sides of the rectangular thermal insulating area which are parallel to the axis of air flow are longer than its sides which are perpendicular to the axis of air flow.
摘要翻译：一种改善空气流量测量灵敏度的热空气流量计，降低了加热元件的功耗并扩大了测量范围。在隔热区域的绝缘膜上设置加热电阻器作为平坦基板上的矩形空间; 并且在加热电阻器的上游和下游设置两个电阻温度检测器。平行于空气流动轴线的矩形绝热区域的侧面比垂直于气流轴线的侧面长。

75. 发明申请

US20050229694A1 HEATING RESISTANCE FLOW RATE MEASURING APPARATUS 失效
标题翻译：加热电阻流量测量装置
公开(公告)号：US20050229694A1
公开(公告)日：2005-10-20
申请号：US11052754
申请日：2005-02-09
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/698 , F02D41/18 , G01F1/68 , G01F1/684 , G01F1/692 , G01F1/696 , G01F1/699
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译：一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置设置检测电阻器。

76. 发明授权

US06889545B2 Flow rate sensor 有权
标题翻译：流量传感器
公开(公告)号：US06889545B2
公开(公告)日：2005-05-10
申请号：US10778205
申请日：2004-02-17
申请人： Keiichi Nakada , Junichi Horie , Izumi Watanabe
发明人： Keiichi Nakada , Junichi Horie , Izumi Watanabe
IPC分类号： G01F1/68 , F02D41/18 , G01F1/684 , G01F1/692 , G01F1/698 , G01F1/699 , G01F1/72 , G01F5/00
CPC分类号： G01F1/699 , F02D41/187 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/72 , G01F5/00
摘要： A flow rate sensor detects the flow rate in a pulsating condition including a large amount of the reverse flow. Upstream temperature sensors and downstream temperature sensors are formed in both sides of a heater, parallel resistors are formed in the external side of a thin film portion (cavity), and the downstream temperature sensors are connected at the contacts. The upstream and downstream temperature sensors are respectively allocated to the four sides of the bridge circuit so that the sensors of the same type are not side by side and the electrodes are balanced when the flow rate is zero. The upstream temperature sensor is cooled during the forward flow, while the downstream temperature sensor is influenced by the heater but virtual change is rather small and potential difference between the electrodes becomes larger. During the reverse flow, the downstream temperature sensor is cooled but virtual change is rather small.
摘要翻译：流量传感器检测包括大量逆流的脉动状态下的流量。上游温度传感器和下游温度传感器形成在加热器的两侧，并且在薄膜部分（空腔）的外侧形成并联电阻，并且下游温度传感器连接在触点上。上游和下游温度传感器分别分配给桥接电路的四侧，使得相同类型的传感器不是并排的，并且当流量为零时电极是平衡的。上游温度传感器在向前流动期间被冷却，而下游温度传感器受到加热器的影响，但虚拟变化相当小，并且电极之间的电位差变大。在逆流期间，下游温度传感器被冷却，但虚拟变化相当小。

77. 发明授权

US06854326B2 Measurement apparatus for measuring physical quantity such as fluid flow 失效
标题翻译：用于测量诸如流体流量的物理量的测量装置
公开(公告)号：US06854326B2
公开(公告)日：2005-02-15
申请号：US10674475
申请日：2003-10-01
申请人： Izumi Watanabe , Naoki Saito , Masayuki Kozawa , Keiichi Nakada , Kei Ueyama
发明人： Izumi Watanabe , Naoki Saito , Masayuki Kozawa , Keiichi Nakada , Kei Ueyama
IPC分类号： G01F1/684 , G01F5/00 , G01F1/68
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F5/00
摘要： Resin members, on the surfaces of which metal films are formed, are used for; an auxiliary air passage provided in a main air passage, in which a sensor element of a physical quantity sensor such as an air flow sensor, an intake-air temperature sensor, etc., is situated; a housing; and so forth; in order to decrease both the thermal conductivity and the emissivity of those components to respective small values, whereby the temperature increase of the sensor due to both the heat conduction and the heat radiation can be suppressed.
摘要翻译：在其表面上形成金属膜的树脂构件用于：辅助空气通道，其设置在主空气通道中，物理量传感器的传感器元件如空气流量传感器，进气温度传感器等位于其中; 房屋; 等等; 为了将这些部件的热导率和发射率都降低到相应的小值，由此可以抑制由于热传导和热辐射两者而导致的传感器的温度升高。

78. 发明授权

US06708560B2 Measurement apparatus for measuring physical quantity such as fluid flow 有权
标题翻译：用于测量诸如流体流量的物理量的测量装置
公开(公告)号：US06708560B2
公开(公告)日：2004-03-23
申请号：US09790689
申请日：2001-02-23
申请人： Izumi Watanabe , Naoki Saito , Masayuki Kozawa , Keiichi Nakada , Kei Ueyama
发明人： Izumi Watanabe , Naoki Saito , Masayuki Kozawa , Keiichi Nakada , Kei Ueyama
IPC分类号： G01F168
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F5/00
摘要： Resin members, on the surfaces of which metal films are formed, are used for; an auxiliary air passage provided in a main air passage, in which a sensor element of a physical quantity sensor such as an air flow sensor, an intake-air temperature sensor, etc., is situated; a housing; and so forth; in order to decrease both the thermal conductivity and the emissivity of those components to respective small values, whereby the temperature increase of the sensor due to both the heat conduction and the heat radiation can be suppressed.
摘要翻译：在其表面上形成金属膜的树脂构件用于：辅助空气通道，其设置在主空气通道中，物理量传感器的传感器元件如空气流量传感器，进气温度传感器等位于其中; 房屋; 等等; 为了将这些部件的热导率和发射率都降低到相应的小值，由此可以抑制由于热传导和热辐射两者而导致的传感器的温度升高。

79. 发明授权

US06349596B1 Thermal type air flow sensor 失效
标题翻译：热式气流传感器
公开(公告)号：US06349596B1
公开(公告)日：2002-02-26
申请号：US09461190
申请日：1999-12-15
申请人： Keiichi Nakada , Izumi Watanabe , Hiroshi Yoneda
发明人： Keiichi Nakada , Izumi Watanabe , Hiroshi Yoneda
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/696 , G01F15/043
摘要： A thermal type air flow sensor which corrects variation of characteristics of a thermal type air flow sensor due to adherence or deposition of fouling contained in an intake air for maintaining an initial accuracy. An air flow rate is measured by means of a heating resistor and a temperature measuring resistor formed by semiconductor fine patterning. A part of the semiconductor substrate is removed. The heating resistor and a portion of the temperature measuring resistor are formed above a space defined by removing the semiconductor substrate. A voltage of the portion of the temperature measuring resistor located above the space is detected for correcting an error in measurement of an intake air using the voltage detected.
摘要翻译：一种热式空气流量传感器，其用于校正由于包含在进气中的污垢的粘附或沉积导致的热式空气流量传感器的特性的变化，以保持初始精度。通过加热电阻器和通过半导体精细图案化形成的温度测量电阻器来测量空气流量。去除半导体衬底的一部分。加热电阻器和温度测量电阻器的一部分形成在通过去除半导体衬底限定的空间的上方。检测位于空间上方的温度测量电阻器的部分的电压，以使用检测到的电压来校正进气测量误差。

80. 发明授权

US5569851A Meter for measuring air flow by resistance heating 失效
标题翻译：通过电阻加热测量空气流量的仪表
公开(公告)号：US5569851A
公开(公告)日：1996-10-29
申请号：US264067
申请日：1994-06-22
申请人： Masahiro Ichimaru , Izumi Watanabe
发明人： Masahiro Ichimaru , Izumi Watanabe
IPC分类号： G01F1/68 , G01F1/684 , G01F1/69 , G01F1/692 , G01F1/698 , G01P5/12
CPC分类号： G01F1/69 , G01F1/684 , G01F1/6842 , G01F1/692 , G01F1/698
摘要： The characteristic of the present invention is that in a heating resistor portion and a lead member for electrically connecting the resistor portion to an external device, the lead member is composed of a first lead member for supplying a current to the resistor portion and second lead member for measuring a voltage in the resistor. According to an error in heat control due to resistances of a support, welding portion, wire bonding portion, etc. between a terminal of a sensing element and a driving circuit can be eliminated to thereby detect an air flow rate with a high accuracy.
摘要翻译：本发明的特征在于，在用于将电阻部分与外部装置电连接的加热电阻部分和引线部件中，引线部件由用于向电阻部分提供电流的第一引线部件和第二引线部件用于测量电阻中的电压。根据由于传感元件的端子与驱动电路之间的支撑体，焊接部分，引线接合部分等的电阻而导致的热控制误差可以消除，从而以高精度检测空气流量。

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