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    • 1. 发明授权
    • Thermal type air flow sensor
    • 热式气流传感器
    • US06349596B1
    • 2002-02-26
    • US09461190
    • 1999-12-15
    • Keiichi NakadaIzumi WatanabeHiroshi Yoneda
    • Keiichi NakadaIzumi WatanabeHiroshi Yoneda
    • G01F168
    • G01F1/6845G01F1/692G01F1/696G01F15/043
    • A thermal type air flow sensor which corrects variation of characteristics of a thermal type air flow sensor due to adherence or deposition of fouling contained in an intake air for maintaining an initial accuracy. An air flow rate is measured by means of a heating resistor and a temperature measuring resistor formed by semiconductor fine patterning. A part of the semiconductor substrate is removed. The heating resistor and a portion of the temperature measuring resistor are formed above a space defined by removing the semiconductor substrate. A voltage of the portion of the temperature measuring resistor located above the space is detected for correcting an error in measurement of an intake air using the voltage detected.
    • 一种热式空气流量传感器,其用于校正由于包含在进气中的污垢的粘附或沉积导致的热式空气流量传感器的特性的变化,以保持初始精度。 通过加热电阻器和通过半导体精细图案化形成的温度测量电阻器来测量空气流量。 去除半导体衬底的一部分。 加热电阻器和温度测量电阻器的一部分形成在通过去除半导体衬底限定的空间的上方。 检测位于空间上方的温度测量电阻器的部分的电压,以使用检测到的电压来校正进气测量误差。
    • 2. 发明授权
    • Air flow sensor
    • 气流传感器
    • US06516785B1
    • 2003-02-11
    • US09763967
    • 2001-02-28
    • Keiichi NakadaIzumi WatanabeHiroshi YonedaKei UeyamaMasamichi Yamada
    • Keiichi NakadaIzumi WatanabeHiroshi YonedaKei UeyamaMasamichi Yamada
    • G01F1692
    • G01F1/684F02D41/187G01F1/6842G01F1/6845G01F1/692G01F1/698G01F5/00H01L2224/48091H01L2224/8592H01L2924/19105H01L2924/00014
    • In a thermal air flow sensor, an air flow measuring element and an intake air temperature sensing element of an intake air temperature sensor are mounted on a single support member so as to be positioned within an intake passage. The support member is made of a glass-ceramic material for example and is held by a holder secured to the wall of an intake pipe. The support member has a structure whereby both sides of a portion of the support member located on the side away from the intake pipe wall are easy to be taken away their heat by an air flow moving through the intake pipe. The air flow measuring element and the intake air temperature sensing element are disposed on such a heat-removed surface of the support member and are electrically connected respectively to conductors disposed on the support member, with their electric connections being sealed with resin, whereby the intake air temperature sensor and the air flow sensor can be rendered integral with each other.
    • 在热空气流量传感器中,进气温度传感器的气流测量元件和进气温度感测元件安装在单个支撑构件上,以便定位在进气通道内。 支撑构件例如由玻璃陶瓷材料制成,并由固定在进气管壁上的保持架保持。 支撑构件具有这样的结构,其中位于远离进气管壁的一侧的支撑构件的一部分的两侧容易被移动通过进气管的气流带走其热量。 气流测量元件和进气温度感测元件设置在支撑构件的这种除热表面上,并且分别电连接到设置在支撑构件上的导体,其电连接用树脂密封,由此进气 空气温度传感器和空气流量传感器可以彼此成为一体。
    • 5. 发明申请
    • Thermal type flow measuring apparatus
    • 热式流量测量仪
    • US20070024119A1
    • 2007-02-01
    • US11480979
    • 2006-07-06
    • Izumi WatanabeJunichi HorieKeiichi Nakada
    • Izumi WatanabeJunichi HorieKeiichi Nakada
    • B60L1/00
    • G01F1/692G01F1/6845G01F1/698
    • A thermal type flow measuring apparatus includes a heating resistor provided in a thin part of a substrate and a bridge circuit for driving the heating resistor to have a preset heating temperature, wherein resistor elements on sides forming the bridge circuit are temperature sensitive resistors, a part or whole of at least one of the temperature sensitive resistors is placed in the thin part and near the heating resistor so that the temperature sensitive resistor is influenced by a heat of the heating resistor, and the preset heating temperature is increased as the flow of fluid is increased. This configuration introduces flow dependency into the heating temperature of the heating resistor.
    • 一种热式流量测量装置包括设置在基板的薄部分中的加热电阻器和用于驱动加热电阻器以具有预设加热温度的桥接电路,其中形成桥接电路的侧面上的电阻器元件是温度敏感电阻器, 或整个温度敏感电阻器中的至少一个放置在薄部分和靠近加热电阻器处,使得温度敏感电阻器受到加热电阻器的热量的影响,并且预设加热温度随着流体流动而增加 增加了。 该配置将流依赖性引入加热电阻器的加热温度。
    • 6. 发明申请
    • Thermal flow sensor
    • 热流量传感器
    • US20060144138A1
    • 2006-07-06
    • US10546174
    • 2004-05-26
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • Masamichi YamadaIzumi WatanabeKeiichi NakadaJunichi Horie
    • G01F1/68
    • G01F1/6845G01F1/698
    • A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature ({Th=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
    • 一种以低成本制造并具有改进的可靠性的热流传感器。 在形成在半导体衬底(2)中的空腔(7)上,在腔的中心附近形成至少一个加热电阻(4),其中电绝缘膜置于加热电阻和空腔之间。 加热电阻(4)的温度(Th)通过恒温({Th = Th-Ta))控制为高于介质温度(Ta)。 从加热电阻(4)的上游端到位于空腔上的电绝缘膜的上游端和恒温(DeltaTh)的气流方向的距离(Ws)满足以下关系: line-formula description =“In-line Formulas”end =“lead”?> DeltaTh / Ws <= 800(°C / mm)<?in-line-formula description =“In-line Formulas”end =“tail 因此,提供了能够防止由热诱导效应引起的诸如碳颗粒的漂浮微粒的沉积的热流量传感器,可以以低成本制造,并且具有高可靠性。
    • 8. 发明授权
    • Mass airflow measuring apparatus
    • 大气流量测仪
    • US06860149B2
    • 2005-03-01
    • US10652029
    • 2003-09-02
    • Shinya IgarashiAtsushi KankeRintarou MinamitaniKeiichi NakadaIzumi Watanabe
    • Shinya IgarashiAtsushi KankeRintarou MinamitaniKeiichi NakadaIzumi Watanabe
    • G01F1/68F02D35/00F02D41/04F02D45/00G01F1/696G01F1/698
    • G01F1/6983F02D41/042
    • To offer a mass airflow measuring apparatus in which the effect of the adhesion onto the heating resistor caused while the engine is off is reduced and the measuring accuracy is improved. The apparatus measures the mass airflow of the air sucked into the internal combustion engine, using the heating resistor 1. The power control circuit 4 maintains the heating resistor 1 temperature equal to or higher than the temperature during the operation of the internal combustion engine after the internal combustion engine has stopped and until the temperature of the internal combustion engine and its apparatuses installed in the suction system has lowered below the generation temperature of volatile gas such as oil vapor. The power control circuit 4, using the temperature sensing resistor 2 that detects the temperature of the air sucked into the combustion engine, detects the air temperature and maintains the heating resistor 1 temperature, based on the temperature measured, equal to or higher than the temperature during the operation of the internal combustion engine even after the internal combustion engine has stopped.
    • 提供一种质量气流测量装置,其中在发动机关闭时引起在加热电阻器上的附着力的影响减小,并且提高了测量精度。 该装置使用加热电阻器1测量吸入内燃机的空气的质量气流。功率控制电路4将发热电阻体1的温度保持在等于或高于内燃机运转后的温度 内燃机已经停止,并且直到安装在抽吸系统中的内燃机及其装置的温度降低到低于诸如油蒸气的挥发性气体的发生温度。 功率控制电路4使用检测吸入到内燃机中的空气的温度的温度检测电阻器2,根据测得的温度检测空气温度并维持加热电阻器1的温度等于或高于温度 即使在内燃机停止之后,内燃机的运转也是如此。