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1. 发明申请

US20070024119A1 Thermal type flow measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US20070024119A1
公开(公告)日：2007-02-01
申请号：US11480979
申请日：2006-07-06
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada
IPC分类号： B60L1/00
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/698
摘要： A thermal type flow measuring apparatus includes a heating resistor provided in a thin part of a substrate and a bridge circuit for driving the heating resistor to have a preset heating temperature, wherein resistor elements on sides forming the bridge circuit are temperature sensitive resistors, a part or whole of at least one of the temperature sensitive resistors is placed in the thin part and near the heating resistor so that the temperature sensitive resistor is influenced by a heat of the heating resistor, and the preset heating temperature is increased as the flow of fluid is increased. This configuration introduces flow dependency into the heating temperature of the heating resistor.
摘要翻译：一种热式流量测量装置包括设置在基板的薄部分中的加热电阻器和用于驱动加热电阻器以具有预设加热温度的桥接电路，其中形成桥接电路的侧面上的电阻器元件是温度敏感电阻器，或整个温度敏感电阻器中的至少一个放置在薄部分和靠近加热电阻器处，使得温度敏感电阻器受到加热电阻器的热量的影响，并且预设加热温度随着流体流动而增加增加了。该配置将流依赖性引入加热电阻器的加热温度。

2. 发明申请

US20060144138A1 Thermal flow sensor 有权
标题翻译：热流量传感器
公开(公告)号：US20060144138A1
公开(公告)日：2006-07-06
申请号：US10546174
申请日：2004-05-26
申请人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
发明人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/698
摘要： A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature ({Th=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
摘要翻译：一种以低成本制造并具有改进的可靠性的热流传感器。在形成在半导体衬底（2）中的空腔（7）上，在腔的中心附近形成至少一个加热电阻（4），其中电绝缘膜置于加热电阻和空腔之间。加热电阻（4）的温度（Th）通过恒温（{Th = Th-Ta））控制为高于介质温度（Ta）。从加热电阻（4）的上游端到位于空腔上的电绝缘膜的上游端和恒温（DeltaTh）的气流方向的距离（Ws）满足以下关系： line-formula description =“In-line Formulas”end =“lead”？> DeltaTh / Ws <= 800（°C / mm）<？in-line-formula description =“In-line Formulas”end =“tail 因此，提供了能够防止由热诱导效应引起的诸如碳颗粒的漂浮微粒的沉积的热流量传感器，可以以低成本制造，并且具有高可靠性。

3. 发明申请

US20060065049A1 Fluid flow sensor and fluid flow measurement device 有权
标题翻译：流体流量传感器和流体流量测量装置
公开(公告)号：US20060065049A1
公开(公告)日：2006-03-30
申请号：US11206820
申请日：2005-08-19
申请人： Keiichi Nakada , Junichi Horie , Hiroshi Nakano , Izumi Watanabe
发明人： Keiichi Nakada , Junichi Horie , Hiroshi Nakano , Izumi Watanabe
IPC分类号： G01F1/68
CPC分类号： G01F1/699 , G01F1/6842 , G01F1/692
摘要： A Thermal type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive resistors are disposed on the thin film of the substrate so as to be located on an adjacent upstream side and an adjacent downstream side of the heating resistor in a stream direction of fluid to be measured. Resistor traces for the thermal sensitive resistors are formed so that the respective thermal sensitive resistors exhibit substantially equal changes in resistance with each other to distortion caused in the thin film.
摘要翻译：热式流体流量传感器包括形成在基板的薄膜上的加热电阻器和构成桥接电路的多个热敏电阻器。热敏电阻器设置在基板的薄膜上，以便沿着待测流体的流动方向位于加热电阻器的相邻上游侧和相邻的下游侧。形成用于热敏电阻器的电阻迹线，使得相应的热敏电阻器在薄膜中产生的失真相对于电阻变化相当大。

4. 发明授权

US06571621B2 Thermal flow rate measuring device 有权
公开(公告)号：US06571621B2
公开(公告)日：2003-06-03
申请号：US09951967
申请日：2001-09-14
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama
IPC分类号： G01F500
CPC分类号： G01F5/00 , G01F1/6842 , G01F15/12
摘要： A thermal type flow rate measuring device can certainly prevent adhesion of water droplet onto a sensor element and thus achieve high reliability. The thermal type flow rate measuring device includes an auxiliary passage defined within a main passage for introducing a part of fluid flowing through the main passage, a sensor disposed within the auxiliary passage for detecting flow rate of the fluid and capturing means formed on an inner periphery of the auxiliary passage for capturing liquid contained in the fluid and transferring the captured liquid.

5. 发明授权

US07650784B2 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US07650784B2
公开(公告)日：2010-01-26
申请号：US12139761
申请日：2008-06-16
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

6. 发明申请

US20060272403A1 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US20060272403A1
公开(公告)日：2006-12-07
申请号：US11505987
申请日：2006-08-18
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

7. 发明授权

US07032446B2 Flowrate measuring device with improved flow introduction into sub-passage outlet 有权
标题翻译：流量测量装置，具有改进的通流入子通道出口
公开(公告)号：US07032446B2
公开(公告)日：2006-04-25
申请号：US10083403
申请日：2002-02-27
申请人： Keiichi Nakada , Izumi Watanabe , Junichi Horie , Kei Ueyama , Hiromu Kikawa , Masamichi Yamada
发明人： Keiichi Nakada , Izumi Watanabe , Junichi Horie , Kei Ueyama , Hiromu Kikawa , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/684 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： There is provided a flow rate measuring device which comprises a means for introducing a backward flow of the main passage into the sub-passage through the outlet of the sub-passage of the flow rate measuring device is provided near the outlet of the sub-passage, in order to keep the flow rate measuring element from being destroyed under the presence of dust and water in an intake manifold and which has high reliability for a long period of use and an excellent pulsation characteristic.
摘要翻译：提供了一种流量测量装置，其包括用于将主通道的逆流引导到通过流量测量装置的子通道的出口的子通道的装置，设置在子通道的出口附近为了保持流量测量元件在进气歧管中存在灰尘和水的情况下被破坏，并且长时间使用具有高可靠性和优异的脉动特性。

8. 发明申请

US20050186696A1 Gas flowmeter and manufacturing method thereof 有权
公开(公告)号：US20050186696A1
公开(公告)日：2005-08-25
申请号：US11088175
申请日：2005-03-24
申请人： Masamichi Yamada , Junichi Horie , Izumi Watanabe , Keiichi Nakada
发明人： Masamichi Yamada , Junichi Horie , Izumi Watanabe , Keiichi Nakada
IPC分类号： F02D35/00 , G01F1/684 , G01F1/692 , H01L21/00 , H01L21/469
CPC分类号： G01F1/692 , G01F1/6845 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by way of an insulating film. The heat element is a silicon (Si) semiconductor thin film impurity-doped at high concentration. Stoichiometrically stable silicon nitride (Si3N4) thin films as barrier layers which less permeate and less absorb hydrogen in the heat generating temperature range of the heat element are formed above and below the silicon (Si) semiconductor thin film.

9. 发明授权

US06925866B2 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US06925866B2
公开(公告)日：2005-08-09
申请号：US10449117
申请日：2003-06-02
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/684 , F02D35/00 , F02D41/18 , F02D45/00 , G01F1/692 , G01F1/698 , G01F1/699 , G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

10. 发明授权

US06694810B2 Air flow meter 有权
标题翻译：空气流量计
公开(公告)号：US06694810B2
公开(公告)日：2004-02-24
申请号：US10201896
申请日：2002-07-25
申请人： Kei Ueyama , Izumi Watanabe , Keiichi Nakada , Junichi Horie
发明人： Kei Ueyama , Izumi Watanabe , Keiichi Nakada , Junichi Horie
IPC分类号： G01F1684
CPC分类号： G01F1/688 , G01F1/684
摘要： A support member where a flow amount detection element, which includes a heating resistor and electronic circuit parts for obtaining the air flow amount according to the flow amount signal detected by flow amount detection element are mounted, is cooled from both the direction of the main flow of main passage and the direction of an anti-main flow (i.e., the direction opposite to the direction of the main flow).
摘要翻译：安装流量检测元件的支撑构件，其中安装有流量检测元件，其包括加热电阻器和用于根据由流量检测元件检测的流量信号获得空气流量的电子电路部件，从主流动方向的主通道和反主流的方向（即与主流动方向相反的方向）。

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