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    • 71. 发明授权
    • Gas for removing deposit and removal method using same
    • 用于除去沉积物和除去方法的气体使用它
    • US07168436B2
    • 2007-01-30
    • US10705532
    • 2003-11-12
    • Isamu MouriTetsuya TamuraMitsuya Ohashi
    • Isamu MouriTetsuya TamuraMitsuya Ohashi
    • B08B9/00H01L21/00
    • C03C15/00C03C17/00C03C2218/33C09K13/00C23F4/00H01L21/31116H01L21/32136Y10S438/905Y10S438/906
    • The invention relates to a gas for removing deposits by a gas-solid reaction. This gas includes a hypofluorite that is defined as being a compound having at least one OF group in the molecule. Various deposits can be removed by the gas, and the gas can easily be made unharmful on the global environment after the removal of the deposits, due to the use of a hypofluorite. The gas may be a cleaning gas for cleaning, for example, the inside of an apparatus for producing semiconductor devices. This cleaning gas comprises 1–100 volume % of the hypofluorite. Alternatively, the gas of the invention may be an etching gas for removing an unwanted portion of a film deposited on a substrate. The unwanted portion can be removed by this etching gas as precisely as originally designed, due to the use of a hypofluorite. The invention further relates to a method for removing a deposit by the gas. This method includes the step (a) bringing the gas into contact with the deposit, thereby to remove the deposit by a gas-solid reaction.
    • 本发明涉及通过气 - 固反应去除沉积物的气体。 该气体包括被定义为在分子中具有至少一个OF基团的化合物的次氟酸盐。 各种沉积物可以被气体除去,并且由于使用次氟酸盐,在清除沉积物之后,气体可以容易地在全球环境中变得不起作用。 气体可以是用于清洁的清洁气体,例如用于制造半导体器件的设备的内部。 该清洁气体包含1-100体积%的次氟酸盐。 或者,本发明的气体可以是用于去除沉积在基板上的膜的不希望的部分的蚀刻气体。 由于使用次氟酸盐,可以通过精确地由原始设计的这种蚀刻气体除去不想要的部分。 本发明还涉及一种通过气体去除沉积物的方法。 该方法包括步骤(a)使气体与沉积物接触,从而通过气固反应除去沉积物。
    • 72. 发明申请
    • Recording apparatus
    • 记录装置
    • US20060250721A1
    • 2006-11-09
    • US11401711
    • 2006-04-11
    • Kazuya SuzukiHajime NishimuraTetsuya TamuraTakeshi Sasa
    • Kazuya SuzukiHajime NishimuraTetsuya TamuraTakeshi Sasa
    • G11B5/09
    • G11B20/1258G11B20/10G11B27/329G11B2020/1221G11B2020/1267G11B2220/2516
    • There is provided a recording apparatus which includes a recording medium having a data area with an address assigned to each cluster of a predetermined size; an interface for connection to a host apparatus; writing means for writing data in the data area; access order deciding means for dividing the data area of the recording medium into a plurality of areas each having an optional data capacity, and deciding an order of accessing the divided areas from the writing means; timing deciding means for deciding a timing when file information on written data is to be updated; control means for controlling the writing means to access a plurality of divided areas in accordance with the decided access order, search an empty cluster in the accessed area, and write data in the searched empty cluster and file information updating means for updating the file information on already written data.
    • 提供了一种记录装置,其包括具有分配给预定大小的每个簇的地址的数据区的记录介质; 用于连接到主机设备的接口; 用于在数据区中写入数据的写入装置; 存取顺序决定装置,用于将记录介质的数据区划分为多个具有可选数据容量的区,并且从写装置确定访问划分区的顺序; 定时决定装置,用于决定要更新关于写入数据的文件信息时的定时; 控制装置,用于根据所确定的访问顺序控制写入装置访问多个分割区域,搜索所访问区域中的空集群,以及在所搜索的空集群中写入数据,以及文件信息更新装置,用于更新关于 已经写了数据。
    • 76. 发明授权
    • Multiple level (ML), integrated sector format (ISF), error correction code (ECC) encoding and decoding processes for data storage or communication devices and systems
    • 用于数据存储或通信设备和系统的多级(ML),集成扇区格式(ISF),纠错码(ECC)编码和解码过程
    • US06903887B2
    • 2005-06-07
    • US10040115
    • 2002-01-03
    • Hideo AsanoMartin Aureliano HassnerNyles Norbert HeiseTetsuya Tamura
    • Hideo AsanoMartin Aureliano HassnerNyles Norbert HeiseTetsuya Tamura
    • G11B5/012G11B5/09G11B20/18G11B27/36
    • G11B20/1866G11B5/012G11B5/09
    • A method and an apparatus encodes and decodes blocks having a predetermined number of sectors of data bytes to detect and correct data bytes in error in each sector of a block. The method and the apparatus generates sector level check bytes for each sector in the block responsive to the data bytes in each sector according to a first level of an error correction code, and generates block level check bytes for a predetermined sector in the block responsive to the sector level check bytes of various sectors, including the predetermined sector, according to at least a second level of the error correction code. The method and apparatus processes the block to detect and correct data bytes in error in each sector within the capability of the sector level check bytes, to detect and correct data bytes in error in the at least two sectors that exceed the correction capability of the sector level check bytes but within the correction capability of the block level check bytes, or to indicate that the data bytes in error in the at least two sectors exceed the correction capability of each of the sector level check bytes and the block level check bytes. The method and apparatus improves signal quality for long streams of information having multiple sequential physical blocks of data bytes, such as audio visual information, with a low check byte overhead while being compatible with conventional 512 data byte sized sectors and conventional single sector error correction code processes.
    • 一种方法和装置对具有预定数量的数据字节扇区的块进行编码和解码以检测和校正块的每个扇区中的错误数据字节。 该方法和装置响应于每个扇区中的数据字节根据纠错码的第一级产生块中的每个扇区的扇区级检查字节,并响应于该块中的预定扇区生成块级校验字节 根据纠错码的至少第二级别,包括预定扇区的各个扇区的扇区级检查字节。 所述方法和装置处理该块以在扇区级检查字节的能力内检测和校正每个扇区中的错误数据字节,以检测并校正超过扇区校正能力的至少两个扇区中的错误数据字节 级别检查字节,但在块级检查字节的校正能力内,或指示至少两个扇区中的错误数据字节超过扇区级检查字节和块级校验字节中的每一级的校正能力。 该方法和装置改善具有数据字节的多个连续物理块的长信息流的信号质量,例如视听信息,具有低检查字节开销,同时与传统的512个数据字节大小的扇区兼容,并且传统的单扇区纠错码 过程。